Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Norwich, N.Y.
Noyes Publications/William Andrew Pub.
c2002
|
| Edition: | 2nd ed |
| Series: | Materials science and process technology series
|
| Subjects: | |
| Online Access: | Volltext |
| Item Description: | The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (xxviii, 629 p.) |
| ISBN: | 1591241936 9781591241935 9780815517788 0815517785 9780815514428 0815514425 9780815517764 0815517769 |
Staff View
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Record in the Search Index
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/2 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed |
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| id | DE-604.BV042304205 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:17:50Z |
| institution | BVB |
| isbn | 1591241936 9781591241935 9780815517788 0815517785 9780815514428 0815514425 9780815517764 0815517769 |
| language | English |
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| publishDate | 2002 |
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| publisher | Noyes Publications/William Andrew Pub. |
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| series2 | Materials science and process technology series |
| spelling | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications edited by Krishna Seshan 2nd ed Norwich, N.Y. Noyes Publications/William Andrew Pub. c2002 1 Online-Ressource (xxviii, 629 p.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials Includes bibliographical references and index Handbooks, manuals, etc fast Filmes finos (equipamentos) larpcal TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Chemical vapor deposition fast Thin film devices / Design and construction fast Thin films fast Thin film devices Design and construction Handbooks, manuals, etc Thin films Handbooks, manuals, etc Chemical vapor deposition Handbooks, manuals, etc Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 s Fertigung (DE-588)4016899-2 s Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Halbleitertechnologie (DE-588)4158814-9 s 2\p DE-604 Seshan, Krishna Sonstige oth http://www.sciencedirect.com/science/book/9780815514428 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications Handbooks, manuals, etc fast Filmes finos (equipamentos) larpcal TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Chemical vapor deposition fast Thin film devices / Design and construction fast Thin films fast Thin film devices Design and construction Handbooks, manuals, etc Thin films Handbooks, manuals, etc Chemical vapor deposition Handbooks, manuals, etc Halbleitertechnologie (DE-588)4158814-9 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4136339-5 (DE-588)4027242-4 (DE-588)4016899-2 |
| title | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications |
| title_auth | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications |
| title_exact_search | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications |
| title_full | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications edited by Krishna Seshan |
| title_fullStr | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications edited by Krishna Seshan |
| title_full_unstemmed | Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications edited by Krishna Seshan |
| title_short | Handbook of thin-film deposition processes and techniques |
| title_sort | handbook of thin film deposition processes and techniques principles methods equipment and applications |
| title_sub | principles, methods, equipment and applications |
| topic | Handbooks, manuals, etc fast Filmes finos (equipamentos) larpcal TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Chemical vapor deposition fast Thin film devices / Design and construction fast Thin films fast Thin film devices Design and construction Handbooks, manuals, etc Thin films Handbooks, manuals, etc Chemical vapor deposition Handbooks, manuals, etc Halbleitertechnologie (DE-588)4158814-9 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Handbooks, manuals, etc Filmes finos (equipamentos) TECHNOLOGY & ENGINEERING / Electronics / Solid State TECHNOLOGY & ENGINEERING / Electronics / Semiconductors Chemical vapor deposition Thin film devices / Design and construction Thin films Thin film devices Design and construction Handbooks, manuals, etc Thin films Handbooks, manuals, etc Chemical vapor deposition Handbooks, manuals, etc Halbleitertechnologie Dünnschichttechnik Integrierte Schaltung Fertigung |
| url | http://www.sciencedirect.com/science/book/9780815514428 |
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