A user's guide to ellipsometry:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston
Academic Press
© 1993
|
| Schlagworte: | |
| Online-Zugang: | FAW01 Volltext |
| Beschreibung: | Includes bibliographical references and index This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth. Key Features * Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications * Provides comprehensive discussion of the measurement of film thickness and optical constants in film * Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameters * Includes 14 case studies to reinforce specific applications * Includes three appendices for helpful references |
| Beschreibung: | 1 Online-Ressource (xv, 260 pages) |
| ISBN: | 0126939500 1299195350 9780126939507 9781299195356 |
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| 500 | |a Includes bibliographical references and index | ||
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Datensatz im Suchindex
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| author | Tompkins, Harland G. 1938- |
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| id | DE-604.BV042312375 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:18:06Z |
| institution | BVB |
| isbn | 0126939500 1299195350 9780126939507 9781299195356 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027749366 |
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| physical | 1 Online-Ressource (xv, 260 pages) |
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| publishDate | 1993 |
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| publisher | Academic Press |
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| spelling | Tompkins, Harland G. 1938- Verfasser (DE-588)129994987 aut A user's guide to ellipsometry Harland G. Tompkins Boston Academic Press © 1993 1 Online-Ressource (xv, 260 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth. Key Features * Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications * Provides comprehensive discussion of the measurement of film thickness and optical constants in film * Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameters * Includes 14 case studies to reinforce specific applications * Includes three appendices for helpful references Light Case studies fast Ellipsométrie Ellipsométrie / Cas, Études de Ellipsometry fast Ellipsométrie ram Surfaces (technologie) ram Couches minces / Technologie ram Ellipsometrie swd Ellipsometry Ellipsometry Case studies Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Oberflächeneigenschaft (DE-588)4219221-3 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf Reflektometrie (DE-588)4296759-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4522595-3 Fallstudiensammlung gnd-content Werkstoff (DE-588)4065579-9 s Dünne Schicht (DE-588)4136925-7 s Oberflächeneigenschaft (DE-588)4219221-3 s Reflektometrie (DE-588)4296759-4 s 1\p DE-604 Ellipsometrie (DE-588)4152025-7 s 2\p DE-604 http://www.sciencedirect.com/science/book/9780126939507 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Tompkins, Harland G. 1938- A user's guide to ellipsometry Light Case studies fast Ellipsométrie Ellipsométrie / Cas, Études de Ellipsometry fast Ellipsométrie ram Surfaces (technologie) ram Couches minces / Technologie ram Ellipsometrie swd Ellipsometry Ellipsometry Case studies Ellipsometrie (DE-588)4152025-7 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Werkstoff (DE-588)4065579-9 gnd Reflektometrie (DE-588)4296759-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4152025-7 (DE-588)4219221-3 (DE-588)4065579-9 (DE-588)4296759-4 (DE-588)4136925-7 (DE-588)4522595-3 |
| title | A user's guide to ellipsometry |
| title_auth | A user's guide to ellipsometry |
| title_exact_search | A user's guide to ellipsometry |
| title_full | A user's guide to ellipsometry Harland G. Tompkins |
| title_fullStr | A user's guide to ellipsometry Harland G. Tompkins |
| title_full_unstemmed | A user's guide to ellipsometry Harland G. Tompkins |
| title_short | A user's guide to ellipsometry |
| title_sort | a user s guide to ellipsometry |
| topic | Light Case studies fast Ellipsométrie Ellipsométrie / Cas, Études de Ellipsometry fast Ellipsométrie ram Surfaces (technologie) ram Couches minces / Technologie ram Ellipsometrie swd Ellipsometry Ellipsometry Case studies Ellipsometrie (DE-588)4152025-7 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Werkstoff (DE-588)4065579-9 gnd Reflektometrie (DE-588)4296759-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Light Case studies Ellipsométrie Ellipsométrie / Cas, Études de Ellipsometry Surfaces (technologie) Couches minces / Technologie Ellipsometrie Ellipsometry Case studies Oberflächeneigenschaft Werkstoff Reflektometrie Dünne Schicht Fallstudiensammlung |
| url | http://www.sciencedirect.com/science/book/9780126939507 |
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