High permittivity gate dielectric materials:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2013
|
| Schriftenreihe: | Springer series in advanced microelectronics
43 |
| Schlagworte: | |
| Online-Zugang: | BTU01 FHA01 FHI01 FHN01 FHR01 FKE01 FWS01 UBY01 Volltext Inhaltsverzeichnis Abstract |
| Beschreibung: | Online-Ressource |
| ISBN: | 9783642365355 |
| DOI: | 10.1007/978-3-642-36535-5 |
Internformat
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Datensatz im Suchindex
| DE-BY-FWS_katkey | 922960 |
|---|---|
| _version_ | 1824555126713483265 |
| adam_text | HIGH PERMITTIVITY GATE DIELECTRIC MATERIALS
/
: 2013
TABLE OF CONTENTS / INHALTSVERZEICHNIS
HISTORICAL PERSPECTIVES
HIGH MOBILITY CHANNELS
NON-VOLATILE MEMORY
HAFNIUM-BASED GATE DIELECTRIC MATERIALS
LANTHANUM-BASED HIGH-K GATE DIELECTRIC MATERIALS
CRYSTALLINE HIGH-K GATE DIELECTRIC MATERIALS
HIGH-K GATE DIELECTRIC PROCESSING.-METAL GATE ELECTRODES
FLAT-BAND/THRESHOLD VOLTAGE CONTROL
INTERFACES AND DEFECTS
ELECTRICAL CHARACTERIZATION AND PARAMETER EXTRACTION
NON-CONTACT METROLOGY OF HIGH-K GATE DIELECTRICS
CHANNEL MOBILITY
HIGH-K GATE DIELECTRIC RELIABILITY ISSUES
BIAS TEMPERATURE INSTABILITY
INTEGRATION ISSUES.
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
HIGH PERMITTIVITY GATE DIELECTRIC MATERIALS
/
: 2013
ABSTRACT / INHALTSTEXT
THE BOOK COMPREHENSIVELY COVERS ALL THE CURRENT AND THE EMERGING AREAS
OF THE PHYSICS AND THE TECHNOLOGY OF HIGH PERMITTIVITY GATE DIELECTRIC
MATERIALS, INCLUDING, TOPICS SUCH AS MOSFET BASICS AND CHARACTERISTICS,
HAFNIUM-BASED GATE DIELECTRIC MATERIALS, HF-BASED GATE DIELECTRIC
PROCESSING, METAL GATE ELECTRODES, FLAT-BAND AND THRESHOLD VOLTAGE
TUNING, CHANNEL MOBILITY, HIGH-K GATE STACK DEGRADATION AND RELIABILITY,
LANTHANIDE-BASED HIGH-K GATE STACK MATERIALS, TERNARY HAFNIA AND
LANTHANIA BASED HIGH-K GATE STACK FILMS, CRYSTALLINE HIGH-K OXIDES, HIGH
MOBILITY SUBSTRATES, AND PARAMETER EXTRACTION. EACH CHAPTER BEGINS WITH
THE BASICS NECESSARY FOR UNDERSTANDING THE TOPIC, FOLLOWED BY A
COMPREHENSIVE REVIEW OF THE LITERATURE, AND ULTIMATELY GRADUATING TO THE
CURRENT STATUS OF THE TECHNOLOGY AND OUR SCIENTIFIC UNDERSTANDING AND
THE FUTURE PROSPECTS.
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
|
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| indexdate | 2025-02-20T07:02:43Z |
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| isbn | 9783642365355 |
| language | English |
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| series | Springer series in advanced microelectronics |
| series2 | Springer series in advanced microelectronics |
| spellingShingle | High permittivity gate dielectric materials Springer series in advanced microelectronics Ingenieurwissenschaften Electronics Optical materials Engineering |
| title | High permittivity gate dielectric materials |
| title_auth | High permittivity gate dielectric materials |
| title_exact_search | High permittivity gate dielectric materials |
| title_full | High permittivity gate dielectric materials Samares Kar ..., ed. |
| title_fullStr | High permittivity gate dielectric materials Samares Kar ..., ed. |
| title_full_unstemmed | High permittivity gate dielectric materials Samares Kar ..., ed. |
| title_short | High permittivity gate dielectric materials |
| title_sort | high permittivity gate dielectric materials |
| topic | Ingenieurwissenschaften Electronics Optical materials Engineering |
| topic_facet | Ingenieurwissenschaften Electronics Optical materials Engineering |
| url | https://doi.org/10.1007/978-3-642-36535-5 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026216641&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026216641&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
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