Handbook of wafer bonding:
Gespeichert in:
Bibliographische Detailangaben
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Weinheim Wiley-VCH 2012
Schlagworte:
Online-Zugang:Volltext
Beschreibung:Written by an author and editor team from microsystems companies and industry-near research organizations, this handbook and reference presents dependable, first-hand information on bonding technologies.In the first part, researchers from companies and institutions around the world discuss the most reliable and reproducible technologies for the production of bonded wafers. The second part is devoted to current and emerging applications, including microresonators, biosensors and precise measuring devices
Beschreibung:1 Online-Ressource
ISBN:9783527644223
9783527644247
9783527644230
9783527644254
9783527326464

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