Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Waltham, MA
William Andrew
c2012
|
| Ausgabe: | 2nd ed |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere |
| Beschreibung: | 1 Online-Ressource (1 online resource) |
| ISBN: | 9781437734836 1437734839 |
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| 500 | |a This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere | ||
| 650 | 7 | |a Handbooks, manuals, etc |2 fast | |
| 650 | 7 | |a Cathode sputtering (Plating process) |2 fast | |
| 650 | 7 | |a Thin films |2 fast | |
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| 700 | 1 | |a Kotera, Hidetoshi |e Sonstige |4 oth | |
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| dewey-full | 671.7/38 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.7/38 |
| dewey-search | 671.7/38 |
| dewey-sort | 3671.7 238 |
| dewey-tens | 670 - Manufacturing |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| edition | 2nd ed |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:18:11Z |
| institution | BVB |
| isbn | 9781437734836 1437734839 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027752043 |
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| spelling | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera 2nd ed Waltham, MA William Andrew c2012 1 Online-Ressource (1 online resource) txt rdacontent c rdamedia cr rdacarrier This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere Handbooks, manuals, etc fast Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc Adachi, Hideaki Sonstige oth Wasa, Kiyotaka Sonstige oth Kanno, Isaku Sonstige oth Kotera, Hidetoshi Sonstige oth http://www.sciencedirect.com/science/book/9781437734836 Verlag Volltext |
| spellingShingle | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Handbooks, manuals, etc fast Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc |
| title | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS |
| title_auth | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS |
| title_exact_search | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS |
| title_full | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| title_fullStr | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| title_full_unstemmed | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| title_short | Handbook of sputter deposition technology |
| title_sort | handbook of sputter deposition technology fundamentals and applications for functional thin films nano materials and mems |
| title_sub | fundamentals and applications for functional thin films, nano-materials and MEMS |
| topic | Handbooks, manuals, etc fast Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc |
| topic_facet | Handbooks, manuals, etc Cathode sputtering (Plating process) Thin films Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc |
| url | http://www.sciencedirect.com/science/book/9781437734836 |
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