A practical guide to optical metrology for thin films:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2013
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Online-Ausg. 2012 erschienen A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9783527664344 9783527664375 9783527664351 9783527664368 9783527411672 |
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Datensatz im Suchindex
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| author | Quinten, Michael |
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| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
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| dewey-search | 530.4/275 |
| dewey-sort | 3530.4 3275 |
| dewey-tens | 530 - Physics |
| discipline | Physik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
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| isbn | 9783527664344 9783527664375 9783527664351 9783527664368 9783527411672 |
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| spelling | Quinten, Michael Verfasser (DE-588)111740789 aut A practical guide to optical metrology for thin films Michael Quinten Weinheim Wiley-VCH 2013 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Online-Ausg. 2012 erschienen A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Thin films / Optical properties Optische Messtechnik (DE-588)4172667-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Schichtdicke (DE-588)4264521-9 gnd rswk-swf Electronic books Dünne Schicht (DE-588)4136925-7 s Schichtdicke (DE-588)4264521-9 s Optische Messtechnik (DE-588)4172667-4 s DE-604 https://onlinelibrary.wiley.com/doi/book/10.1002/9783527664344 Verlag Volltext |
| spellingShingle | Quinten, Michael A practical guide to optical metrology for thin films Thin films / Optical properties Optische Messtechnik (DE-588)4172667-4 gnd Dünne Schicht (DE-588)4136925-7 gnd Schichtdicke (DE-588)4264521-9 gnd |
| subject_GND | (DE-588)4172667-4 (DE-588)4136925-7 (DE-588)4264521-9 |
| title | A practical guide to optical metrology for thin films |
| title_auth | A practical guide to optical metrology for thin films |
| title_exact_search | A practical guide to optical metrology for thin films |
| title_full | A practical guide to optical metrology for thin films Michael Quinten |
| title_fullStr | A practical guide to optical metrology for thin films Michael Quinten |
| title_full_unstemmed | A practical guide to optical metrology for thin films Michael Quinten |
| title_short | A practical guide to optical metrology for thin films |
| title_sort | a practical guide to optical metrology for thin films |
| topic | Thin films / Optical properties Optische Messtechnik (DE-588)4172667-4 gnd Dünne Schicht (DE-588)4136925-7 gnd Schichtdicke (DE-588)4264521-9 gnd |
| topic_facet | Thin films / Optical properties Optische Messtechnik Dünne Schicht Schichtdicke |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9783527664344 |
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