Defect engineering of SrTiO3 thin films for resistive switching applications:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Jülich
Forschungszentrum Jülich, Zentralbibliothek
2014
|
| Schriftenreihe: | Schriften des Forschungszentrums Jülich
Reihe Information ; 35 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | XI, 145 S. Ill., graph. Darst. 24cm |
| ISBN: | 9783893369638 |
Internformat
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| 100 | 1 | |a Wicklein, Sebastian |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Defect engineering of SrTiO3 thin films for resistive switching applications |c Sebastian Wicklein |
| 264 | 1 | |a Jülich |b Forschungszentrum Jülich, Zentralbibliothek |c 2014 | |
| 300 | |a XI, 145 S. |b Ill., graph. Darst. |c 24cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Schriften des Forschungszentrums Jülich : Reihe Information |v 35 | |
| 502 | |a Zugl.: Kiel, Christian-Albrechts-Univ., Diss., 2013 | ||
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Datensatz im Suchindex
| _version_ | 1809770252983074816 |
|---|---|
| adam_text |
CONTENTS
1 INTRODUCTION 1
2 BACKGROUND 5
2.1 SRTIOS 5
2.2 DEFECT CHEMISTRY OF SRTI03 5
2.2.1 DEFECT CHEMICAL EQUILIBRIUM & REACTIONS FOR SRTIC 3 6
2.2.2 CONDUCTIVITY OF SRTI03 8
2.2.3 ELECTRONIC STRUCTURE OF SRTI03 10
2.2.4 ELECTRICAL DOPING OF SRTI03 BY B-SITE CATIONS 11
2.3 SPACE CHARGE CONSIDERATIONS 11
2.4 NON-STOICHIOMETRY, LATTICE DISTORTIONS AND 2
ND
PHASE FORMATION IN SRTI03 12
2.5 RESISTIVE SWITCHING OXIDES FOR FUTURE MEMORY DEVICES 14
3 SETUP OF A UHV-OXIDE CLUSTER-TOOL 17
3.1 DEPOSITION-TOOLS 19
3.1.1 PLD
(LASER-MBE)
WITH RHEED AND 01RD 19
3.1.2 SPUTTERING TOOL 21
3.1.3 E-BEAM PVD 21
3.2 CHARACTERIZATION-TOOLS 22
3.2.1 SPM-TOOL WITH LC-AFM, NC-AFM, STM & Q-PLUS 22
3.2.2 X-RAY PHOTOEMISSION SPECTROSCOPY (XPS) 22
3.2.3 NANO-ESCA / PEEM 23
3.2.4 LEED 23
3.3 ENGINEERING OF A HIGH-TEMPERATURE [HT) HOLDER 24
3.3.1 ENGINEERING 24
3.3.2 PERFORMANCE 25
4 EXPERIMENTAL 27
4.1 PLD PROCESS AND IN-SITU ANALYSIS METHODS FOR THIN FILM DEFECT
ENGINEERING 27
4.1.1 ABLATION CHARACTERISTICS 27
4.1.2 IN-SITU FILM GROWTH ANALYSIS BY RHEED 28
HTTP://D-NB.INFO/1054089825
CONTENTS
4.1.3 PLUME ANALYSIS 30
4.2 X-RAY DIFFRACTION ANALYSIS 33
4.3 POSITRON ANNIHILATION ANALYSIS 35
4.4 PHOTO (ELECTRON) EMISSION SPECTROSCOPY 37
4.5 SPM ANALYSIS 38
5 DEFECT FORMATION & ACCOMMODATION IN HOMOEPITAXIAL SRTI03 THIN FILMS 41
5.1 INFLUENCE OF PLD GROWTH PARAMETERS ON THE DEFECT FORMATION 41
5.1.1 LASER FLUENCE VARIATIONS 41
5.1.2 VARIATION OF THE TARGET - SUBSTRATE DISTANCE 49
5.1.3 O2 BACKGROUND PRESSURE VARIATIONS 50
5.1.4 INFLUENCE OF SUBSTRATE TEMPERATURE ON THE DEFECT ACCOMMODATION IN
STO 54
5.2 ORIGIN OF NON-STOICHIOMETRY IN HOMOEPITAXIAL SRTI03 THIN FILMS 56
5.2.1 NON-STOICHIOMETIY INDUCED BY LASER FLUENCE VARIATIONS 56
5.2.2
O2
BACKGROUND PRESSURE VARIATIONS 64
5.2.3 EFFECT OF SUBSTRATE TEMPERATURE ON THE STOICHIOMETRY OF STO THIN
FILMS 69
5.3 DISCUSSION AND CONCLUSIONS 72
6 DEFECT FORMATION & ACCOMMODATION IN FE DOPED SRTI03 THIN FILMS 75
6.1 XRD AND PLD PROCESS ANALYSIS 75
6.1.1 XPS ANALYSIS OF THE FILMS AND THE ABLATION SPOTS ON THE TARGET 77
6.1.2 POSITRON ANALYSIS 78
6.2 PLD PLUME ANALYSIS FOR FE DOPED STO 83
6.2.1 PLUME KINETICS 83
6.2.2 PLUME SPECTROSCOPY 84
6.2.3 TEM INVESTIGATIONS OF FE:STO FILMS 84
6.3 DISCUSSION AND CONCLUSIONS 85
7 INFLUENCE OF DEFECTS ON THE GROWTH MODE OF SRTI03 THIN FILMS 87
7.1 LASER FLUENCE VARIATIONS 87
7.2 BACKGROUND PRESSURE VARIATIONS 93
7.3 EFFECT OF SUBSTRATE TEMPERATURE 95
7.4 INFLUENCE OF FE DOPING ON THE STO FILM GROWTH 96
7.5 DISCUSSION AND CONCLUSIONS 97
X
CONTENTS
8 INVESTIGATIONS OF THE RESISTIVE SWITCHING PROPERTIES OF STO THIN FILMS
99
8.1 LC-AFM INVESTIGATIONS OF THE RS PROPERTIES OF STO THIN FILMS 99
8.1.1 PRISTINE I(V) CHARACTERISTICS OF STO THIN FILMS 101
8.1.2 ID RESISTIVE SWITCHING CHARACTERISTICS OF STO FILMS 102
8.1.3 LC-AFM CHARACTERISTICS OF SRTI03
-X
105
8.1.4 RESISTIVE SWITCHING MAPPING (2D) OF STO THIN FILMS 107
8.1.5 I(V) CHARACTERISTICS OF THE PRISTINE, LRS AND HRS AREA 110
8.1.6 THICKNESS DEPENDENCE ON THE RS EFFECT FOR STO FILMS ON NB:STO 114
8.1.7 DISCUSSION 117
8.2 STS ANALYSIS OF RESISTIVE STATES IN STO FILMS AND NB:ST0 120
8.2.1 STS ON STO THIN FILMS 121
8.2.2 STS ON NB:STO SINGLE CRYSTAL (0.5WT%) 122
8.2.3 DISCUSSION 123
8.3 IN-SITU CHEMICAL ANALYSIS OF INSCRIBED AREAS BY PEEM (PROOF OF
CONCEPT) 124
8.3.1 PEEM OF INSCRIBED AREAS 124
8.3.2 DISCUSSION 124
8.4 RESISTIVE SWITCHING DYNAMICS 125
8.5 RESISTIVE SWITCHING OF MIM STRUCTURES 126
8.5.1 I(V) CHARACTERISTICS OF SRTI03 THIN FILMS 126
8.5.2 I(V) CHARACTERISTICS OF FE:STO THIN FILMS 128
8.5.3 DISCUSSION 130
8.6 DISCUSSION 131
9 CONCLUSIONS 133
9.1 DEFECT ENGINEERING 133
9.2 RESISTIVE SWITCHING PROPERTIES 134
XI |
| any_adam_object | 1 |
| author | Wicklein, Sebastian |
| author_facet | Wicklein, Sebastian |
| author_role | aut |
| author_sort | Wicklein, Sebastian |
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| dewey-full | 537.6226 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 537 - Electricity and electronics |
| dewey-raw | 537.6226 |
| dewey-search | 537.6226 |
| dewey-sort | 3537.6226 |
| dewey-tens | 530 - Physics |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| indexdate | 2024-09-10T01:23:26Z |
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| isbn | 9783893369638 |
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| series2 | Schriften des Forschungszentrums Jülich : Reihe Information |
| spelling | Wicklein, Sebastian Verfasser aut Defect engineering of SrTiO3 thin films for resistive switching applications Sebastian Wicklein Jülich Forschungszentrum Jülich, Zentralbibliothek 2014 XI, 145 S. Ill., graph. Darst. 24cm txt rdacontent n rdamedia nc rdacarrier Schriften des Forschungszentrums Jülich : Reihe Information 35 Zugl.: Kiel, Christian-Albrechts-Univ., Diss., 2013 Strontiumtitanat (DE-588)4183773-3 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Dünne Schicht (DE-588)4136925-7 s Strontiumtitanat (DE-588)4183773-3 s DE-604 Schriften des Forschungszentrums Jülich Reihe Information ; 35 (DE-604)BV035800087 35 application/pdf http://d-nb.info/1054089825/04 Inhaltsverzeichnis text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4718569&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027499474&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Wicklein, Sebastian Defect engineering of SrTiO3 thin films for resistive switching applications Schriften des Forschungszentrums Jülich Strontiumtitanat (DE-588)4183773-3 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4183773-3 (DE-588)4136925-7 (DE-588)4113937-9 |
| title | Defect engineering of SrTiO3 thin films for resistive switching applications |
| title_auth | Defect engineering of SrTiO3 thin films for resistive switching applications |
| title_exact_search | Defect engineering of SrTiO3 thin films for resistive switching applications |
| title_full | Defect engineering of SrTiO3 thin films for resistive switching applications Sebastian Wicklein |
| title_fullStr | Defect engineering of SrTiO3 thin films for resistive switching applications Sebastian Wicklein |
| title_full_unstemmed | Defect engineering of SrTiO3 thin films for resistive switching applications Sebastian Wicklein |
| title_short | Defect engineering of SrTiO3 thin films for resistive switching applications |
| title_sort | defect engineering of srtio3 thin films for resistive switching applications |
| topic | Strontiumtitanat (DE-588)4183773-3 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Strontiumtitanat Dünne Schicht Hochschulschrift |
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| work_keys_str_mv | AT wickleinsebastian defectengineeringofsrtio3thinfilmsforresistiveswitchingapplications |
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