Kockmann, N. (2013). Micro process engineering: Fundamentals, devices, fabrication, and applications. Wiley-VCH.
Chicago Style (17th ed.) CitationKockmann, Norbert. Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications. Weinheim: Wiley-VCH, 2013.
MLA (9th ed.) CitationKockmann, Norbert. Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications. Wiley-VCH, 2013.
Warning: These citations may not always be 100% accurate.