Practical guide to RF-MEMS:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH-Verl.
2013
|
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XVI, 344 S. Ill., graph. Darst. |
| ISBN: | 9783527335640 |
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Datensatz im Suchindex
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| adam_text |
IMAGE 1
CONTENTS
FOREWORD XI PREFACE XV
1 RF-MEMS APPLICATIONS AND THE STATE OF THE ART 1
1.1 INTRODUCTION 1
1.2 A BRIEF HISTORY OF MEMS AND RF-MEMS FROM THE PERSPECTIVE OF
TECHNOLOGY 2 1.3 RF-MEMS LUMPED COMPONENTS 3 1.3.1 VARIABLE CAPACITORS 4
1.3.2 INDUCTORS 10
1.3.3 OHMIC AND CAPACITIVE SWITCHES 12 1.4 RF-MEMS COMPLEX NETWORKS 20
1.4.1 RECONFIGURABLE IMPEDANCE-MATCHING NETWORKS 20 1.4.2 RECONFIGURABLE
RF POWER ATTENUATORS 23 1.4.3 RECONFIGURABLE PHASE SHIFTERS AND DELAY
LINES 26 1.4.4 RECONFIGURABLE SWITCHING MATRICES 26
1.5 MODELING AND SIMULATION OF RF-MEMS DEVICES 28 1.5.1 THE FINITE
ELEMENT METHOD APPROACH 28 1.5.2 COMPACT MODELING OF RF-MEMS 28 1.5.3
MIXED-DOMAIN ELECTROMECHANICAL SIMULATION ENVIRONMENT 30
1.6 PACKAGING OF RF-MEMS 31 1.7 BRIEF OVERVIEW OF EXPLOITATION OF
RF-MEMS IN RF SYSTEMS 33 1.8 CONCLUSIONS 38
2 THE BOOK IN BRIEF 41
2.1 INTRODUCTION 41
2.2 A BRIEF INTRODUCTION TO THE FBK RF-MEMS TECHNOLOGY 42 2.3 AN RF-MEMS
SERIES OHMIC SWITCH (DEV A) 44 2.4 RF-MEMS CAPACITIVE SWITCHES/VARACTORS
49 2.4.1 DESIGN 1 (DEV BL) 49
2.4.2 DESIGN 2 (DEV B2) 50
2.4.3 RF-MEMS OHMIC SWITCH WITH MICROHEATERS (DEV C) 50 2.4.4 MEMS-BASED
RECONFIGURABLE RF POWER ATTENUATOR (DEV D) 52
HTTP://D-NB.INFO/1033099937
IMAGE 2
VIII | CONTENTS
2.4.5 MEMS-BASED RECONFIGURABLE IMPEDANCE-MATCHING NETWORK (DEV E) 55
2.5 CONCLUSIONS 55
3 DESIGN 57
3.1 INTRODUCTION 57
3.2 DESIGN RULES OF THE FONDAZIONE BRUNO KESSLER RF-MEMS TECHNOLOGY 58
3.3 DESIGN OF AN RF-MEMS SERIES OHMIC SWITCH (DEV A) 60 3.4 GENERATION
OF 3D MODELS STARTING FROM THE 2D LAYOUT 77 3.5 CONCLUSIONS 83
4 SIMULATION TECHNIQUES (COMMERCIAL TOOLS) 85 4.1 INTRODUCTION 85
4.2 STATIC COUPLED ELECTROMECHANICAL SIMULATION OF THE RF-MEMS OHMIC
SWITCH (DEV A) IN ANSYS MULTIPHYSICS* 86 4.2.1 BLOCK 1: DEFINITION OF
THE GEOMETRY AND PROPERTIES OF THE MATERIAL 88 4.2.2 BLOCK 2: MESHING OF
THE STRUCTURE 92 4.2.3 BLOCK 3: GENERATION OF THE ELEMENTS FOR THE
ELECTROMECHANICAL
COUPLING 93
4.2.4 BLOCK 4: DEFINITION OF THE MECHANICAL BOUNDARY CONDITIONS 95 4.2.5
BLOCK 5: DEFINITION OF THE SIMULATION 97 4.2.6 BLOCK 6: SIMULATION
EXECUTION 99 4.2.7 BLOCK 7: POSTPROCESSING AND VISUALIZATION OF RESULTS
99 4.3 MODAL ANALYSIS OF THE RF-MEMS CAPACITIVE SWITCH (DEV B2) IN ANSYS
MULTIPHYSICS 101 4.4 COUPLED THERMOELECTROMECHANICAL SIMULATION OF THE
RF-MEMS OHMIC SWITCH WITH MICROHEATERS (DEV C) IN ANSYS MULTIPHYSICS 104
4.5 RF SIMULATION (S-PARAMETERS) OF THE RF-MEMS VARIABLE CAPACITOR
(DEV BL) IN ANSYS HFSS* 121 4.6 CONCLUSIONS 130
5 ON-PURPOSE SIMULATION TOOLS 133
5.1 INTRODUCTION 133
5.2 MEMS COMPACT MODEL LIBRARY 134 5.2.1 SUSPENDED RIGID PLATE
ELECTROMECHANICAL TRANSDUCER 134 5.2.2 FLEXIBLE BEAM 140
5.2.3 SIMULATION VALIDATION OF A MEMS TOGGLE SWITCH 144 5.3 A HYBRID
RF-MEMS/CMOS VCO 149 5.4 EXCERPTS OF VERILOG-A CODE IMPLEMENTED FOR MEMS
MODELS 151 5.4.1 ANCHOR POINT 152
5.4.2 FORCE SOURCE 154
5.4.3 FLEXIBLE BEAM 157 5.5 CONCLUSIONS 165
6 PACKAGING AND INTEGRATION 167
6.1 INTRODUCTION 167
6.2 A WLP SOLUTION FOR RF-MEMS DEVICES AND NETWORKS 168
IMAGE 3
CONTENTS | IX
6.2.1 PACKAGE FABRICATION PROCESS 169
6.2.2 WAFER-TO-WAFER BONDING SOLUTIONS 173 6.3 ENCAPSULATION OF RF-MEMS
DEVICES 177 6.3.1 THE ISSUE OF WAFER-TO-WAFER ALIGNMENT 178 6.3.2 HYBRID
PACKAGING SOLUTIONS FOR RF-MEMS DEVICES 180
6.4 FABRICATION RUN OF PACKAGED TEST STRUCTURES 181 6.5 ELECTROMAGNETIC
CHARACTERIZATION OF THE PACKAGE 185 6.5.1 VALIDATION OF THE S-PARAMETER
SIMULATIONS OF PACKAGED TEST STRUCTURES 186
6.5.2 PARAMETERIZED S-PARAMETER SIMULATION OF PACKAGED TEST STRUCTURES
187 6.6 INFLUENCE OF UNCOMPRESSED ACA ON THE RF PERFORMANCE OF CAPPED
MEMS DEVICES 191 6.7 CONCLUSIONS 194
7 POSTFABRICATION MODELING AND SIMULATIONS 195 7.1 INTRODUCTION 195
7.2 ELECTROMECHANICAL SIMULATION OF AN RF-MEMS VARACTOR (DEV B2) WITH
COMPACT MODELS 196 7.3 RF MODELING OF AN RF-MEMS VARACTOR (DEV B2) WITH
A LUMPED ELEMENT NETWORK 202
7.4 ELECTROMECHANICAL MODELING OF AN RF-MEMS SERIES OHMIC SWITCH (DEV A)
WITH COMPACT MODELS 213 7.5 ELECTROMAGNETIC MODELING AND SIMULATION OF
AN RF-MEMS IMPEDANCEMATCHING NETWORK (DEV E) FOR A GSM CMOS POWER
AMPLIFIER 218 7.5.1 INTRODUCTION 219
7.5.2 ELECTROMAGNETIC DESIGN AND OPTIMIZATION OF THE RF-MEMS
IMPEDANCEMATCHING NETWORK 219 7.5.3 DEIGN OF A RECONFIGURABLE CLASS E PA
224 7.5.4 EXPERIMENTAL RESULTS FOR THE HYBRID RF-MEMS/CMOS PA 227 7.6
ELECTROMAGNETIC SIMULATION OF AN RF-MEMS CAPACITIVE SWITCH (DEV BL)
IN ANSYS HFSS* 229 7.7 ELECTROMAGNETIC SIMULATION OF A MEMS-BASED
RECONFIGURABLE RF POWER ATTENUATOR (DEV D) IN ANSYS HFSS 234 7.8
CONCLUSIONS 238
APPENDIX A RIGID PLATE ELECTROMECHANICAL TRANSDUCER (COMPLETE MODEL) 241
A.L INTRODUCTION 241
A.2 MECHANICAL MODEL OF THE RIGID PLATE WITH FOUR DOFS 242 A.3 EXTENSION
OF THE MECHANICAL MODEL OF THE RIGID PLATE TO SIX DOFS 249 A.3.1
PLACEMENT OF NODES ALONG THE EDGES OF A RIGID PLATE 253 A.4 CONTACT
MODEL FOR RIGID PLATES WITH FOUR AND SIX DOFS 255 A.5 ELECTROSTATIC
MODEL OF THE RIGID PLATE 258
A.5.1 THE FOUR DOFS CONDITION 258 A.5.2 EXTENSION TO THE CASE OF SIX
DOFS 262 A.5.3 CURVED ELECTRIC FIELD LINES MODEL 266 A.6 ELECTROSTATIC
MODEL OF THE PLATE WITH HOLES 268
IMAGE 4
A.7 ELECTROSTATIC MODEL OF THE FRINGING EFFECT 272
A.7.1 FRINGING EFFECT ON THE VERTICAL FACES OF THE PLATE 278 A.8 VISCOUS
DAMPING MODEL 281 A.8.1 SQUEEZE-FILM VISCOUS DAMPING OF THE RIGID PLATE
WITH HOLES 281 A.8.2 VISCOUS DAMPING MODEL FOR LATERAL MOVEMENTS 284
A.8.3 EFFECT OF THE MEAN FREE PATH OF GAS MOLECULES 285 A.9 CONCLUSIONS
286
APPENDIX B FLEXIBLE STRAIGHT BEAM (COMPLETE MODEL) 287 B.L MECHANICAL
MODEL OF THE FLEXIBLE BEAM WITH TWO DEGREES OF FREEDOM 287 B.L.L THE
STIFFNESS MATRIX 288
B.1.2 THE MASS MATRIX 290 B.2 MECHANICAL MODEL OF THE FLEXIBLE BEAM WITH
12 DOFS 292 B.2.1 THE STIFFNESS MATRIX FOR 12 DOFS 293 B.2.2 THE MASS
MATRIX FOR 12 DOFS 297
B.3 COMPLETE MECHANICAL MODEL OF THE EULER BEAM WITH 12 DOFS 302 B.4
ELECTROSTATIC MODEL OF THE EULER BEAM WITH 12 DOFS 304 B.4.1 FRINGING
EFFECT MODEL 310 B.5 VISCOUS DAMPING MODEL 312
B.6 CONCLUSIONS 315
REFERENCES 317
INDEX 331 |
| any_adam_object | 1 |
| author | Iannacci, Jacopo 1977- |
| author_GND | (DE-588)1042848963 |
| author_facet | Iannacci, Jacopo 1977- |
| author_role | aut |
| author_sort | Iannacci, Jacopo 1977- |
| author_variant | j i ji |
| building | Verbundindex |
| bvnumber | BV041435720 |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)862961857 (DE-599)DNB1033099937 |
| dewey-full | 621.38132 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38132 |
| dewey-search | 621.38132 |
| dewey-sort | 3621.38132 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| indexdate | 2024-08-03T01:05:08Z |
| institution | BVB |
| isbn | 9783527335640 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026882587 |
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| physical | XVI, 344 S. Ill., graph. Darst. |
| publishDate | 2013 |
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| publisher | Wiley-VCH-Verl. |
| record_format | marc |
| spelling | Iannacci, Jacopo 1977- Verfasser (DE-588)1042848963 aut Practical guide to RF-MEMS Jacopo Iannacci Weinheim Wiley-VCH-Verl. 2013 XVI, 344 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Hochfrequenz (DE-588)4160130-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Hochfrequenzbauelement (DE-588)4160131-2 gnd rswk-swf Elektromechanik (DE-588)4151846-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Hochfrequenztechnik (DE-588)4025202-4 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf MEMS (DE-588)4824724-8 s Hochfrequenzbauelement (DE-588)4160131-2 s DE-604 Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s Hochfrequenz (DE-588)4160130-0 s Mikrosystemtechnik (DE-588)4221617-5 s Elektromechanik (DE-588)4151846-9 s Hochfrequenztechnik (DE-588)4025202-4 s Erscheint auch als Online-Ausgabe, EPUB 978-3-527-67394-0 Erscheint auch als Online-Ausgabe, PDF 978-3-527-67392-6 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4289672&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026882587&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Iannacci, Jacopo 1977- Practical guide to RF-MEMS Mikrosystemtechnik (DE-588)4221617-5 gnd Hochfrequenz (DE-588)4160130-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Hochfrequenzbauelement (DE-588)4160131-2 gnd Elektromechanik (DE-588)4151846-9 gnd MEMS (DE-588)4824724-8 gnd Hochfrequenztechnik (DE-588)4025202-4 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4160130-0 (DE-588)4039207-7 (DE-588)4160131-2 (DE-588)4151846-9 (DE-588)4824724-8 (DE-588)4025202-4 (DE-588)4205811-9 |
| title | Practical guide to RF-MEMS |
| title_auth | Practical guide to RF-MEMS |
| title_exact_search | Practical guide to RF-MEMS |
| title_full | Practical guide to RF-MEMS Jacopo Iannacci |
| title_fullStr | Practical guide to RF-MEMS Jacopo Iannacci |
| title_full_unstemmed | Practical guide to RF-MEMS Jacopo Iannacci |
| title_short | Practical guide to RF-MEMS |
| title_sort | practical guide to rf mems |
| topic | Mikrosystemtechnik (DE-588)4221617-5 gnd Hochfrequenz (DE-588)4160130-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Hochfrequenzbauelement (DE-588)4160131-2 gnd Elektromechanik (DE-588)4151846-9 gnd MEMS (DE-588)4824724-8 gnd Hochfrequenztechnik (DE-588)4025202-4 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikrosystemtechnik Hochfrequenz Mikroelektronik Hochfrequenzbauelement Elektromechanik MEMS Hochfrequenztechnik Mikromechanik |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=4289672&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026882587&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT iannaccijacopo practicalguidetorfmems |