Sputtering materials for VLSI and thin film devices:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Norwich, N.Y.
William Andrew
2011
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| Schlagworte: | |
| Online-Zugang: | FAW01 FLA01 Volltext |
| Beschreibung: | An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed. The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting. Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirementsPractical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc.Practical case-studies on target performance and troubleshooting. Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry |
| Beschreibung: | 1 Online-Ressource (1 online resource) |
| ISBN: | 9780080947716 0080947719 9780815515937 0815515936 9780815519874 0815519877 1306119952 9781306119955 |
Internformat
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| 264 | 1 | |a Norwich, N.Y. |b William Andrew |c 2011 | |
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| 500 | |a An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed. The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting. Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirementsPractical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc.Practical case-studies on target performance and troubleshooting. Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry | ||
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| author | Sarkar, Jaydeep |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:18:12Z |
| institution | BVB |
| isbn | 9780080947716 0080947719 9780815515937 0815515936 9780815519874 0815519877 1306119952 9781306119955 |
| language | English |
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| spelling | Sarkar, Jaydeep Verfasser aut Sputtering materials for VLSI and thin film devices Jaydeep Sarkar Norwich, N.Y. William Andrew 2011 1 Online-Ressource (1 online resource) txt rdacontent c rdamedia cr rdacarrier An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed. The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting. Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirementsPractical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc.Practical case-studies on target performance and troubleshooting. Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectronics Materials Flat panel displays Materials Sputtering (Physics) http://www.sciencedirect.com/science/book/9780815515937 Verlag Volltext |
| spellingShingle | Sarkar, Jaydeep Sputtering materials for VLSI and thin film devices TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectronics Materials Flat panel displays Materials Sputtering (Physics) |
| title | Sputtering materials for VLSI and thin film devices |
| title_auth | Sputtering materials for VLSI and thin film devices |
| title_exact_search | Sputtering materials for VLSI and thin film devices |
| title_full | Sputtering materials for VLSI and thin film devices Jaydeep Sarkar |
| title_fullStr | Sputtering materials for VLSI and thin film devices Jaydeep Sarkar |
| title_full_unstemmed | Sputtering materials for VLSI and thin film devices Jaydeep Sarkar |
| title_short | Sputtering materials for VLSI and thin film devices |
| title_sort | sputtering materials for vlsi and thin film devices |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectronics Materials Flat panel displays Materials Sputtering (Physics) |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Microelectronics Materials Flat panel displays Materials Sputtering (Physics) |
| url | http://www.sciencedirect.com/science/book/9780815515937 |
| work_keys_str_mv | AT sarkarjaydeep sputteringmaterialsforvlsiandthinfilmdevices |