CMOS-MEMS:
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Bibliographic Details
Format: Book
Language:English
Published: Weinheim Wiley-VCH 2013
Series:Advanced micro & nanosystems
Subjects:
Online Access:Inhaltstext
Physical Description:XIV, 594 S. Ill., graph. Darst.
ISBN:3527334998
9783527334995

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection! Description