Verfügbarkeit: Rare-earth implanted MOS devices for silicon photonics

Rare-earth implanted MOS devices for silicon photonics: microstructural, electrical and optoelectronic properties

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Bibliographische Detailangaben
1. Verfasser:	Rebohle, Lars (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Heidelberg Springer c2010
Schriftenreihe:	Springer series in materials science v. 142
Schlagworte:	Metal oxide semiconductors Siliciumdioxid MOS Ionenimplantation Photonik Seltenerdmetall Elektrolumineszenz
Online-Zugang:	Volltext
Beschreibung:	Includes bibliographical references (p. 159-170) and index
Beschreibung:	1 Online-Ressource (xviii, 173 p.)
ISBN:	9783642144462 3642144462 9781283003377

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MARC


LEADER	00000nmm a2200000zcb4500
001	BV041905468
003	DE-604
005	00000000000000.0
007	cr\|uuu---uuuuu
008	140612s2010 \|\|\|\| o\|\|u\| \|\|\|\|\|\|eng d
020			\|a 9783642144462 \|c hdbk. : acidfree paper \|9 978-3-642-14446-2
020			\|a 3642144462 \|c hdbk. : acidfree paper \|9 3-642-14446-2
020			\|a 9781283003377 \|c MyiLibrary \|9 978-1-283-00337-7
035			\|a (OCoLC)746579737
035			\|a (DE-599)BVBBV041905468
040			\|a DE-604 \|b ger \|e aacr
041	0		\|a eng
082	0		\|a 621.39/732 \|2 23
100	1		\|a Rebohle, Lars \|e Verfasser \|4 aut
245	1	0	\|a Rare-earth implanted MOS devices for silicon photonics \|b microstructural, electrical and optoelectronic properties \|c Lars Rebohle, Wolfgang Skorupa
264		1	\|a Heidelberg \|b Springer \|c c2010
300			\|a 1 Online-Ressource (xviii, 173 p.)
336			\|b txt \|2 rdacontent
337			\|b c \|2 rdamedia
338			\|b cr \|2 rdacarrier
490	0		\|a Springer series in materials science \|v v. 142
500			\|a Includes bibliographical references (p. 159-170) and index
650		4	\|a Metal oxide semiconductors
650	0	7	\|a Siliciumdioxid \|0 (DE-588)4077447-8 \|2 gnd \|9 rswk-swf
650	0	7	\|a MOS \|0 (DE-588)4130209-6 \|2 gnd \|9 rswk-swf
650	0	7	\|a Ionenimplantation \|0 (DE-588)4027606-5 \|2 gnd \|9 rswk-swf
650	0	7	\|a Photonik \|0 (DE-588)4243979-6 \|2 gnd \|9 rswk-swf
650	0	7	\|a Seltenerdmetall \|0 (DE-588)4132099-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a Elektrolumineszenz \|0 (DE-588)4151823-8 \|2 gnd \|9 rswk-swf
689	0	0	\|a MOS \|0 (DE-588)4130209-6 \|D s
689	0	1	\|a Seltenerdmetall \|0 (DE-588)4132099-2 \|D s
689	0	2	\|a Siliciumdioxid \|0 (DE-588)4077447-8 \|D s
689	0	3	\|a Ionenimplantation \|0 (DE-588)4027606-5 \|D s
689	0	4	\|a Elektrolumineszenz \|0 (DE-588)4151823-8 \|D s
689	0	5	\|a Photonik \|0 (DE-588)4243979-6 \|D s
689	0		\|8 1\p \|5 DE-604
700	1		\|a Skorupa, Wolfgang \|e Sonstige \|4 oth
856	4	0	\|u http://lib.myilibrary.com?id=300337 \|x Aggregator \|3 Volltext
912			\|a ZDB-26-MYL
999			\|a oai:aleph.bib-bvb.de:BVB01-027349138
883	1		\|8 1\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk

Datensatz im Suchindex

_version_	1804152263738916864
any_adam_object
author	Rebohle, Lars
author_facet	Rebohle, Lars
author_role	aut
author_sort	Rebohle, Lars
author_variant	l r lr
building	Verbundindex
bvnumber	BV041905468
collection	ZDB-26-MYL
ctrlnum	(OCoLC)746579737 (DE-599)BVBBV041905468
dewey-full	621.39/732
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.39/732
dewey-search	621.39/732
dewey-sort	3621.39 3732
dewey-tens	620 - Engineering and allied operations
discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
format	Electronic eBook
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02115nmm a2200517zcb4500</leader><controlfield tag="001">BV041905468</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr\|uuu---uuuuu</controlfield><controlfield tag="008">140612s2010 \|\|\|\| o\|\|u\| \|\|\|\|\|\|eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642144462</subfield><subfield code="c">hdbk. : acidfree paper</subfield><subfield code="9">978-3-642-14446-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3642144462</subfield><subfield code="c">hdbk. : acidfree paper</subfield><subfield code="9">3-642-14446-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781283003377</subfield><subfield code="c">MyiLibrary</subfield><subfield code="9">978-1-283-00337-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)746579737</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV041905468</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.39/732</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Rebohle, Lars</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Rare-earth implanted MOS devices for silicon photonics</subfield><subfield code="b">microstructural, electrical and optoelectronic properties</subfield><subfield code="c">Lars Rebohle, Wolfgang Skorupa</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Heidelberg</subfield><subfield code="b">Springer</subfield><subfield code="c">c2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xviii, 173 p.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Springer series in materials science</subfield><subfield code="v">v. 142</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references (p. 159-170) and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metal oxide semiconductors</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumdioxid</subfield><subfield code="0">(DE-588)4077447-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MOS</subfield><subfield code="0">(DE-588)4130209-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Photonik</subfield><subfield code="0">(DE-588)4243979-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Seltenerdmetall</subfield><subfield code="0">(DE-588)4132099-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Elektrolumineszenz</subfield><subfield code="0">(DE-588)4151823-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MOS</subfield><subfield code="0">(DE-588)4130209-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Seltenerdmetall</subfield><subfield code="0">(DE-588)4132099-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Siliciumdioxid</subfield><subfield code="0">(DE-588)4077447-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Elektrolumineszenz</subfield><subfield code="0">(DE-588)4151823-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Photonik</subfield><subfield code="0">(DE-588)4243979-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Skorupa, Wolfgang</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://lib.myilibrary.com?id=300337</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-26-MYL</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027349138</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection>
id	DE-604.BV041905468
illustrated	Not Illustrated
indexdate	2024-07-10T01:07:56Z
institution	BVB
isbn	9783642144462 3642144462 9781283003377
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-027349138
oclc_num	746579737
open_access_boolean
physical	1 Online-Ressource (xviii, 173 p.)
psigel	ZDB-26-MYL
publishDate	2010
publishDateSearch	2010
publishDateSort	2010
publisher	Springer
record_format	marc
series2	Springer series in materials science
spelling	Rebohle, Lars Verfasser aut Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties Lars Rebohle, Wolfgang Skorupa Heidelberg Springer c2010 1 Online-Ressource (xviii, 173 p.) txt rdacontent c rdamedia cr rdacarrier Springer series in materials science v. 142 Includes bibliographical references (p. 159-170) and index Metal oxide semiconductors Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf MOS (DE-588)4130209-6 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Photonik (DE-588)4243979-6 gnd rswk-swf Seltenerdmetall (DE-588)4132099-2 gnd rswk-swf Elektrolumineszenz (DE-588)4151823-8 gnd rswk-swf MOS (DE-588)4130209-6 s Seltenerdmetall (DE-588)4132099-2 s Siliciumdioxid (DE-588)4077447-8 s Ionenimplantation (DE-588)4027606-5 s Elektrolumineszenz (DE-588)4151823-8 s Photonik (DE-588)4243979-6 s 1\p DE-604 Skorupa, Wolfgang Sonstige oth http://lib.myilibrary.com?id=300337 Aggregator Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Rebohle, Lars Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties Metal oxide semiconductors Siliciumdioxid (DE-588)4077447-8 gnd MOS (DE-588)4130209-6 gnd Ionenimplantation (DE-588)4027606-5 gnd Photonik (DE-588)4243979-6 gnd Seltenerdmetall (DE-588)4132099-2 gnd Elektrolumineszenz (DE-588)4151823-8 gnd
subject_GND	(DE-588)4077447-8 (DE-588)4130209-6 (DE-588)4027606-5 (DE-588)4243979-6 (DE-588)4132099-2 (DE-588)4151823-8
title	Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties
title_auth	Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties
title_exact_search	Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties
title_full	Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties Lars Rebohle, Wolfgang Skorupa
title_fullStr	Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties Lars Rebohle, Wolfgang Skorupa
title_full_unstemmed	Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties Lars Rebohle, Wolfgang Skorupa
title_short	Rare-earth implanted MOS devices for silicon photonics
title_sort	rare earth implanted mos devices for silicon photonics microstructural electrical and optoelectronic properties
title_sub	microstructural, electrical and optoelectronic properties
topic	Metal oxide semiconductors Siliciumdioxid (DE-588)4077447-8 gnd MOS (DE-588)4130209-6 gnd Ionenimplantation (DE-588)4027606-5 gnd Photonik (DE-588)4243979-6 gnd Seltenerdmetall (DE-588)4132099-2 gnd Elektrolumineszenz (DE-588)4151823-8 gnd
topic_facet	Metal oxide semiconductors Siliciumdioxid MOS Ionenimplantation Photonik Seltenerdmetall Elektrolumineszenz
url	http://lib.myilibrary.com?id=300337
work_keys_str_mv	AT rebohlelars rareearthimplantedmosdevicesforsiliconphotonicsmicrostructuralelectricalandoptoelectronicproperties AT skorupawolfgang rareearthimplantedmosdevicesforsiliconphotonicsmicrostructuralelectricalandoptoelectronicproperties

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