Plasma electronics: applications in microelectronic device fabrication
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton [u.a.]
CRC Press
2015
|
| Edition: | 2. ed. |
| Subjects: | |
| Item Description: | Literaturangaben |
| Physical Description: | XXXV, 376 S. Ill., graph. Darst. |
| ISBN: | 9781482222050 |
Staff View
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Record in the Search Index
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| any_adam_object | |
| author | Makabe, Toshiaki Petrović, Zoran Lj |
| author_facet | Makabe, Toshiaki Petrović, Zoran Lj |
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| author_sort | Makabe, Toshiaki |
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| callnumber-first | T - Technology |
| callnumber-label | TA2020 |
| callnumber-raw | TA2020 |
| callnumber-search | TA2020 |
| callnumber-sort | TA 42020 |
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| ctrlnum | (OCoLC)897489721 (DE-599)OBVAC12026283 |
| dewey-full | 621.044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.044 |
| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| edition | 2. ed. |
| format | Book |
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| id | DE-604.BV042183025 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:14:46Z |
| institution | BVB |
| isbn | 9781482222050 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027622239 |
| oclc_num | 897489721 |
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| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XXXV, 376 S. Ill., graph. Darst. |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | CRC Press |
| record_format | marc |
| spelling | Makabe, Toshiaki Verfasser aut Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic 2. ed. Boca Raton [u.a.] CRC Press 2015 XXXV, 376 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Plasmaphysik (DE-588)4046259-6 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s Mikroelektronik (DE-588)4039207-7 s Plasmaphysik (DE-588)4046259-6 s DE-604 Petrović, Zoran Lj. Verfasser aut |
| spellingShingle | Makabe, Toshiaki Petrović, Zoran Lj Plasma electronics applications in microelectronic device fabrication Plasmaphysik (DE-588)4046259-6 gnd Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)4140353-8 (DE-588)4039207-7 |
| title | Plasma electronics applications in microelectronic device fabrication |
| title_auth | Plasma electronics applications in microelectronic device fabrication |
| title_exact_search | Plasma electronics applications in microelectronic device fabrication |
| title_full | Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic |
| title_fullStr | Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic |
| title_full_unstemmed | Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic |
| title_short | Plasma electronics |
| title_sort | plasma electronics applications in microelectronic device fabrication |
| title_sub | applications in microelectronic device fabrication |
| topic | Plasmaphysik (DE-588)4046259-6 gnd Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Plasmaphysik Plasmatechnik Mikroelektronik |
| work_keys_str_mv | AT makabetoshiaki plasmaelectronicsapplicationsinmicroelectronicdevicefabrication AT petroviczoranlj plasmaelectronicsapplicationsinmicroelectronicdevicefabrication |