Verfügbarkeit: Helium Ion Microscopy

Helium Ion Microscopy: Principles and Applications

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Bibliographische Detailangaben
1. Verfasser:	Joy, David C. 1943- (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	New York, NY [u.a.] Springer 2013
Schriftenreihe:	SpringerBriefs in Materials
Online-Zugang:	UBT01 Volltext Inhaltsverzeichnis Abstract
Beschreibung:	1 Online-Ressource
ISBN:	9781461486602
DOI:	10.1007/978-1-4614-8660-2

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MARC


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Datensatz im Suchindex

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adam_text	HELIUM ION MICROSCOPY / JOY, DAVID C. : 2013 TABLE OF CONTENTS / INHALTSVERZEICHNIS CHAPTER 1: INTRODUCTION TO HELIUM ION MICROSCOPY CHAPTER 2: MICROSCOPY WITH IONS - A BRIEF HISTORY CHAPTER 3: OPERATING THE HELIUM ION MICROSCOPE CHAPTER 4: ION –SOLID INTERACTIONS AND IMAGE FORMATION CHAPTER 5: CHARGING AND DAMAGE CHAPTER 6: MICROANALYSIS WITH THE HIM CHAPTER 7: ION GENERATED DAMAGE CHAPTER 8: WORKING WITH OTHER ION BEAMS CHAPTER 9: PATTERNING AND NANOFABRICATION CONCLUSION BIBLIOGRAPHY APPENDIX: ISE YIELDS, AND IONISE PARAMETERS FOR HE+ EXCITATION OF ELEMENTS AND COMPOUNDS INDEX DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT. HELIUM ION MICROSCOPY / JOY, DAVID C. : 2013 ABSTRACT / INHALTSTEXT HELIUM ION MICROSCOPY: PRINCIPLES AND APPLICATIONS DESCRIBES THE THEORY AND DISCUSSES THE PRACTICAL DETAILS OF WHY SCANNING MICROSCOPES USING BEAMS OF LIGHT IONS – SUCH AS THE HELIUM ION MICROSCOPE (HIM) – ARE DESTINED TO BECOME THE IMAGING TOOLS OF CHOICE FOR THE 21ST CENTURY. TOPICS COVERED INCLUDE THE PRINCIPLES, OPERATION, AND PERFORMANCE OF THE GASEOUS FIELD ION SOURCE (GFIS), AND A COMPARISON OF THE OPTICS OF ION AND ELECTRON BEAM MICROSCOPES INCLUDING THEIR OPERATING CONDITIONS, RESOLUTION, AND SIGNAL-TO-NOISE PERFORMANCE. THE PHYSICAL PRINCIPLES OF ION-INDUCED SECONDARY ELECTRON (ISE) GENERATION BY IONS ARE DISCUSSED, AND AN EXTENSIVE DATABASE OF ISE YIELDS FOR MANY ELEMENTS AND COMPOUNDS AS A FUNCTION OF INCIDENT ION SPECIES AND ITS ENERGY IS INCLUDED. BEAM DAMAGE AND CHARGING ARE FREQUENTLY OUTCOMES OF ION BEAM IRRADIATION, AND TECHNIQUES TO MINIMIZE SUCH PROBLEMS ARE PRESENTED. IN ADDITION TO IMAGING, IONS BEAMS CAN BE USED FOR THE CONTROLLED DEPOSITION, OR REMOVAL, OF SELECTED MATERIALS WITH NANOMETER PRECISION. THE TECHNIQUES AND CONDITIONS REQUIRED FOR NANOFABRICATION ARE DISCUSSED AND DEMONSTRATED. FINALLY, THE PROBLEM OF PERFORMING CHEMICAL MICROANALYSIS WITH ION BEAMS IS CONSIDERED. LOW ENERGY IONS CANNOT GENERATE X-RAY EMISSIONS, SO ALTERNATIVE TECHNIQUES SUCH AS RUTHERFORD BACKSCATTER IMAGING (RBI) OR SECONDARY ION MASS SPECTROMETRY (SIMS) ARE EXAMINED. SERVES AS A CONCISE BUT AUTHORITATIVE INTRODUCTION TO THE LATEST INNOVATION IN SCANNING MICROSCOPY COMPARES ION AND ELECTRON BEAMS AS OPTIONS FOR MICROSCOPY PRESENTS A DETAILED PHYSICAL MODEL OF ION-SOLID INTERACTIONS AND SIGNAL GENERATION PROVIDES A DETAILED DATABASE OF ISE YIELD BEHAVIOR AS A FUNCTION OF THE TARGET ION, ELEMENT, AND ENERGY DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
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spelling	Joy, David C. 1943- Verfasser (DE-588)17217242X aut Helium Ion Microscopy Principles and Applications David C. Joy New York, NY [u.a.] Springer 2013 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier SpringerBriefs in Materials Erscheint auch als Druckausgabe 978-1-4614-8659-6 https://doi.org/10.1007/978-1-4614-8660-2 Verlag Volltext Springer Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026826539&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis Springer Fremddatenuebernahme application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026826539&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Abstract
spellingShingle	Joy, David C. 1943- Helium Ion Microscopy Principles and Applications
title	Helium Ion Microscopy Principles and Applications
title_auth	Helium Ion Microscopy Principles and Applications
title_exact_search	Helium Ion Microscopy Principles and Applications
title_full	Helium Ion Microscopy Principles and Applications David C. Joy
title_fullStr	Helium Ion Microscopy Principles and Applications David C. Joy
title_full_unstemmed	Helium Ion Microscopy Principles and Applications David C. Joy
title_short	Helium Ion Microscopy
title_sort	helium ion microscopy principles and applications
title_sub	Principles and Applications
url	https://doi.org/10.1007/978-1-4614-8660-2 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026826539&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026826539&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA
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