System-level modeling of MEMS:
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Weinheim Wiley-VCH 2013
Series:Advanced micro & nanosystems 10
Subjects:
Online Access:FRO01
TUM01
UBT01
Volltext
Item Description:Includes bibliographical references and index
Physical Description:1 Online-Ressource
ISBN:9783527647125
9783527647132

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