Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2013
|
| Schlagworte: | |
| Online-Zugang: | kostenfrei Inhaltsverzeichnis |
| Beschreibung: | VI, 159 S. graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV041600003 | ||
| 003 | DE-604 | ||
| 005 | 20140403 | ||
| 007 | t | ||
| 008 | 140129s2013 d||| m||| 00||| eng d | ||
| 035 | |a (OCoLC)915394679 | ||
| 035 | |a (DE-599)BVBBV041600003 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 | ||
| 084 | |a UH 5616 |0 (DE-625)145669: |2 rvk | ||
| 084 | |a UP 3120 |0 (DE-625)146374: |2 rvk | ||
| 084 | |a ZN 3460 |0 (DE-625)157317: |2 rvk | ||
| 084 | |a ZN 5030 |0 (DE-625)157431: |2 rvk | ||
| 100 | 1 | |a Redaelli, Luca |e Verfasser |0 (DE-588)1046656716 |4 aut | |
| 245 | 1 | 0 | |a Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications |c vorgelegt von Luca Redaelli |
| 246 | 1 | |a Design and fabrication of GaN-based laser diodes for single-mode and narrow-linewidth applications | |
| 264 | 1 | |c 2013 | |
| 300 | |a VI, 159 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Berlin, Techn. Univ., Diss., 2013 | ||
| 650 | 0 | 7 | |a Laserdiode |0 (DE-588)4195920-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Verfahrenstechnik |0 (DE-588)4062781-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Galliumnitrid |0 (DE-588)4375592-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Galliumnitrid |0 (DE-588)4375592-6 |D s |
| 689 | 0 | 1 | |a Laserdiode |0 (DE-588)4195920-6 |D s |
| 689 | 0 | 2 | |a Verfahrenstechnik |0 (DE-588)4062781-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |o urn:nbn:de:kobv:83-opus4-44878 |
| 856 | 4 | 1 | |u https://nbn-resolving.org/urn:nbn:de:kobv:83-opus4-44878 |x Resolving-System |z kostenfrei |3 Volltext |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027041638&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 912 | |a ebook | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027041638 | ||
Datensatz im Suchindex
| _version_ | 1804151792963944448 |
|---|---|
| adam_text | CONTENTS
1 INTRODUCTION 1
1.1 STATE OF THE ART AND APPLICATIONS OF GAN-BASED LASER DIODES 2
1.2 BASIC PRINCIPLES OF LASER DIODES 4
1.3 STRUCTURE OF THIS PHD THESIS 5
2 FRONT-END PROCESSING OF GAN-BASED LASER DIODES 7
2.1 TECHNOLOGY ROADMAP 8
2.2 THE QUICK BROAD AREA FABRICATION PROCESS 8
2.3 THE RIDGE-WAVEGUIDE PROCESS - AN OVERVIEW 10
2.4 DEFINITION OF NARROW RIDGE-WAVEGUIDES 11
2.4.1 RIDGE LITHOGRAPHY OPTIMIZATION 13
2.4.2 RIDGE ETCHING WITH RESIST MASK 19
2.4.3 PD PATTERNING ISSUES 22
2.4.4 SILICON NITRIDE MASK FOR RIDGE ETCHING 25
2.4.5 METAL MASK 26
2.4.6 SELF-ALIGNED RIDGE WAVEGUIDE PROCESS 27
2.5 LOW-TEMPERATURE N-CONTACTS ON N-FACE GAN 37
2.5.1 DEFINITION OF THE TARGET RESISTANCE AND PROCESS CONSTRAINTS 38
2.5.2 SURFACE PREPARATION AND FABRICATION OF THE CONTACTS 39
2.5.3 COMPARISON OF THE CONTACT PERFORMANCES 41
2.6 CONCLUSIONS AND OUTLOOK 45
3 FABRICATION OF LASER FACETS WITH DEFINED REFLECTANCE 47
3.1 TECHNOLOGY ROADMAP 47
3.2 SCRIBE AND BREAK THEORY 48
3.3 THINNING OF GAN WAFERS 49
3.4 LASER SCRIBING AND MANUAL CLEAVING 53
3.5 MACHINE-ASSISTED DIAMOND SCRIBING AND CLEAVING: EDGE-SCRIBE 56
3.5.1 SCRIBING PARAMETERS 57
3.5.2 BREAKING PARAMETERS 59
3.5.3 SURFACE TOPOLOGY 60
3.5.4 DISCUSSION OF THE RESULTS: FACET QUALITY 61
III
HTTP://D-NB.INFO/1045640018
IV
CONTENTS
3.6 ALTERNATIVE SCRIBING AND CLEAVING METHODS 64
3.6.1 THE SKIP-AND-SCRIBE METHOD 65
3.6.2 ETCHED CLEAVING STREETS 67
3.7 MIRROR COATINGS 70
3.7.1 DIELECTRIC MIRRORS AND ANTI-REFLECTION COATINGS 70
3.7.2 DESIGN OF MIRROR-COATINGS FOR BLUE-VIOLET GAN LASER DIODES 71
3.8 INFLUENCE OF THE FACET REFLECTANCE ON THE LASING THRESHOLD 74
3.8.1 ANALYTICAL CALCULATION OF THE THRESHOLD CURRENT 74
3.8.2 INTERNAL LOSSES, MODAL GAIN PARAMETER AND TRANSPARENCY CURRENT
DENSITY .... 75
3.8.3 DEPENDENCE OF THE THRESHOLD CURRENT ON THE FACET REFLECTANCE 77
3.9 CONCLUSIONS AND OUTLOOK: FACET CLEAVING AND COATING 79
4 THE IMPACT OF THE RIDGE-WAVEGUIDE DEPTH ON THE LASING PERFORMANCE 81
4.1 CONTRIBUTING SCIENTISTS 82
4.2 MEASUREMENT OF THE LASER THRESHOLD AND THE LATERAL FAR FIELD
PATTERNS 82
4.3 SELF-CONSISTENT SIMULATION 85
4.4 CURRENT SPREADING 87
4.5 STUDY OF ANTIGUIDING EFFECTS WITH A 2D MODE SOLVER 89
4.5.1 THEORETICAL MODEL 90
4.5.2 SIMULATION RESULTS AND DISCUSSION 95
4.5.3 LATERAL FAR-FIELD PATTERNS 104
4.5.4 2D MODE SOLVER RESULTS SUMMARY 104
4.6 QUANTITATIVE STUDY OF ANTIGUIDING 105
4.6.1 SELF-CONSISTENT SIMULATION WITH LINEAR DN/DN COEFFICIENT 106
4.6.2 SELF-CONSISTENT SIMULATION BY CONSTANT R 107
4.6.3 EXPERIMENTAL DETERMINATION OF THE SRH COEFFICIENT A, THE INTERNAL
LOSSES 0TJ
AND THE ANTIGUIDING FACTOR R 109
4.7 ANTIGUIDING EFFECTS IN WIDER RW LASER DIODES 112
4.8 CONCLUSIONS 113
5 LONGITUDINAL MODE SELECTION IN GAN LASER DIODES 115
5.1 TECHNOLOGY ROADMAP 116
5.2 EXTERNAL CAVITY SYSTEM WITH MODE SELECTION 116
5.2.1 LITTROW AND LITTMAN-METCALF CONFIGURATIONS 117
5.2.2 BLUE-VIOLET EMITTING ECDL SYSTEMS 118
5.3 INTEGRATED BRAGG GRATINGS FOR GAN LASER DIODES 120
5.3.1 DESIGN OF HIGH-ORDER BRAGG-GRATINGS IN GAN 121
5.3.2 PROCESS TECHNOLOGY FOR HIGH-ORDER BRAGG-GRATINGS IN GAN 124
5.4 CONCLUSIONS AND OUTLOOK 133
6 SUMMARY OF THE RESULTS AND OUTLOOK 135
CONTENTS V
BIBLIOGRAPHY 147
PUBLICATIONS 149
ACKNOWLEDGMENTS 157
|
| any_adam_object | 1 |
| author | Redaelli, Luca |
| author_GND | (DE-588)1046656716 |
| author_facet | Redaelli, Luca |
| author_role | aut |
| author_sort | Redaelli, Luca |
| author_variant | l r lr |
| building | Verbundindex |
| bvnumber | BV041600003 |
| classification_rvk | UH 5616 UP 3120 ZN 3460 ZN 5030 |
| collection | ebook |
| ctrlnum | (OCoLC)915394679 (DE-599)BVBBV041600003 |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01981nam a2200457 c 4500</leader><controlfield tag="001">BV041600003</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20140403 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">140129s2013 d||| m||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)915394679</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV041600003</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5616</subfield><subfield code="0">(DE-625)145669:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3120</subfield><subfield code="0">(DE-625)146374:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3460</subfield><subfield code="0">(DE-625)157317:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 5030</subfield><subfield code="0">(DE-625)157431:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Redaelli, Luca</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1046656716</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications</subfield><subfield code="c">vorgelegt von Luca Redaelli</subfield></datafield><datafield tag="246" ind1="1" ind2=" "><subfield code="a">Design and fabrication of GaN-based laser diodes for single-mode and narrow-linewidth applications</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VI, 159 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Berlin, Techn. Univ., Diss., 2013</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Laserdiode</subfield><subfield code="0">(DE-588)4195920-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Verfahrenstechnik</subfield><subfield code="0">(DE-588)4062781-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Galliumnitrid</subfield><subfield code="0">(DE-588)4375592-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Galliumnitrid</subfield><subfield code="0">(DE-588)4375592-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Laserdiode</subfield><subfield code="0">(DE-588)4195920-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Verfahrenstechnik</subfield><subfield code="0">(DE-588)4062781-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="o">urn:nbn:de:kobv:83-opus4-44878</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://nbn-resolving.org/urn:nbn:de:kobv:83-opus4-44878</subfield><subfield code="x">Resolving-System</subfield><subfield code="z">kostenfrei</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027041638&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ebook</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027041638</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV041600003 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:00:27Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027041638 |
| oclc_num | 915394679 |
| open_access_boolean | 1 |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | VI, 159 S. graph. Darst. |
| psigel | ebook |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| record_format | marc |
| spelling | Redaelli, Luca Verfasser (DE-588)1046656716 aut Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications vorgelegt von Luca Redaelli Design and fabrication of GaN-based laser diodes for single-mode and narrow-linewidth applications 2013 VI, 159 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berlin, Techn. Univ., Diss., 2013 Laserdiode (DE-588)4195920-6 gnd rswk-swf Verfahrenstechnik (DE-588)4062781-0 gnd rswk-swf Galliumnitrid (DE-588)4375592-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Galliumnitrid (DE-588)4375592-6 s Laserdiode (DE-588)4195920-6 s Verfahrenstechnik (DE-588)4062781-0 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:kobv:83-opus4-44878 https://nbn-resolving.org/urn:nbn:de:kobv:83-opus4-44878 Resolving-System kostenfrei Volltext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027041638&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Redaelli, Luca Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications Laserdiode (DE-588)4195920-6 gnd Verfahrenstechnik (DE-588)4062781-0 gnd Galliumnitrid (DE-588)4375592-6 gnd |
| subject_GND | (DE-588)4195920-6 (DE-588)4062781-0 (DE-588)4375592-6 (DE-588)4113937-9 |
| title | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications |
| title_alt | Design and fabrication of GaN-based laser diodes for single-mode and narrow-linewidth applications |
| title_auth | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications |
| title_exact_search | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications |
| title_full | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications vorgelegt von Luca Redaelli |
| title_fullStr | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications vorgelegt von Luca Redaelli |
| title_full_unstemmed | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications vorgelegt von Luca Redaelli |
| title_short | Design and fabrication of GaN based laser diodes for single mode and narrow linewidth aplications |
| title_sort | design and fabrication of gan based laser diodes for single mode and narrow linewidth aplications |
| topic | Laserdiode (DE-588)4195920-6 gnd Verfahrenstechnik (DE-588)4062781-0 gnd Galliumnitrid (DE-588)4375592-6 gnd |
| topic_facet | Laserdiode Verfahrenstechnik Galliumnitrid Hochschulschrift |
| url | https://nbn-resolving.org/urn:nbn:de:kobv:83-opus4-44878 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027041638&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT redaelliluca designandfabricationofganbasedlaserdiodesforsinglemodeandnarrowlinewidthaplications AT redaelliluca designandfabricationofganbasedlaserdiodesforsinglemodeandnarrowlinewidthapplications |