Ion-solid interactions: fundamentals and applications

Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated...

Full description

Saved in:
Bibliographic Details
Main Authors: Nastasi, Michael 1950- (Author), Mayer, James W. 1930-2013 (Author), Hirvonen, James K. (Author)
Format: Book
Language:English
Published: Cambridge Cambridge Univ. Press 2004
Edition:1. paperback ed., transferred to digital print.
Series:Cambridge Solid State Science Series
Subjects:
Summary:Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties
Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis
Item Description:Literaturangaben
Physical Description:XXVI, 540 S. graph. Darst.
ISBN:052137376X
0521616069

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!