Handbook of chemical vapor deposition (CVD): principles, technology, and applications
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Park Ridge, N.J., U.S.A.
Noyes Publications
©1992
|
Schlagworte: | |
Online-Zugang: | FAW01 Volltext |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | 1 Online-Ressource (xxii, 436 pages) |
ISBN: | 0815513003 1437744885 9780815513001 9781437744880 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV042310800 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 150129s1992 |||| o||u| ||||||eng d | ||
020 | |a 0815513003 |9 0-8155-1300-3 | ||
020 | |a 1437744885 |c electronic bk. |9 1-4377-4488-5 | ||
020 | |a 9780815513001 |9 978-0-8155-1300-1 | ||
020 | |a 9781437744880 |c electronic bk. |9 978-1-4377-4488-0 | ||
035 | |a (OCoLC)644087334 | ||
035 | |a (DE-599)BVBBV042310800 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-1046 | ||
082 | 0 | |a 671.7/35 |2 20 | |
100 | 1 | |a Pierson, Hugh O. |e Verfasser |4 aut | |
245 | 1 | 0 | |a Handbook of chemical vapor deposition (CVD) |b principles, technology, and applications |c by Hugh O. Pierson |
246 | 1 | 3 | |a Chemical vapor deposition |
264 | 1 | |a Park Ridge, N.J., U.S.A. |b Noyes Publications |c ©1992 | |
300 | |a 1 Online-Ressource (xxii, 436 pages) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
650 | 7 | |a Handbooks, manuals, etc |2 fast | |
650 | 7 | |a TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades |2 bisacsh | |
650 | 7 | |a Dépôt chimique en phase vapeur / Manuels d'enseignement |2 ram | |
650 | 7 | |a Dépôt en phase vapeur / traitement surface |2 ram | |
650 | 7 | |a CVD-Verfahren |2 swd | |
650 | 7 | |a Vapor-plating |2 fast | |
650 | 4 | |a Vapor-plating |v Handbooks, manuals, etc | |
650 | 0 | 7 | |a CVD-Verfahren |0 (DE-588)4009846-1 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a CVD-Verfahren |0 (DE-588)4009846-1 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780815513001 |x Verlag |3 Volltext |
912 | |a ZDB-33-ESD | ||
999 | |a oai:aleph.bib-bvb.de:BVB01-027747792 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
966 | e | |u http://www.sciencedirect.com/science/book/9780815513001 |l FAW01 |p ZDB-33-ESD |q FAW_PDA_ESD |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804152899925704704 |
---|---|
any_adam_object | |
author | Pierson, Hugh O. |
author_facet | Pierson, Hugh O. |
author_role | aut |
author_sort | Pierson, Hugh O. |
author_variant | h o p ho hop |
building | Verbundindex |
bvnumber | BV042310800 |
collection | ZDB-33-ESD |
ctrlnum | (OCoLC)644087334 (DE-599)BVBBV042310800 |
dewey-full | 671.7/35 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 671 - Metalworking & primary metal products |
dewey-raw | 671.7/35 |
dewey-search | 671.7/35 |
dewey-sort | 3671.7 235 |
dewey-tens | 670 - Manufacturing |
discipline | Werkstoffwissenschaften / Fertigungstechnik |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01996nmm a2200493zc 4500</leader><controlfield tag="001">BV042310800</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s1992 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815513003</subfield><subfield code="9">0-8155-1300-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1437744885</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-4377-4488-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815513001</subfield><subfield code="9">978-0-8155-1300-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781437744880</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-4377-4488-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)644087334</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042310800</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">671.7/35</subfield><subfield code="2">20</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Pierson, Hugh O.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of chemical vapor deposition (CVD)</subfield><subfield code="b">principles, technology, and applications</subfield><subfield code="c">by Hugh O. Pierson</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Chemical vapor deposition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Park Ridge, N.J., U.S.A.</subfield><subfield code="b">Noyes Publications</subfield><subfield code="c">©1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xxii, 436 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Handbooks, manuals, etc</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Dépôt chimique en phase vapeur / Manuels d'enseignement</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Dépôt en phase vapeur / traitement surface</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">CVD-Verfahren</subfield><subfield code="2">swd</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Vapor-plating</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Vapor-plating</subfield><subfield code="v">Handbooks, manuals, etc</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CVD-Verfahren</subfield><subfield code="0">(DE-588)4009846-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">CVD-Verfahren</subfield><subfield code="0">(DE-588)4009846-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780815513001</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027747792</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780815513001</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV042310800 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:18:03Z |
institution | BVB |
isbn | 0815513003 1437744885 9780815513001 9781437744880 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027747792 |
oclc_num | 644087334 |
open_access_boolean | |
owner | DE-1046 |
owner_facet | DE-1046 |
physical | 1 Online-Ressource (xxii, 436 pages) |
psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
publishDate | 1992 |
publishDateSearch | 1992 |
publishDateSort | 1992 |
publisher | Noyes Publications |
record_format | marc |
spelling | Pierson, Hugh O. Verfasser aut Handbook of chemical vapor deposition (CVD) principles, technology, and applications by Hugh O. Pierson Chemical vapor deposition Park Ridge, N.J., U.S.A. Noyes Publications ©1992 1 Online-Ressource (xxii, 436 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Handbooks, manuals, etc fast TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Dépôt chimique en phase vapeur / Manuels d'enseignement ram Dépôt en phase vapeur / traitement surface ram CVD-Verfahren swd Vapor-plating fast Vapor-plating Handbooks, manuals, etc CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780815513001 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Pierson, Hugh O. Handbook of chemical vapor deposition (CVD) principles, technology, and applications Handbooks, manuals, etc fast TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Dépôt chimique en phase vapeur / Manuels d'enseignement ram Dépôt en phase vapeur / traitement surface ram CVD-Verfahren swd Vapor-plating fast Vapor-plating Handbooks, manuals, etc CVD-Verfahren (DE-588)4009846-1 gnd |
subject_GND | (DE-588)4009846-1 |
title | Handbook of chemical vapor deposition (CVD) principles, technology, and applications |
title_alt | Chemical vapor deposition |
title_auth | Handbook of chemical vapor deposition (CVD) principles, technology, and applications |
title_exact_search | Handbook of chemical vapor deposition (CVD) principles, technology, and applications |
title_full | Handbook of chemical vapor deposition (CVD) principles, technology, and applications by Hugh O. Pierson |
title_fullStr | Handbook of chemical vapor deposition (CVD) principles, technology, and applications by Hugh O. Pierson |
title_full_unstemmed | Handbook of chemical vapor deposition (CVD) principles, technology, and applications by Hugh O. Pierson |
title_short | Handbook of chemical vapor deposition (CVD) |
title_sort | handbook of chemical vapor deposition cvd principles technology and applications |
title_sub | principles, technology, and applications |
topic | Handbooks, manuals, etc fast TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Dépôt chimique en phase vapeur / Manuels d'enseignement ram Dépôt en phase vapeur / traitement surface ram CVD-Verfahren swd Vapor-plating fast Vapor-plating Handbooks, manuals, etc CVD-Verfahren (DE-588)4009846-1 gnd |
topic_facet | Handbooks, manuals, etc TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades Dépôt chimique en phase vapeur / Manuels d'enseignement Dépôt en phase vapeur / traitement surface CVD-Verfahren Vapor-plating Vapor-plating Handbooks, manuals, etc |
url | http://www.sciencedirect.com/science/book/9780815513001 |
work_keys_str_mv | AT piersonhugho handbookofchemicalvapordepositioncvdprinciplestechnologyandapplications AT piersonhugho chemicalvapordeposition |