Nanoimprint lithography: an enabling process for nanofabrication
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin ; Heidelberg
Springer
2013
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| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis Inhaltstext |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XIII, 256 S. Ill., graph. Darst. 24 cm |
| ISBN: | 9783642344275 3642344275 |
Internformat
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| 100 | 1 | |a Zhou, Weimin |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Nanoimprint lithography |b an enabling process for nanofabrication |c Weimin Zhou |
| 264 | 1 | |a Berlin ; Heidelberg |b Springer |c 2013 | |
| 300 | |a XIII, 256 S. |b Ill., graph. Darst. |c 24 cm | ||
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Datensatz im Suchindex
| _version_ | 1806326996757643264 |
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| adam_text | |
| any_adam_object | |
| author | Zhou, Weimin |
| author_facet | Zhou, Weimin |
| author_role | aut |
| author_sort | Zhou, Weimin |
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| building | Verbundindex |
| bvnumber | BV041619382 |
| ctrlnum | (OCoLC)840014814 (DE-599)DNB1026468701 |
| dewey-full | 621.381531 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381531 621.38152 |
| dewey-search | 621.381531 621.38152 |
| dewey-sort | 3621.381531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV041619382 |
| illustrated | Illustrated |
| indexdate | 2024-08-03T01:14:23Z |
| institution | BVB |
| isbn | 9783642344275 3642344275 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027060451 |
| oclc_num | 840014814 |
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| owner | DE-29T |
| owner_facet | DE-29T |
| physical | XIII, 256 S. Ill., graph. Darst. 24 cm |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Springer |
| record_format | marc |
| spelling | Zhou, Weimin Verfasser aut Nanoimprint lithography an enabling process for nanofabrication Weimin Zhou Berlin ; Heidelberg Springer 2013 XIII, 256 S. Ill., graph. Darst. 24 cm txt rdacontent n rdamedia nc rdacarrier Literaturangaben Nanoprägen (DE-588)7546601-6 gnd rswk-swf Nanoprägen (DE-588)7546601-6 s DE-604 Erscheint auch als Online-Ausgabe Nanoimprint Lithography: An Enabling Process for Nanofabrication B:DE-101 application/pdf http://d-nb.info/1026468701/04 Inhaltsverzeichnis X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4131581&prov=M&dok_var=1&dok_ext=htm Inhaltstext |
| spellingShingle | Zhou, Weimin Nanoimprint lithography an enabling process for nanofabrication Nanoprägen (DE-588)7546601-6 gnd |
| subject_GND | (DE-588)7546601-6 |
| title | Nanoimprint lithography an enabling process for nanofabrication |
| title_auth | Nanoimprint lithography an enabling process for nanofabrication |
| title_exact_search | Nanoimprint lithography an enabling process for nanofabrication |
| title_full | Nanoimprint lithography an enabling process for nanofabrication Weimin Zhou |
| title_fullStr | Nanoimprint lithography an enabling process for nanofabrication Weimin Zhou |
| title_full_unstemmed | Nanoimprint lithography an enabling process for nanofabrication Weimin Zhou |
| title_short | Nanoimprint lithography |
| title_sort | nanoimprint lithography an enabling process for nanofabrication |
| title_sub | an enabling process for nanofabrication |
| topic | Nanoprägen (DE-588)7546601-6 gnd |
| topic_facet | Nanoprägen |
| url | http://d-nb.info/1026468701/04 http://deposit.dnb.de/cgi-bin/dokserv?id=4131581&prov=M&dok_var=1&dok_ext=htm |
| work_keys_str_mv | AT zhouweimin nanoimprintlithographyanenablingprocessfornanofabrication |
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