Plasma electronics: applications in microelectronic device fabrication
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton [u.a.]
CRC Press
2015
|
| Ausgabe: | 2. ed. |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XXXV, 376 S. Ill., graph. Darst. |
| ISBN: | 9781482222050 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV042183025 | ||
| 003 | DE-604 | ||
| 005 | 20150116 | ||
| 007 | t | ||
| 008 | 141112s2015 ad|| |||| 00||| eng d | ||
| 020 | |a 9781482222050 |c geb. |9 978-1-4822-2205-0 | ||
| 035 | |a (OCoLC)897489721 | ||
| 035 | |a (DE-599)OBVAC12026283 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T | ||
| 050 | 0 | |a TA2020 | |
| 082 | 0 | |a 621.044 | |
| 100 | 1 | |a Makabe, Toshiaki |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Plasma electronics |b applications in microelectronic device fabrication |c Toshiaki Makabe, Zoran Lj. Petrovic |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a Boca Raton [u.a.] |b CRC Press |c 2015 | |
| 300 | |a XXXV, 376 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Plasmaphysik |0 (DE-588)4046259-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmatechnik |0 (DE-588)4140353-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Plasmatechnik |0 (DE-588)4140353-8 |D s |
| 689 | 0 | 1 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | 2 | |a Plasmaphysik |0 (DE-588)4046259-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Petrović, Zoran Lj. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027622239 | ||
Datensatz im Suchindex
| _version_ | 1804152693080457216 |
|---|---|
| any_adam_object | |
| author | Makabe, Toshiaki Petrović, Zoran Lj |
| author_facet | Makabe, Toshiaki Petrović, Zoran Lj |
| author_role | aut aut |
| author_sort | Makabe, Toshiaki |
| author_variant | t m tm z l p zl zlp |
| building | Verbundindex |
| bvnumber | BV042183025 |
| callnumber-first | T - Technology |
| callnumber-label | TA2020 |
| callnumber-raw | TA2020 |
| callnumber-search | TA2020 |
| callnumber-sort | TA 42020 |
| callnumber-subject | TA - General and Civil Engineering |
| ctrlnum | (OCoLC)897489721 (DE-599)OBVAC12026283 |
| dewey-full | 621.044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.044 |
| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| edition | 2. ed. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01317nam a2200397 c 4500</leader><controlfield tag="001">BV042183025</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20150116 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">141112s2015 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781482222050</subfield><subfield code="c">geb.</subfield><subfield code="9">978-1-4822-2205-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)897489721</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)OBVAC12026283</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA2020</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.044</subfield><subfield code="2"></subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Makabe, Toshiaki</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Plasma electronics</subfield><subfield code="b">applications in microelectronic device fabrication</subfield><subfield code="c">Toshiaki Makabe, Zoran Lj. Petrovic</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2. ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boca Raton [u.a.]</subfield><subfield code="b">CRC Press</subfield><subfield code="c">2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XXXV, 376 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Petrović, Zoran Lj.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027622239</subfield></datafield></record></collection> |
| id | DE-604.BV042183025 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:14:46Z |
| institution | BVB |
| isbn | 9781482222050 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027622239 |
| oclc_num | 897489721 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XXXV, 376 S. Ill., graph. Darst. |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | CRC Press |
| record_format | marc |
| spelling | Makabe, Toshiaki Verfasser aut Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic 2. ed. Boca Raton [u.a.] CRC Press 2015 XXXV, 376 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Plasmaphysik (DE-588)4046259-6 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s Mikroelektronik (DE-588)4039207-7 s Plasmaphysik (DE-588)4046259-6 s DE-604 Petrović, Zoran Lj. Verfasser aut |
| spellingShingle | Makabe, Toshiaki Petrović, Zoran Lj Plasma electronics applications in microelectronic device fabrication Plasmaphysik (DE-588)4046259-6 gnd Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)4140353-8 (DE-588)4039207-7 |
| title | Plasma electronics applications in microelectronic device fabrication |
| title_auth | Plasma electronics applications in microelectronic device fabrication |
| title_exact_search | Plasma electronics applications in microelectronic device fabrication |
| title_full | Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic |
| title_fullStr | Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic |
| title_full_unstemmed | Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe, Zoran Lj. Petrovic |
| title_short | Plasma electronics |
| title_sort | plasma electronics applications in microelectronic device fabrication |
| title_sub | applications in microelectronic device fabrication |
| topic | Plasmaphysik (DE-588)4046259-6 gnd Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Plasmaphysik Plasmatechnik Mikroelektronik |
| work_keys_str_mv | AT makabetoshiaki plasmaelectronicsapplicationsinmicroelectronicdevicefabrication AT petroviczoranlj plasmaelectronicsapplicationsinmicroelectronicdevicefabrication |