Verfügbarkeit: Enabling technologies for MEMS and nanodevices

Enabling technologies for MEMS and nanodevices:

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Bibliographische Detailangaben
Weitere Verfasser:	Baltes, Henry 1941- (HerausgeberIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	Weinheim Wiley-VCH 2013
Schriftenreihe:	Advanced micro & nanosystems 1
Schlagworte:	Nanotechnologie MEMS Aufsatzsammlung
Online-Zugang:	Inhaltsverzeichnis Inhaltstext Inhaltsverzeichnis
Beschreibung:	XII, 427 S. Ill., graph. Darst.
ISBN:	9783527334988 352733498X

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Datensatz im Suchindex

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adam_text	CONTENTS PREFACE V LIST OF CONTRIBUTORS IX 1 M 3 : THE THIRD DIMENSION OF SILICON 1 P.M. SARRO 2 TRENDS IN MEMS COMMERCIALIZATION 21 J. W. KNUTTI AND H. V. ALLEN 3 CAPACITIVE INTERFACES FOR MEMS 49 V. P. PETKOV AND B. E. BOSER 4 PACKAGING OF ADVANCED MICRO- AND NANOSYSTEMS 93 V. M. BRIGHT, C. R. STOLDT, D.J. MONK, M. CHAPMAN, AND A. SALIAN 5 HIGH-FREQUENCY INTEGRATED MICROELECTROMECHANICAL RESONATORS AND FILTERS 165 F. AYAZI 6 MEMS IN MASS STORAGE SYSTEMS 193 T. R. ALBRECHT, J. U. BU, M. DESPONT, E. ELEJTHERIOU AND T. HIRANO 7 SCANNING MICRO- AND NANOPROBES FOR ELECTROCHEMICAL IMAGING 237 C. KRANZ, A. KUENG AND B. MIZAIKOFF 8 NANOFLUIDIC MODELING AND SIMULATION 289 M. GEIER, A. GREINER, D. KAUZLARIC AND J. G. KORVINK 9 NANOFLUIDICS - STRUCTURES AND DEVICES 319 J. LICHTENBERG AND H. BALTES ENABLING TECHNOLOGIES FIR MEMS AND NANODEVICES. EDITED BY H. BALTES, O. BRAND, G. K. FEDDER, C. HIEROLD, J. KORVINK, O. TABATA COPYRIGHT 2013 WILEY-VCH VERLAG GMBH & CO. KGAA, WEINHEIM ISBN: 978-3-527-33498-8 HTTP://D-NB.INFO/1031647422 CONTENTS 10 CARBON NANOTUBES AND SENSORS: A REVIEW 357 J. R. STETTER AND G.J. MACLAY 11 CMOS-BASED DNA SENSOR ARRAYS 383 R. THEWES, F. HOFINANN, A. FREY, M. SCHIENLE, C. PAULUS, P. SCHINDLER-BAUER, B. HOLZAPFL, AND R. BREDERLOW SUBJECT INDEX 415
any_adam_object	1
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dewey-tens	620 - Engineering and allied operations
discipline	Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
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subject_GND	(DE-588)4327470-5 (DE-588)4824724-8 (DE-588)4143413-4
title	Enabling technologies for MEMS and nanodevices
title_auth	Enabling technologies for MEMS and nanodevices
title_exact_search	Enabling technologies for MEMS and nanodevices
title_full	Enabling technologies for MEMS and nanodevices ed. by Henry Baltes ...
title_fullStr	Enabling technologies for MEMS and nanodevices ed. by Henry Baltes ...
title_full_unstemmed	Enabling technologies for MEMS and nanodevices ed. by Henry Baltes ...
title_short	Enabling technologies for MEMS and nanodevices
title_sort	enabling technologies for mems and nanodevices
topic	Nanotechnologie (DE-588)4327470-5 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	Nanotechnologie MEMS Aufsatzsammlung
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