High density plasma sources: design, physics, and performance
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Park Ridge, N.J.
Noyes Publications
c1995
|
| Schriftenreihe: | Materials science and process technology series
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Includes bibliographical references and index This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing |
| Beschreibung: | 1 Online-Ressource (xx, 445 p.) |
| ISBN: | 1591240638 9781591240631 9780815513773 0815513771 9780080946160 008094616X 9780815517887 0815517882 9780815517894 |
Internformat
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| 300 | |a 1 Online-Ressource (xx, 445 p.) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series | |
| 500 | |a Includes bibliographical references and index | ||
| 500 | |a This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing | ||
| 650 | 7 | |a High temperature plasmas |2 fast | |
| 650 | 7 | |a Plasma density |2 fast | |
| 650 | 7 | |a Plasma generators |2 fast | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 4 | |a Plasma density | |
| 650 | 4 | |a High temperature plasmas | |
| 650 | 4 | |a Plasma generators | |
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Datensatz im Suchindex
| _version_ | 1804152885905195008 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV042304207 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (OCoLC)49708645 (DE-599)BVBBV042304207 |
| dewey-full | 530.4/42 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/42 |
| dewey-search | 530.4/42 |
| dewey-sort | 3530.4 242 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Electronic eBook |
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| id | DE-604.BV042304207 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:17:50Z |
| institution | BVB |
| isbn | 1591240638 9781591240631 9780815513773 0815513771 9780080946160 008094616X 9780815517887 0815517882 9780815517894 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027741199 |
| oclc_num | 49708645 |
| open_access_boolean | |
| owner | DE-1046 |
| owner_facet | DE-1046 |
| physical | 1 Online-Ressource (xx, 445 p.) |
| psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Noyes Publications |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | High density plasma sources design, physics, and performance edited by Oleg A. Popov Park Ridge, N.J. Noyes Publications c1995 1 Online-Ressource (xx, 445 p.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Includes bibliographical references and index This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing High temperature plasmas fast Plasma density fast Plasma generators fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Plasma density High temperature plasmas Plasma generators Industrie (DE-588)4026779-9 gnd rswk-swf Polymere (DE-588)4046699-1 gnd rswk-swf Heißes Plasma (DE-588)4350270-2 gnd rswk-swf Plasmaerzeugung (DE-588)4174826-8 gnd rswk-swf Hochleistungswerkstoff (DE-588)4312250-4 gnd rswk-swf Heißes Plasma (DE-588)4350270-2 s Plasmaerzeugung (DE-588)4174826-8 s 1\p DE-604 Industrie (DE-588)4026779-9 s Polymere (DE-588)4046699-1 s Hochleistungswerkstoff (DE-588)4312250-4 s DE-604 Popov, Oleg A. Sonstige oth http://www.sciencedirect.com/science/book/9780815513773 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | High density plasma sources design, physics, and performance High temperature plasmas fast Plasma density fast Plasma generators fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Plasma density High temperature plasmas Plasma generators Industrie (DE-588)4026779-9 gnd Polymere (DE-588)4046699-1 gnd Heißes Plasma (DE-588)4350270-2 gnd Plasmaerzeugung (DE-588)4174826-8 gnd Hochleistungswerkstoff (DE-588)4312250-4 gnd |
| subject_GND | (DE-588)4026779-9 (DE-588)4046699-1 (DE-588)4350270-2 (DE-588)4174826-8 (DE-588)4312250-4 |
| title | High density plasma sources design, physics, and performance |
| title_auth | High density plasma sources design, physics, and performance |
| title_exact_search | High density plasma sources design, physics, and performance |
| title_full | High density plasma sources design, physics, and performance edited by Oleg A. Popov |
| title_fullStr | High density plasma sources design, physics, and performance edited by Oleg A. Popov |
| title_full_unstemmed | High density plasma sources design, physics, and performance edited by Oleg A. Popov |
| title_short | High density plasma sources |
| title_sort | high density plasma sources design physics and performance |
| title_sub | design, physics, and performance |
| topic | High temperature plasmas fast Plasma density fast Plasma generators fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Plasma density High temperature plasmas Plasma generators Industrie (DE-588)4026779-9 gnd Polymere (DE-588)4046699-1 gnd Heißes Plasma (DE-588)4350270-2 gnd Plasmaerzeugung (DE-588)4174826-8 gnd Hochleistungswerkstoff (DE-588)4312250-4 gnd |
| topic_facet | High temperature plasmas Plasma density Plasma generators TECHNOLOGY & ENGINEERING / Mechanical Industrie Polymere Heißes Plasma Plasmaerzeugung Hochleistungswerkstoff |
| url | http://www.sciencedirect.com/science/book/9780815513773 |
| work_keys_str_mv | AT popovolega highdensityplasmasourcesdesignphysicsandperformance |