Aluminium based micro mirrors exposed to UV laser light: in situ performance and degradation
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2014
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| Schlagworte: | |
| Online-Zugang: | kostenfrei kostenfrei kostenfrei Inhaltsverzeichnis |
| Beschreibung: | X, 145 S. Ill., graph. Darst. |
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| 245 | 1 | 0 | |a Aluminium based micro mirrors exposed to UV laser light |b in situ performance and degradation |
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Datensatz im Suchindex
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| adam_text | LIST OF ABBREVIATIONS VI
FORMULA SYMBOLS VII
1 INTRODUCTION 1
1.1 MOTIVATION 1
1.2 SPATIAL LIGHT MODULATORS 4
1.2.1 DEVELOPMENT OF THE LIGHT MODULATOR TECHNOLOGY 4
1.2.2 IPMS-SLM BASED ON ARRAYS OF PISTON-TYPE MIRRORS 5
1.2.3 IPMS - SLM BASED ON ARRAYS OF ANALOG TILTING MIRRORS 7
1.2.4 DESIGN OF THE INVESTIGATED TILTING MIRROR 7
1.3 SLM - IMAGING PRINCIPLE 12
1.3.1 GENERATION OF THE PHASE MODULATION 12
1.3.2 FOURIER OPTICAL IMAGING PRINCIPLE 13
1.3.3 EFFECT OF MIRROR TOPOGRAPHY ON THE IMAGING BEHAVIOUR 15
1.4 RADIATION INDUCED DEGRADATION EFFECTS OF MEMS AND MOEMS 17
1.4.1 LASER INDUCED FAILURE OF SILICON BASED DEVICES 17
1.4.2 LASER INDUCED FAILURE OF METAL BASED DEVICES 18
1.4.3 LASER INDUCED IONIZATION EFFECTS 19
1.5 INTERACTION OF LASER LIGHT WITH METALS 20
1.5.1 OPTICAL PROPERTIES OF METALS (AT ROOM TEMPERATURE) 20
1.5.2 FREQUENCY DEPENDENCE OF REFLECTANCE AND ABSORPTION 21
1.5.3 REAL METALLIC SURFACES 22
1.5.4 FURTHER DEPENDENCIES OF THE OPTICAL QUANTITIES 23
1.5.5 LASER-INDUCED HEATING OF METAL TARGETS .*. 24
1.6 AREAL SURFACE TEXTURE MEASUREMENT 30
1.6.1 AREAL SPECIFICATION STANDARDS 30
1.6.2 POSSIBLE MEASUREMENT METHODS 32
1.6.3 PHASE-SHIFT INTERFEROMETRY 35
2 DESIGN AND CHARACTERIZATION OF THE PHASE-SHIFT INTERFEROMETER 38
2.1 INTERFEROMETER DESIGN 38
III
HTTP://D-NB.INFO/1062583337
2.2 COMPLETE EXPERIMENTAL SETUP 41
2.3 CONTROL AND AUTOMATION . 42
2.4 CHARACTERISTIC PARAMETERS OF THE INTERFEROMETER 43
2.5 MEASUREMENT ERROR ANALYSIS 46
2.5.1 GENERAL SOURCES OF MEASUREMENT ERROR IN PSI 46
2.5.2 SYSTEM ABERRATIONS 46
2.5.3 RANDOM ERROR - MEASUREMENT NOISE 47
2.5.4 SYSTEMATIC ERROR - AMPLIFICATION AND LINEARITY OF THE Z-SCALE 49
3 LASER IRRADIATION OF SLMS AT 248NM 51
3.1 CHARACTERIZATION OF MATERIAL PROPERTIES OR DEVICES? 51
3.2 PROCEDURE OF THE MEASUREMENT DATA ANALYSIS 52
3.2.1 FROM SURFACE DATA TO THE SINGLE MIRROR BOW 52
3.2.2 REALISATION OF SINGLE AND MULTIPLE MEASUREMENT CYCLES 54
3.2.3 AVERAGING OF MIRROR SURFACE DATA 55
3.3 INVESTIGATION OF MIRROR BOW AS A FUNCTION OF DIFFERENT IRRADIATION
PARAMETERS 57
3.3.1 DEPENDENCE OF THE BOW CHANGE FROM INCIDENT ENERGY DENSITY 57
3.3.1.1 BOW CHANGE DURING THE FIRST IRRADIATION CYCLE 58
3.3.1.2 BOW CHANGE AT LOW ENERGY DENSITIES 60
3.3.1.3 BOW CHANGE AT HIGH ENERGY DENSITIES 63
3.3.2 DEPENDENCE OF THE BOW CHANGE ON THE LASER REPETITION RATE 66
3.3.3 DEPENDENCE OF THE BOW CHANGE ON THE AMBIENT ATMOSPHERE 70
3.3.4 DEPENDENCE OF THE BOW CHANGE ON THE APPLIED PULSE NUMBER 73
3.4 MEASUREMENT OF THE MIRROR TEMPERATURE DURING A LASER EXPOSURE 75
3.4.1 EXPERIMENTAL SETUP 75
3.4.2 AVERAGE MIRROR TEMPERATURE AT VARYING ENERGY LEVELS 76
3.4.3 AVERAGE MIRROR TEMPERATURE AT VARYING REPETITION RATES 80
3.4.4 TEMPERATURE CHANGE INDUCED BY A SINGLE LASER PULSE 82
3.5 A PURE THERMALLY INDUCED BOW CHANGE BY HEATING THE SAMPLE 85
4 UV LASER-INDUCED DEGRADATION OF THE MIRROR MATERIAL 87
IV
4.1 ANALYSIS OF SURFACE ROUGHNESS WITH AFM 87
4.2 ANALYSIS OF REFLECTANCE BY REFLECTOMETRY 91
4.3 ANALYSIS OF THE MIRROR PLATE WITH TEM 93
4.3.1
SAMPLE PREPARATION BY FOCUSED ION BEAM (FIB) 93
4.3.2 ANALYSIS OF THE GRAIN STRUCTURE 95
4.3.3 ANALYSIS OF THE BOUNDARY LAYER 98
4.3.4 (SPACE-RESOLVED) ELEMENT ANALYSIS 102
5 DISCUSSION 106
5.1 FUNDAMENTALLY OBSERVED BEHAVIOUR ON IRRADIATED MICRO MIRRORS 106
5.1.1 CHANGE OF THE MIRROR BOW DURING A LASER EXPOSURE 106
5.1.2 CHANGE OF THE MIRROR BOW AFTER A LASER EXPOSURE 107
5.2 EFFECT OF THE SPECIFIC IRRADIATION PARAMETERS ON THE BOW CHANGE 108
5.2.1 BOW CHANGE AS A FUNCTION OF ENERGY DENSITY AND THE DEPOSITED
ENERGY.... 108
5.2.2 BOW CHANGE AS A FUNCTION OF FURTHER IRRADIATION PARAMETERS ILL
5.3 PHYSICAL MECHANISM FOR A PARTICULAR BOW CHANGE 113
5.3.1 POSITIVE BOW CHANGE 113
5.3.2 NEGATIVE BOW CHANGE 116
6 SUMMARY 130
7 OUTLOOK 135
REFERENCES 137
V
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| any_adam_object | 1 |
| author | Mai, Alexander |
| author_facet | Mai, Alexander |
| author_role | aut |
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| dewey-full | 681.428 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.428 |
| dewey-search | 681.428 |
| dewey-sort | 3681.428 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| format | Thesis Book |
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| spelling | Mai, Alexander Verfasser aut Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation 2014 X, 145 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cottbus-Senftenberg, Techn. Univ., Diss., 2014 Aluminium (DE-588)4001573-7 gnd rswk-swf Kippspiegel (DE-588)7620751-1 gnd rswk-swf Ultraviolett-Bestrahlung (DE-588)4243843-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Kippspiegel (DE-588)7620751-1 s Aluminium (DE-588)4001573-7 s Ultraviolett-Bestrahlung (DE-588)4243843-3 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:kobv:co1-opus4-31497 http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/3149 Verlag kostenfrei Volltext http://opus4.kobv.de/opus4-btu/files/3149/Mai_Alexander.pdf Verlag kostenfrei Volltext https://nbn-resolving.org/urn:nbn:de:kobv:co1-opus4-31497 Resolving-System kostenfrei Volltext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027542692&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Mai, Alexander Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation Aluminium (DE-588)4001573-7 gnd Kippspiegel (DE-588)7620751-1 gnd Ultraviolett-Bestrahlung (DE-588)4243843-3 gnd |
| subject_GND | (DE-588)4001573-7 (DE-588)7620751-1 (DE-588)4243843-3 (DE-588)4113937-9 |
| title | Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation |
| title_auth | Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation |
| title_exact_search | Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation |
| title_full | Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation |
| title_fullStr | Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation |
| title_full_unstemmed | Aluminium based micro mirrors exposed to UV laser light in situ performance and degradation |
| title_short | Aluminium based micro mirrors exposed to UV laser light |
| title_sort | aluminium based micro mirrors exposed to uv laser light in situ performance and degradation |
| title_sub | in situ performance and degradation |
| topic | Aluminium (DE-588)4001573-7 gnd Kippspiegel (DE-588)7620751-1 gnd Ultraviolett-Bestrahlung (DE-588)4243843-3 gnd |
| topic_facet | Aluminium Kippspiegel Ultraviolett-Bestrahlung Hochschulschrift |
| url | http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/3149 http://opus4.kobv.de/opus4-btu/files/3149/Mai_Alexander.pdf https://nbn-resolving.org/urn:nbn:de:kobv:co1-opus4-31497 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027542692&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT maialexander aluminiumbasedmicromirrorsexposedtouvlaserlightinsituperformanceanddegradation |