Ultra clean processing of semiconductor surfaces XI: selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Durnten-Zurich [u.a.]
TTP, Trans Tech Publ.
2013
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| Schriftenreihe: | Solid state phenomena
195 |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | Conference organized by IMEC |
| Beschreibung: | 1 Online-Ressource (xiv, 332 p.) Ill., graph. Darst. |
| ISBN: | 9783037855270 9781628700268 |
Internformat
MARC
| LEADER | 00000nmm a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV041656788 | ||
| 003 | DE-604 | ||
| 006 | a |||| 10||| | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 140218s2013 |||| o||u| ||||||eng d | ||
| 020 | |a 9783037855270 |9 978-3-03785-527-0 | ||
| 020 | |a 9781628700268 |c online |9 978-1-62870-026-8 | ||
| 035 | |a (OCoLC)874417314 | ||
| 035 | |a (DE-599)GBV735757887 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 245 | 1 | 0 | |a Ultra clean processing of semiconductor surfaces XI |b selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium |c ed. by Paul Mertens ... |
| 264 | 1 | |a Durnten-Zurich [u.a.] |b TTP, Trans Tech Publ. |c 2013 | |
| 300 | |a 1 Online-Ressource (xiv, 332 p.) |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 1 | |a Solid state phenomena |v 195 | |
| 500 | |a Conference organized by IMEC | ||
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Oberflächenreinigung |0 (DE-588)4204243-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Oberflächenreinigung |0 (DE-588)4204243-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Mertens, Paul |e Sonstige |4 oth | |
| 710 | 2 | |a Interuniversity Micro-Electronics Center (Löwen) |e Sonstige |0 (DE-588)5047943-X |4 oth | |
| 830 | 0 | |a Solid state phenomena |v 195 |w (DE-604)BV021637351 |9 195 | |
| 856 | 4 | 0 | |u http://app.knovel.com/web/toc.v/cid:kpUCPSSXI2/viewerType:toc/root_slug:ultra-clean-processing |3 Volltext |
| 912 | |a ZDB-10-ESC | ||
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-027097278 | |
Datensatz im Suchindex
| _version_ | 1806054958835957760 |
|---|---|
| adam_text | |
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV041656788 |
| collection | ZDB-10-ESC |
| ctrlnum | (OCoLC)874417314 (DE-599)GBV735757887 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nmm a2200000 cb4500</leader><controlfield tag="001">BV041656788</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="006">a |||| 10|||</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">140218s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783037855270</subfield><subfield code="9">978-3-03785-527-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781628700268</subfield><subfield code="c">online</subfield><subfield code="9">978-1-62870-026-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)874417314</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV735757887</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ultra clean processing of semiconductor surfaces XI</subfield><subfield code="b">selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium</subfield><subfield code="c">ed. by Paul Mertens ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Durnten-Zurich [u.a.]</subfield><subfield code="b">TTP, Trans Tech Publ.</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xiv, 332 p.)</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Solid state phenomena</subfield><subfield code="v">195</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Conference organized by IMEC</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oberflächenreinigung</subfield><subfield code="0">(DE-588)4204243-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Oberflächenreinigung</subfield><subfield code="0">(DE-588)4204243-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mertens, Paul</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Interuniversity Micro-Electronics Center (Löwen)</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)5047943-X</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Solid state phenomena</subfield><subfield code="v">195</subfield><subfield code="w">(DE-604)BV021637351</subfield><subfield code="9">195</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://app.knovel.com/web/toc.v/cid:kpUCPSSXI2/viewerType:toc/root_slug:ultra-clean-processing</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-10-ESC</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027097278</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV041656788 |
| illustrated | Illustrated |
| indexdate | 2024-07-31T01:10:28Z |
| institution | BVB |
| institution_GND | (DE-588)5047943-X |
| isbn | 9783037855270 9781628700268 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027097278 |
| oclc_num | 874417314 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (xiv, 332 p.) Ill., graph. Darst. |
| psigel | ZDB-10-ESC |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | TTP, Trans Tech Publ. |
| record_format | marc |
| series | Solid state phenomena |
| series2 | Solid state phenomena |
| spelling | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium ed. by Paul Mertens ... Durnten-Zurich [u.a.] TTP, Trans Tech Publ. 2013 1 Online-Ressource (xiv, 332 p.) Ill., graph. Darst. txt rdacontent c rdamedia cr rdacarrier Solid state phenomena 195 Conference organized by IMEC Halbleiter (DE-588)4022993-2 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s Oberflächenreinigung (DE-588)4204243-4 s DE-604 Mertens, Paul Sonstige oth Interuniversity Micro-Electronics Center (Löwen) Sonstige (DE-588)5047943-X oth Solid state phenomena 195 (DE-604)BV021637351 195 http://app.knovel.com/web/toc.v/cid:kpUCPSSXI2/viewerType:toc/root_slug:ultra-clean-processing Volltext |
| spellingShingle | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium Solid state phenomena Halbleiter (DE-588)4022993-2 gnd Oberflächenreinigung (DE-588)4204243-4 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4204243-4 (DE-588)1071861417 |
| title | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium |
| title_auth | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium |
| title_exact_search | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium |
| title_full | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium ed. by Paul Mertens ... |
| title_fullStr | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium ed. by Paul Mertens ... |
| title_full_unstemmed | Ultra clean processing of semiconductor surfaces XI selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium ed. by Paul Mertens ... |
| title_short | Ultra clean processing of semiconductor surfaces XI |
| title_sort | ultra clean processing of semiconductor surfaces xi selected peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces ucpss september 17 19 2012 gent belgium |
| title_sub | selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17 - 19, 2012, Gent, Belgium |
| topic | Halbleiter (DE-588)4022993-2 gnd Oberflächenreinigung (DE-588)4204243-4 gnd |
| topic_facet | Halbleiter Oberflächenreinigung Konferenzschrift |
| url | http://app.knovel.com/web/toc.v/cid:kpUCPSSXI2/viewerType:toc/root_slug:ultra-clean-processing |
| volume_link | (DE-604)BV021637351 |
| work_keys_str_mv | AT mertenspaul ultracleanprocessingofsemiconductorsurfacesxiselectedpeerreviewedpapersfromthe11thinternationalsymposiumonultracleanprocessingofsemiconductorsurfacesucpssseptember17192012gentbelgium AT interuniversitymicroelectronicscenterlowen ultracleanprocessingofsemiconductorsurfacesxiselectedpeerreviewedpapersfromthe11thinternationalsymposiumonultracleanprocessingofsemiconductorsurfacesucpssseptember17192012gentbelgium |