Thin film processes II:
Gespeichert in:
Bibliographische Detailangaben
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Boston Academic Press c1991
Schlagworte:
Online-Zugang:FAW01
Volltext
Beschreibung:Includes bibliographical references and index
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application
Beschreibung:1 Online-Ressource (xiii, 866 p.)
ISBN:0080524214
0127282513
1601192908
9780080524214
9780127282510
9781601192905

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