Ion-solid interactions: fundamentals and applications
Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated...
Gespeichert in:
Hauptverfasser: | , , |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Cambridge
Cambridge Univ. Press
2004
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Ausgabe: | 1. paperback ed., transferred to digital print. |
Schriftenreihe: | Cambridge Solid State Science Series
|
Schlagworte: | |
Zusammenfassung: | Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis |
Beschreibung: | Literaturangaben |
Beschreibung: | XXVI, 540 S. graph. Darst. |
ISBN: | 052137376X 0521616069 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
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020 | |a 052137376X |9 0-521-37376-X | ||
020 | |a 0521616069 |9 0-521-61606-9 | ||
035 | |a (OCoLC)862854951 | ||
035 | |a (DE-599)BVBBV041391017 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-19 | ||
050 | 0 | |a QC176.8.R3 | |
082 | 0 | |a 530.4/16 |2 20 | |
084 | |a UP 9300 |0 (DE-625)146457: |2 rvk | ||
084 | |a UP 9350 |0 (DE-625)146462: |2 rvk | ||
084 | |a FER 786f |2 stub | ||
084 | |a PHY 790f |2 stub | ||
100 | 1 | |a Nastasi, Michael |d 1950- |e Verfasser |0 (DE-588)1059463164 |4 aut | |
245 | 1 | 0 | |a Ion-solid interactions |b fundamentals and applications |c Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
246 | 1 | 3 | |a Ion solid interactions |
250 | |a 1. paperback ed., transferred to digital print. | ||
264 | 1 | |a Cambridge |b Cambridge Univ. Press |c 2004 | |
300 | |a XXVI, 540 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 0 | |a Cambridge Solid State Science Series | |
500 | |a Literaturangaben | ||
520 | 3 | |a Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties | |
520 | |a Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis | ||
650 | 7 | |a Ionen |2 gtt | |
650 | 7 | |a Vaste stoffen |2 gtt | |
650 | 4 | |a Ion bombardment | |
650 | 4 | |a Ion implantation |x Industrial applications | |
650 | 4 | |a Solids |x Effect of radiation on | |
650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ion |0 (DE-588)4027597-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Festkörper |0 (DE-588)4016918-2 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |D s |
689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Ion |0 (DE-588)4027597-8 |D s |
689 | 2 | 1 | |a Festkörper |0 (DE-588)4016918-2 |D s |
689 | 2 | |5 DE-604 | |
700 | 1 | |a Mayer, James W. |d 1930-2013 |e Verfasser |0 (DE-588)121494349 |4 aut | |
700 | 1 | |a Hirvonen, James K. |e Verfasser |4 aut | |
999 | |a oai:aleph.bib-bvb.de:BVB01-026838796 |
Datensatz im Suchindex
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any_adam_object | |
author | Nastasi, Michael 1950- Mayer, James W. 1930-2013 Hirvonen, James K. |
author_GND | (DE-588)1059463164 (DE-588)121494349 |
author_facet | Nastasi, Michael 1950- Mayer, James W. 1930-2013 Hirvonen, James K. |
author_role | aut aut aut |
author_sort | Nastasi, Michael 1950- |
author_variant | m n mn j w m jw jwm j k h jk jkh |
building | Verbundindex |
bvnumber | BV041391017 |
callnumber-first | Q - Science |
callnumber-label | QC176 |
callnumber-raw | QC176.8.R3 |
callnumber-search | QC176.8.R3 |
callnumber-sort | QC 3176.8 R3 |
callnumber-subject | QC - Physics |
classification_rvk | UP 9300 UP 9350 |
classification_tum | FER 786f PHY 790f |
ctrlnum | (OCoLC)862854951 (DE-599)BVBBV041391017 |
dewey-full | 530.4/16 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 530 - Physics |
dewey-raw | 530.4/16 |
dewey-search | 530.4/16 |
dewey-sort | 3530.4 216 |
dewey-tens | 530 - Physics |
discipline | Physik Fertigungstechnik |
edition | 1. paperback ed., transferred to digital print. |
format | Book |
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id | DE-604.BV041391017 |
illustrated | Illustrated |
indexdate | 2024-07-10T00:55:39Z |
institution | BVB |
isbn | 052137376X 0521616069 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026838796 |
oclc_num | 862854951 |
open_access_boolean | |
owner | DE-19 DE-BY-UBM |
owner_facet | DE-19 DE-BY-UBM |
physical | XXVI, 540 S. graph. Darst. |
publishDate | 2004 |
publishDateSearch | 2004 |
publishDateSort | 2004 |
publisher | Cambridge Univ. Press |
record_format | marc |
series2 | Cambridge Solid State Science Series |
spelling | Nastasi, Michael 1950- Verfasser (DE-588)1059463164 aut Ion-solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen Ion solid interactions 1. paperback ed., transferred to digital print. Cambridge Cambridge Univ. Press 2004 XXVI, 540 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cambridge Solid State Science Series Literaturangaben Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis Ionen gtt Vaste stoffen gtt Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenstrahlbearbeitung (DE-588)4277034-8 gnd rswk-swf Ion (DE-588)4027597-8 gnd rswk-swf Festkörper (DE-588)4016918-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 s DE-604 Ionenstrahlbearbeitung (DE-588)4277034-8 s Ion (DE-588)4027597-8 s Festkörper (DE-588)4016918-2 s Mayer, James W. 1930-2013 Verfasser (DE-588)121494349 aut Hirvonen, James K. Verfasser aut |
spellingShingle | Nastasi, Michael 1950- Mayer, James W. 1930-2013 Hirvonen, James K. Ion-solid interactions fundamentals and applications Ionen gtt Vaste stoffen gtt Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd Ion (DE-588)4027597-8 gnd Festkörper (DE-588)4016918-2 gnd |
subject_GND | (DE-588)4027606-5 (DE-588)4277034-8 (DE-588)4027597-8 (DE-588)4016918-2 |
title | Ion-solid interactions fundamentals and applications |
title_alt | Ion solid interactions |
title_auth | Ion-solid interactions fundamentals and applications |
title_exact_search | Ion-solid interactions fundamentals and applications |
title_full | Ion-solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
title_fullStr | Ion-solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
title_full_unstemmed | Ion-solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
title_short | Ion-solid interactions |
title_sort | ion solid interactions fundamentals and applications |
title_sub | fundamentals and applications |
topic | Ionen gtt Vaste stoffen gtt Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd Ion (DE-588)4027597-8 gnd Festkörper (DE-588)4016918-2 gnd |
topic_facet | Ionen Vaste stoffen Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Ionenimplantation Ionenstrahlbearbeitung Ion Festkörper |
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