Handbook of ellipsometry:
Gespeichert in:
Format: | Elektronisch E-Book |
---|---|
Sprache: | English |
Veröffentlicht: |
Norwich, NY
William Andrew Pub.
c2005
|
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry Includes bibliographical references and index |
Beschreibung: | 1 Online-Ressource (xvi, 870 p.) |
ISBN: | 9780815514992 0815514999 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV042304520 | ||
003 | DE-604 | ||
005 | 20200131 | ||
007 | cr|uuu---uuuuu | ||
008 | 150129s2005 |||| o||u| ||||||eng d | ||
020 | |a 9780815514992 |9 978-0-8155-1499-2 | ||
020 | |a 0815514999 |9 0-8155-1499-9 | ||
035 | |a (OCoLC)310147997 | ||
035 | |a (DE-599)BVBBV042304520 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-1046 | ||
082 | 0 | |a 620.1/1295 |2 22 | |
245 | 1 | 0 | |a Handbook of ellipsometry |c edited by Harland G. Tompkins and Eugene A. Irene |
264 | 1 | |a Norwich, NY |b William Andrew Pub. |c c2005 | |
300 | |a 1 Online-Ressource (xvi, 870 p.) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry | ||
500 | |a Includes bibliographical references and index | ||
650 | 7 | |a Ellipsometry |2 fast | |
650 | 4 | |a Ellipsometry | |
650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Ellipsometrie |0 (DE-588)4152025-7 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
700 | 1 | |a Tompkins, Harland G. |d 1938- |e Sonstige |0 (DE-588)129994987 |4 oth | |
700 | 1 | |a Irene, Eugene A. |e Sonstige |4 oth | |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780815514992 |x Verlag |3 Volltext |
912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
940 | 1 | |q FAW_PDA_ESD | |
940 | 1 | |q FLA_PDA_ESD | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027741512 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk |
Datensatz im Suchindex
_version_ | 1804152886609838080 |
---|---|
any_adam_object | |
author_GND | (DE-588)129994987 |
building | Verbundindex |
bvnumber | BV042304520 |
collection | ZDB-33-ESD ZDB-33-EBS |
ctrlnum | (OCoLC)310147997 (DE-599)BVBBV042304520 |
dewey-full | 620.1/1295 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.1/1295 |
dewey-search | 620.1/1295 |
dewey-sort | 3620.1 41295 |
dewey-tens | 620 - Engineering and allied operations |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02644nmm a2200433zc 4500</leader><controlfield tag="001">BV042304520</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200131 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s2005 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815514992</subfield><subfield code="9">978-0-8155-1499-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815514999</subfield><subfield code="9">0-8155-1499-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)310147997</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042304520</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.1/1295</subfield><subfield code="2">22</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of ellipsometry</subfield><subfield code="c">edited by Harland G. Tompkins and Eugene A. Irene</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Norwich, NY</subfield><subfield code="b">William Andrew Pub.</subfield><subfield code="c">c2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xvi, 870 p.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ellipsometry</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ellipsometry</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tompkins, Harland G.</subfield><subfield code="d">1938-</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)129994987</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Irene, Eugene A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780815514992</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FLA_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027741512</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
id | DE-604.BV042304520 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:17:50Z |
institution | BVB |
isbn | 9780815514992 0815514999 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027741512 |
oclc_num | 310147997 |
open_access_boolean | |
owner | DE-1046 |
owner_facet | DE-1046 |
physical | 1 Online-Ressource (xvi, 870 p.) |
psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD |
publishDate | 2005 |
publishDateSearch | 2005 |
publishDateSort | 2005 |
publisher | William Andrew Pub. |
record_format | marc |
spelling | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene Norwich, NY William Andrew Pub. c2005 1 Online-Ressource (xvi, 870 p.) txt rdacontent c rdamedia cr rdacarrier The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry Includes bibliographical references and index Ellipsometry fast Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 s 1\p DE-604 Tompkins, Harland G. 1938- Sonstige (DE-588)129994987 oth Irene, Eugene A. Sonstige oth http://www.sciencedirect.com/science/book/9780815514992 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Handbook of ellipsometry Ellipsometry fast Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd |
subject_GND | (DE-588)4152025-7 |
title | Handbook of ellipsometry |
title_auth | Handbook of ellipsometry |
title_exact_search | Handbook of ellipsometry |
title_full | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene |
title_fullStr | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene |
title_full_unstemmed | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene |
title_short | Handbook of ellipsometry |
title_sort | handbook of ellipsometry |
topic | Ellipsometry fast Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd |
topic_facet | Ellipsometry Ellipsometrie |
url | http://www.sciencedirect.com/science/book/9780815514992 |
work_keys_str_mv | AT tompkinsharlandg handbookofellipsometry AT ireneeugenea handbookofellipsometry |