(2002). Handbook of thin-film deposition processes and techniques: Principles, methods, equipment and applications (2nd ed.). Noyes Publications/William Andrew Pub.
Chicago-Zitierstil (17. Ausg.)Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment and Applications. 2nd ed. Norwich, N.Y: Noyes Publications/William Andrew Pub, 2002.
MLA-Zitierstil (9. Ausg.)Handbook of Thin-film Deposition Processes and Techniques: Principles, Methods, Equipment and Applications. 2nd ed. Noyes Publications/William Andrew Pub, 2002.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.