Introductory MEMS: Fabrication and Applications
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston, MA
Springer US
2010
|
| Ausgabe: | 1 |
| Schlagworte: | |
| Online-Zugang: | DE-634 DE-573 DE-92 DE-898 Volltext |
| Beschreibung: | Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines |
| Beschreibung: | 1 Online-Ressource (XV, 444p. 50 illus., 25 illus. in color) |
| ISBN: | 9780387095110 |
| DOI: | 10.1007/978-0-387-09511-0 |
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| 500 | |a Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines | ||
| 505 | 0 | |a Fabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories | |
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Datensatz im Suchindex
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| adam_text | |
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| author | Adams, Thomas M. |
| author_facet | Adams, Thomas M. |
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| author_variant | t m a tm tma |
| building | Verbundindex |
| bvnumber | BV041889531 |
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| contents | Fabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories |
| ctrlnum | (OCoLC)699650362 (DE-599)BVBBV041889531 |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Informatik Elektrotechnik / Elektronik / Nachrichtentechnik Wirtschaftswissenschaften |
| doi_str_mv | 10.1007/978-0-387-09511-0 |
| edition | 1 |
| format | Electronic eBook |
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| isbn | 9780387095110 |
| language | English |
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| spelling | Adams, Thomas M. Verfasser aut Introductory MEMS Fabrication and Applications by Thomas M. Adams, Richard A. Layton 1 Boston, MA Springer US 2010 1 Online-Ressource (XV, 444p. 50 illus., 25 illus. in color) txt rdacontent c rdamedia cr rdacarrier Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines Fabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories Engineering Mechanics Materials Electronics Systems engineering Surfaces (Physics) Electronics and Microelectronics, Instrumentation Circuits and Systems Surfaces and Interfaces, Thin Films Continuum Mechanics and Mechanics of Materials Ingenieurwissenschaften Automatentheorie (DE-588)4003953-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Programmiersprache (DE-588)4047409-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1979 Graz gnd-content MEMS (DE-588)4824724-8 s 1\p DE-604 Automatentheorie (DE-588)4003953-5 s Programmiersprache (DE-588)4047409-4 s DE-604 Layton, Richard A. Sonstige oth Erscheint auch als Druckausgabe 978-0-387-09510-3 https://doi.org/10.1007/978-0-387-09511-0 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Adams, Thomas M. Introductory MEMS Fabrication and Applications Fabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories Engineering Mechanics Materials Electronics Systems engineering Surfaces (Physics) Electronics and Microelectronics, Instrumentation Circuits and Systems Surfaces and Interfaces, Thin Films Continuum Mechanics and Mechanics of Materials Ingenieurwissenschaften Automatentheorie (DE-588)4003953-5 gnd MEMS (DE-588)4824724-8 gnd Programmiersprache (DE-588)4047409-4 gnd |
| subject_GND | (DE-588)4003953-5 (DE-588)4824724-8 (DE-588)4047409-4 (DE-588)1071861417 |
| title | Introductory MEMS Fabrication and Applications |
| title_auth | Introductory MEMS Fabrication and Applications |
| title_exact_search | Introductory MEMS Fabrication and Applications |
| title_full | Introductory MEMS Fabrication and Applications by Thomas M. Adams, Richard A. Layton |
| title_fullStr | Introductory MEMS Fabrication and Applications by Thomas M. Adams, Richard A. Layton |
| title_full_unstemmed | Introductory MEMS Fabrication and Applications by Thomas M. Adams, Richard A. Layton |
| title_short | Introductory MEMS |
| title_sort | introductory mems fabrication and applications |
| title_sub | Fabrication and Applications |
| topic | Engineering Mechanics Materials Electronics Systems engineering Surfaces (Physics) Electronics and Microelectronics, Instrumentation Circuits and Systems Surfaces and Interfaces, Thin Films Continuum Mechanics and Mechanics of Materials Ingenieurwissenschaften Automatentheorie (DE-588)4003953-5 gnd MEMS (DE-588)4824724-8 gnd Programmiersprache (DE-588)4047409-4 gnd |
| topic_facet | Engineering Mechanics Materials Electronics Systems engineering Surfaces (Physics) Electronics and Microelectronics, Instrumentation Circuits and Systems Surfaces and Interfaces, Thin Films Continuum Mechanics and Mechanics of Materials Ingenieurwissenschaften Automatentheorie MEMS Programmiersprache Konferenzschrift 1979 Graz |
| url | https://doi.org/10.1007/978-0-387-09511-0 |
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