Materials science in microelectronics:
Gespeichert in:
1. Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Amsterdam
Elsevier
2005-
|
Ausgabe: | 2nd ed |
Schlagworte: | |
Online-Zugang: | Volltext Volltext |
Beschreibung: | The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties Includes bibliographical references and indexes |
Beschreibung: | 1 Online-Ressource (v. <1>) |
ISBN: | 9780080446394 0080446396 9780080446400 008044640X 0080459609 9780080459608 |
Internformat
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100 | 1 | |a Machlin, E. S. |e Verfasser |4 aut | |
245 | 1 | 0 | |a Materials science in microelectronics |c E.S. Machlin |
250 | |a 2nd ed | ||
264 | 1 | |a Amsterdam |b Elsevier |c 2005- | |
300 | |a 1 Online-Ressource (v. <1>) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties | ||
500 | |a Includes bibliographical references and indexes | ||
650 | 7 | |a Microelectronics |2 fast | |
650 | 7 | |a Thin films |2 fast | |
650 | 4 | |a Thin films | |
650 | 4 | |a Microelectronics | |
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Datensatz im Suchindex
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any_adam_object | |
author | Machlin, E. S. |
author_facet | Machlin, E. S. |
author_role | aut |
author_sort | Machlin, E. S. |
author_variant | e s m es esm |
building | Verbundindex |
bvnumber | BV042317072 |
collection | ZDB-33-ESD ZDB-33-EBS |
ctrlnum | (OCoLC)162568290 (DE-599)BVBBV042317072 |
dewey-full | 612.38152 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 612 - Human physiology |
dewey-raw | 612.38152 |
dewey-search | 612.38152 |
dewey-sort | 3612.38152 |
dewey-tens | 610 - Medicine and health |
discipline | Medizin |
edition | 2nd ed |
format | Electronic eBook |
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id | DE-604.BV042317072 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:18:16Z |
institution | BVB |
isbn | 9780080446394 0080446396 9780080446400 008044640X 0080459609 9780080459608 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027754063 |
oclc_num | 162568290 |
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owner_facet | DE-1046 |
physical | 1 Online-Ressource (v. <1>) |
psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD |
publishDate | 2005 |
publishDateSearch | 2005 |
publishDateSort | 2005 |
publisher | Elsevier |
record_format | marc |
spelling | Machlin, E. S. Verfasser aut Materials science in microelectronics E.S. Machlin 2nd ed Amsterdam Elsevier 2005- 1 Online-Ressource (v. <1>) txt rdacontent c rdamedia cr rdacarrier The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties Includes bibliographical references and indexes Microelectronics fast Thin films fast Thin films Microelectronics http://www.sciencedirect.com/science/book/9780080446394 Verlag Volltext http://www.sciencedirect.com/science/book/9780080446400 Verlag Volltext |
spellingShingle | Machlin, E. S. Materials science in microelectronics Microelectronics fast Thin films fast Thin films Microelectronics |
title | Materials science in microelectronics |
title_auth | Materials science in microelectronics |
title_exact_search | Materials science in microelectronics |
title_full | Materials science in microelectronics E.S. Machlin |
title_fullStr | Materials science in microelectronics E.S. Machlin |
title_full_unstemmed | Materials science in microelectronics E.S. Machlin |
title_short | Materials science in microelectronics |
title_sort | materials science in microelectronics |
topic | Microelectronics fast Thin films fast Thin films Microelectronics |
topic_facet | Microelectronics Thin films |
url | http://www.sciencedirect.com/science/book/9780080446394 http://www.sciencedirect.com/science/book/9780080446400 |
work_keys_str_mv | AT machlines materialsscienceinmicroelectronics |