Plasma sources for thin film deposition and etching:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
San Diego, CA.
Academic Press
1994
|
| Schriftenreihe: | Physics of thin films
volume 18 |
| Schlagworte: | |
| Online-Zugang: | FAW01 Volltext |
| Beschreibung: | Includes bibliographical references and indexes |
| Beschreibung: | 1 Online-Ressource (xiii, 397 pages) |
| ISBN: | 0080925138 0125330189 9780080925134 9780125330183 |
Internformat
MARC
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| 245 | 1 | 0 | |a Plasma sources for thin film deposition and etching |c edited by Maurice H. Francombe, John L. Vossen |
| 264 | 1 | |a San Diego, CA. |b Academic Press |c 1994 | |
| 300 | |a 1 Online-Ressource (xiii, 397 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Physics of thin films |v volume 18 | |
| 500 | |a Includes bibliographical references and indexes | ||
| 650 | 7 | |a Couches minces |2 ram | |
| 650 | 7 | |a Projection au plasma |2 ram | |
| 650 | 7 | |a Technique des plasmas |2 ram | |
| 650 | 7 | |a Dünne Schicht |2 swd | |
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| 650 | 7 | |a Plasmaanlage |2 swd | |
| 650 | 7 | |a Ätzen |2 swd | |
| 650 | 7 | |a Thin films |2 fast | |
| 650 | 4 | |a Thin films | |
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| 650 | 0 | 7 | |a Plasmaanlage |0 (DE-588)4139324-7 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Francombe, Maurice H. |e Sonstige |4 oth | |
| 700 | 1 | |a Vossen, John L. |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/175 |
| dewey-search | 530.4/175 |
| dewey-sort | 3530.4 3175 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:17:46Z |
| institution | BVB |
| isbn | 0080925138 0125330189 9780080925134 9780125330183 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027739311 |
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| owner_facet | DE-1046 |
| physical | 1 Online-Ressource (xiii, 397 pages) |
| psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Academic Press |
| record_format | marc |
| series2 | Physics of thin films |
| spelling | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen San Diego, CA. Academic Press 1994 1 Online-Ressource (xiii, 397 pages) txt rdacontent c rdamedia cr rdacarrier Physics of thin films volume 18 Includes bibliographical references and indexes Couches minces ram Projection au plasma ram Technique des plasmas ram Dünne Schicht swd Herstellung swd Plasmaanlage swd Ätzen swd Thin films fast Thin films Ätzen (DE-588)4000648-7 gnd rswk-swf Herstellung (DE-588)4159653-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Plasmaanlage (DE-588)4139324-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Ätzen (DE-588)4000648-7 s Plasmaanlage (DE-588)4139324-7 s 1\p DE-604 Herstellung (DE-588)4159653-5 s 2\p DE-604 Francombe, Maurice H. Sonstige oth Vossen, John L. Sonstige oth http://www.sciencedirect.com/science/book/9780080925134 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Plasma sources for thin film deposition and etching Couches minces ram Projection au plasma ram Technique des plasmas ram Dünne Schicht swd Herstellung swd Plasmaanlage swd Ätzen swd Thin films fast Thin films Ätzen (DE-588)4000648-7 gnd Herstellung (DE-588)4159653-5 gnd Dünne Schicht (DE-588)4136925-7 gnd Plasmaanlage (DE-588)4139324-7 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4159653-5 (DE-588)4136925-7 (DE-588)4139324-7 |
| title | Plasma sources for thin film deposition and etching |
| title_auth | Plasma sources for thin film deposition and etching |
| title_exact_search | Plasma sources for thin film deposition and etching |
| title_full | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen |
| title_fullStr | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen |
| title_full_unstemmed | Plasma sources for thin film deposition and etching edited by Maurice H. Francombe, John L. Vossen |
| title_short | Plasma sources for thin film deposition and etching |
| title_sort | plasma sources for thin film deposition and etching |
| topic | Couches minces ram Projection au plasma ram Technique des plasmas ram Dünne Schicht swd Herstellung swd Plasmaanlage swd Ätzen swd Thin films fast Thin films Ätzen (DE-588)4000648-7 gnd Herstellung (DE-588)4159653-5 gnd Dünne Schicht (DE-588)4136925-7 gnd Plasmaanlage (DE-588)4139324-7 gnd |
| topic_facet | Couches minces Projection au plasma Technique des plasmas Dünne Schicht Herstellung Plasmaanlage Ätzen Thin films |
| url | http://www.sciencedirect.com/science/book/9780080925134 |
| work_keys_str_mv | AT francombemauriceh plasmasourcesforthinfilmdepositionandetching AT vossenjohnl plasmasourcesforthinfilmdepositionandetching |