Thin film processes II:
Gespeichert in:
Format: | Elektronisch E-Book |
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Sprache: | English |
Veröffentlicht: |
Boston
Academic Press
c1991
|
Schlagworte: | |
Online-Zugang: | FAW01 Volltext |
Beschreibung: | Includes bibliographical references and index This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application |
Beschreibung: | 1 Online-Ressource (xiii, 866 p.) |
ISBN: | 0080524214 0127282513 1601192908 9780080524214 9780127282510 9781601192905 |
Internformat
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020 | |a 9780080524214 |9 978-0-08-052421-4 | ||
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082 | 0 | |a 621.381/52 |2 22 | |
245 | 1 | 0 | |a Thin film processes II |c edited by John L. Vossen, Werner Kern |
246 | 1 | 3 | |a Thin film processes two |
264 | 1 | |a Boston |b Academic Press |c c1991 | |
300 | |a 1 Online-Ressource (xiii, 866 p.) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
500 | |a This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application | ||
650 | 4 | |a Thin films | |
650 | 4 | |a Couches minces | |
650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Semiconductors |2 bisacsh | |
650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Solid State |2 bisacsh | |
650 | 7 | |a Thin films |2 fast | |
650 | 4 | |a Thin films | |
700 | 1 | |a Vossen, John L. |e Sonstige |4 oth | |
700 | 1 | |a Kern, Werner |e Sonstige |4 oth | |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780080524214 |x Verlag |3 Volltext |
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Datensatz im Suchindex
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any_adam_object | |
building | Verbundindex |
bvnumber | BV042310700 |
collection | ZDB-33-ESD |
ctrlnum | (OCoLC)144646036 (DE-599)BVBBV042310700 |
dewey-full | 621.381/52 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381/52 |
dewey-search | 621.381/52 |
dewey-sort | 3621.381 252 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Electronic eBook |
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id | DE-604.BV042310700 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:18:03Z |
institution | BVB |
isbn | 0080524214 0127282513 1601192908 9780080524214 9780127282510 9781601192905 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027747692 |
oclc_num | 144646036 |
open_access_boolean | |
owner | DE-1046 |
owner_facet | DE-1046 |
physical | 1 Online-Ressource (xiii, 866 p.) |
psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
publishDate | 1991 |
publishDateSearch | 1991 |
publishDateSort | 1991 |
publisher | Academic Press |
record_format | marc |
spelling | Thin film processes II edited by John L. Vossen, Werner Kern Thin film processes two Boston Academic Press c1991 1 Online-Ressource (xiii, 866 p.) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application Thin films Couches minces TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Thin films fast Vossen, John L. Sonstige oth Kern, Werner Sonstige oth http://www.sciencedirect.com/science/book/9780080524214 Verlag Volltext |
spellingShingle | Thin film processes II Thin films Couches minces TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Thin films fast |
title | Thin film processes II |
title_alt | Thin film processes two |
title_auth | Thin film processes II |
title_exact_search | Thin film processes II |
title_full | Thin film processes II edited by John L. Vossen, Werner Kern |
title_fullStr | Thin film processes II edited by John L. Vossen, Werner Kern |
title_full_unstemmed | Thin film processes II edited by John L. Vossen, Werner Kern |
title_short | Thin film processes II |
title_sort | thin film processes ii |
topic | Thin films Couches minces TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Thin films fast |
topic_facet | Thin films Couches minces TECHNOLOGY & ENGINEERING / Electronics / Semiconductors TECHNOLOGY & ENGINEERING / Electronics / Solid State |
url | http://www.sciencedirect.com/science/book/9780080524214 |
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