Fundamental principles of engineering nanometrology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford
William Andrew
©2010
|
| Ausgabe: | 1st ed |
| Schriftenreihe: | Micro & nano technologies
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. Provides a basic introduction to measurement and instruments & nbsp; Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge Includes bibliographical references and index |
| Beschreibung: | 1 Online-Ressource (xxvi, 321 pages) |
| ISBN: | 9780080964546 0080964540 1437778321 9781437778328 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV042314807 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 150129s2010 |||| o||u| ||||||eng d | ||
| 020 | |a 9780080964546 |9 978-0-08-096454-6 | ||
| 020 | |a 0080964540 |9 0-08-096454-0 | ||
| 020 | |a 1437778321 |c electronic bk. |9 1-4377-7832-1 | ||
| 020 | |a 9781437778328 |c electronic bk. |9 978-1-4377-7832-8 | ||
| 035 | |a (OCoLC)528581485 | ||
| 035 | |a (DE-599)BVBBV042314807 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 | ||
| 082 | 0 | |a 620.50287 |2 22 | |
| 100 | 1 | |a Leach, R. K. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Fundamental principles of engineering nanometrology |c by Richard K. Leach |
| 250 | |a 1st ed | ||
| 264 | 1 | |a Oxford |b William Andrew |c ©2010 | |
| 300 | |a 1 Online-Ressource (xxvi, 321 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Micro & nano technologies | |
| 500 | |a The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. | ||
| 500 | |a In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. | ||
| 500 | |a Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. | ||
| 500 | |a Provides a basic introduction to measurement and instruments & nbsp; Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. |2 bisacsh | |
| 650 | 7 | |a Metrology |2 fast | |
| 650 | 7 | |a Microtechnology |2 fast | |
| 650 | 7 | |a Nanotechnology |2 fast | |
| 650 | 4 | |a Nanotechnology | |
| 650 | 4 | |a Microtechnology | |
| 650 | 4 | |a Metrology | |
| 650 | 0 | 7 | |a Metrologie |0 (DE-588)4169749-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanostruktur |0 (DE-588)4204530-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Nanostruktur |0 (DE-588)4204530-7 |D s |
| 689 | 0 | 1 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | 2 | |a Metrologie |0 (DE-588)4169749-2 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780080964546 |x Verlag |3 Volltext |
| 912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
| 940 | 1 | |q FAW_PDA_ESD | |
| 940 | 1 | |q FLA_PDA_ESD | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027751798 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804152908324798464 |
|---|---|
| any_adam_object | |
| author | Leach, R. K. |
| author_facet | Leach, R. K. |
| author_role | aut |
| author_sort | Leach, R. K. |
| author_variant | r k l rk rkl |
| building | Verbundindex |
| bvnumber | BV042314807 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (OCoLC)528581485 (DE-599)BVBBV042314807 |
| dewey-full | 620.50287 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.50287 |
| dewey-search | 620.50287 |
| dewey-sort | 3620.50287 |
| dewey-tens | 620 - Engineering and allied operations |
| edition | 1st ed |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04632nmm a2200613zc 4500</leader><controlfield tag="001">BV042314807</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s2010 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780080964546</subfield><subfield code="9">978-0-08-096454-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0080964540</subfield><subfield code="9">0-08-096454-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1437778321</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-4377-7832-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781437778328</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-4377-7832-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)528581485</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042314807</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.50287</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Leach, R. K.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Fundamental principles of engineering nanometrology</subfield><subfield code="c">by Richard K. Leach</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1st ed</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">William Andrew</subfield><subfield code="c">©2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xxvi, 321 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Micro & nano technologies</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. </subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. </subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. </subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Provides a basic introduction to measurement and instruments & nbsp; Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS.</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Metrology</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microtechnology</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanotechnology</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microtechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metrology</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanostruktur</subfield><subfield code="0">(DE-588)4204530-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanostruktur</subfield><subfield code="0">(DE-588)4204530-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780080964546</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FLA_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027751798</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| id | DE-604.BV042314807 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:18:11Z |
| institution | BVB |
| isbn | 9780080964546 0080964540 1437778321 9781437778328 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027751798 |
| oclc_num | 528581485 |
| open_access_boolean | |
| owner | DE-1046 |
| owner_facet | DE-1046 |
| physical | 1 Online-Ressource (xxvi, 321 pages) |
| psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew |
| record_format | marc |
| series2 | Micro & nano technologies |
| spelling | Leach, R. K. Verfasser aut Fundamental principles of engineering nanometrology by Richard K. Leach 1st ed Oxford William Andrew ©2010 1 Online-Ressource (xxvi, 321 pages) txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. Key topics covered include: Basic metrological terminology, and the highly important topic of measurement uncertainty. Instrumentation, including an introduction to the laser Measurement of length using optical interferometry, including gauge block interferometry Displacement measurement and sensors Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation Coordinate metrology Low mass and force metrology About the Author Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. Provides a basic introduction to measurement and instruments & nbsp; Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Metrology fast Microtechnology fast Nanotechnology fast Nanotechnology Microtechnology Metrology Metrologie (DE-588)4169749-2 gnd rswk-swf Nanostruktur (DE-588)4204530-7 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanostruktur (DE-588)4204530-7 s Nanotechnologie (DE-588)4327470-5 s Metrologie (DE-588)4169749-2 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780080964546 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Leach, R. K. Fundamental principles of engineering nanometrology TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Metrology fast Microtechnology fast Nanotechnology fast Nanotechnology Microtechnology Metrology Metrologie (DE-588)4169749-2 gnd Nanostruktur (DE-588)4204530-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4169749-2 (DE-588)4204530-7 (DE-588)4327470-5 |
| title | Fundamental principles of engineering nanometrology |
| title_auth | Fundamental principles of engineering nanometrology |
| title_exact_search | Fundamental principles of engineering nanometrology |
| title_full | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_fullStr | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_full_unstemmed | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_short | Fundamental principles of engineering nanometrology |
| title_sort | fundamental principles of engineering nanometrology |
| topic | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Metrology fast Microtechnology fast Nanotechnology fast Nanotechnology Microtechnology Metrology Metrologie (DE-588)4169749-2 gnd Nanostruktur (DE-588)4204530-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Metrology Microtechnology Nanotechnology Metrologie Nanostruktur Nanotechnologie |
| url | http://www.sciencedirect.com/science/book/9780080964546 |
| work_keys_str_mv | AT leachrk fundamentalprinciplesofengineeringnanometrology |