Nanolithography: the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford
Woodhead Publishing
2014
|
| Schriftenreihe: | Woodhead Publishing series in electronic and optical materials
|
| Schlagworte: | |
| Online-Zugang: | FUBA1 Volltext |
| Beschreibung: | Previously issued in print: 2013 |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9780857098757 0857098756 9780857095008 |
Internformat
MARC
| LEADER | 00000nmm a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV042300144 | ||
| 003 | DE-604 | ||
| 005 | 20230317 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 150129s2014 |||| o||u| ||||||eng d | ||
| 015 | |a GBB430575 |2 dnb | ||
| 020 | |a 9780857098757 |c PDF ebook |9 978-0-85709-875-7 | ||
| 020 | |a 0857098756 |c PDF ebook |9 0-85709-875-6 | ||
| 020 | |a 9780857095008 |9 978-0-85709-500-8 | ||
| 035 | |a (OCoLC)872990995 | ||
| 035 | |a (DE-599)BVBBV042300144 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-188 | ||
| 082 | 0 | |a 621.381531 |2 23 | |
| 245 | 1 | 0 | |a Nanolithography |b the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |c edited by Martin Feldman |
| 264 | 1 | |a Oxford |b Woodhead Publishing |c 2014 | |
| 300 | |a 1 Online-Ressource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Woodhead Publishing series in electronic and optical materials | |
| 500 | |a Previously issued in print: 2013 | ||
| 650 | 7 | |a Nanolithography |2 fast | |
| 650 | 4 | |a Nanolithography | |
| 650 | 0 | 7 | |a Nanolithografie |0 (DE-588)4706129-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Nanolithografie |0 (DE-588)4706129-7 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Feldman, Martin |0 (DE-588)1125125969 |4 edt | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780857095008 |x Verlag |3 Volltext |
| 912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
| 940 | 1 | |q FAW_PDA_ESD | |
| 940 | 1 | |q FLA_PDA_ESD | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027737136 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780857095008 |l FUBA1 |p ZDB-33-ESD |q ZDB-33-ESD 2021 |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804152877216694272 |
|---|---|
| any_adam_object | |
| author2 | Feldman, Martin |
| author2_role | edt |
| author2_variant | m f mf |
| author_GND | (DE-588)1125125969 |
| author_facet | Feldman, Martin |
| building | Verbundindex |
| bvnumber | BV042300144 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (OCoLC)872990995 (DE-599)BVBBV042300144 |
| dewey-full | 621.381531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381531 |
| dewey-search | 621.381531 |
| dewey-sort | 3621.381531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01738nmm a2200457 c 4500</leader><controlfield tag="001">BV042300144</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20230317 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s2014 |||| o||u| ||||||eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">GBB430575</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857098757</subfield><subfield code="c">PDF ebook</subfield><subfield code="9">978-0-85709-875-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0857098756</subfield><subfield code="c">PDF ebook</subfield><subfield code="9">0-85709-875-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857095008</subfield><subfield code="9">978-0-85709-500-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)872990995</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042300144</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381531</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Nanolithography</subfield><subfield code="b">the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems</subfield><subfield code="c">edited by Martin Feldman</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">Woodhead Publishing</subfield><subfield code="c">2014</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Woodhead Publishing series in electronic and optical materials</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Previously issued in print: 2013</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanolithography</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanolithography</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanolithografie</subfield><subfield code="0">(DE-588)4706129-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanolithografie</subfield><subfield code="0">(DE-588)4706129-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Feldman, Martin</subfield><subfield code="0">(DE-588)1125125969</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780857095008</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FLA_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027737136</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780857095008</subfield><subfield code="l">FUBA1</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">ZDB-33-ESD 2021</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV042300144 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:17:41Z |
| institution | BVB |
| isbn | 9780857098757 0857098756 9780857095008 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027737136 |
| oclc_num | 872990995 |
| open_access_boolean | |
| owner | DE-1046 DE-188 |
| owner_facet | DE-1046 DE-188 |
| physical | 1 Online-Ressource |
| psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD ZDB-33-ESD ZDB-33-ESD 2021 |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | Woodhead Publishing |
| record_format | marc |
| series2 | Woodhead Publishing series in electronic and optical materials |
| spelling | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman Oxford Woodhead Publishing 2014 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Woodhead Publishing series in electronic and optical materials Previously issued in print: 2013 Nanolithography fast Nanolithography Nanolithografie (DE-588)4706129-7 gnd rswk-swf Nanolithografie (DE-588)4706129-7 s 1\p DE-604 Feldman, Martin (DE-588)1125125969 edt http://www.sciencedirect.com/science/book/9780857095008 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems Nanolithography fast Nanolithography Nanolithografie (DE-588)4706129-7 gnd |
| subject_GND | (DE-588)4706129-7 |
| title | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| title_auth | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| title_exact_search | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| title_full | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman |
| title_fullStr | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman |
| title_full_unstemmed | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman |
| title_short | Nanolithography |
| title_sort | nanolithography the art of fabricating nanoelectronics nanophotonics and nanobiology devices and systems |
| title_sub | the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| topic | Nanolithography fast Nanolithography Nanolithografie (DE-588)4706129-7 gnd |
| topic_facet | Nanolithography Nanolithografie |
| url | http://www.sciencedirect.com/science/book/9780857095008 |
| work_keys_str_mv | AT feldmanmartin nanolithographytheartoffabricatingnanoelectronicsnanophotonicsandnanobiologydevicesandsystems |