APA-Zitierstil (7. Ausg.)

(2001). Handbook of VLSI microlithography: Principles, technology, and applications (2nd ed.). Noyes Publications.

Chicago-Zitierstil (17. Ausg.)

Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2nd ed. Park Ridge, N.J: Noyes Publications, 2001.

MLA-Zitierstil (9. Ausg.)

Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2nd ed. Noyes Publications, 2001.