Micro process engineering: fundamentals, devices, fabrication, and applications
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2013
|
| Schriftenreihe: | Advanced micro & nanosystems
5 |
| Schlagworte: | |
| Beschreibung: | XXII, 507 S. Ill., graph. Darst. |
| ISBN: | 3527335005 9783527335008 |
Internformat
MARC
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| 020 | |a 9783527335008 |9 978-3-527-33500-8 | ||
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| 245 | 1 | 0 | |a Micro process engineering |b fundamentals, devices, fabrication, and applications |c ed. by Norbert Kockmann |
| 264 | 1 | |a Weinheim |b Wiley-VCH |c 2013 | |
| 300 | |a XXII, 507 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Advanced micro & nanosystems |v 5 | |
| 650 | 7 | |a Mikroverfahrenstechnik |2 gnd | |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Chemische Verfahrenstechnik |0 (DE-588)4069941-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrofluidik |0 (DE-588)4803438-1 |2 gnd |9 rswk-swf |
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| 689 | 2 | |5 DE-604 | |
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Datensatz im Suchindex
| _version_ | 1804150609554702336 |
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| any_adam_object | |
| author2 | Kockmann, Norbert |
| author2_role | edt |
| author2_variant | n k nk |
| author_facet | Kockmann, Norbert |
| building | Verbundindex |
| bvnumber | BV041189337 |
| classification_rvk | VN 7300 ZN 3750 |
| ctrlnum | (OCoLC)846958590 (DE-599)BVBBV041189337 |
| dewey-full | 660 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 660 - Chemical engineering |
| dewey-raw | 660 |
| dewey-search | 660 |
| dewey-sort | 3660 |
| dewey-tens | 660 - Chemical engineering |
| discipline | Chemie / Pharmazie Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV041189337 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:41:39Z |
| institution | BVB |
| isbn | 3527335005 9783527335008 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026164445 |
| oclc_num | 846958590 |
| open_access_boolean | |
| owner | DE-634 DE-92 DE-1043 |
| owner_facet | DE-634 DE-92 DE-1043 |
| physical | XXII, 507 S. Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley-VCH |
| record_format | marc |
| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann Weinheim Wiley-VCH 2013 XXII, 507 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 5 Mikroverfahrenstechnik gnd Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Chemische Verfahrenstechnik (DE-588)4069941-9 gnd rswk-swf Mikrofluidik (DE-588)4803438-1 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Mikrofluidik (DE-588)4803438-1 s Chemische Verfahrenstechnik (DE-588)4069941-9 s Kockmann, Norbert edt Erscheint auch als Online-Ausgabe, PDF 978-3-527-67505-0 Advanced micro & nanosystems 5 (DE-604)BV019371555 5 |
| spellingShingle | Micro process engineering fundamentals, devices, fabrication, and applications Advanced micro & nanosystems Mikroverfahrenstechnik gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Chemische Verfahrenstechnik (DE-588)4069941-9 gnd Mikrofluidik (DE-588)4803438-1 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4069941-9 (DE-588)4803438-1 |
| title | Micro process engineering fundamentals, devices, fabrication, and applications |
| title_auth | Micro process engineering fundamentals, devices, fabrication, and applications |
| title_exact_search | Micro process engineering fundamentals, devices, fabrication, and applications |
| title_full | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann |
| title_fullStr | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann |
| title_full_unstemmed | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann |
| title_short | Micro process engineering |
| title_sort | micro process engineering fundamentals devices fabrication and applications |
| title_sub | fundamentals, devices, fabrication, and applications |
| topic | Mikroverfahrenstechnik gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Chemische Verfahrenstechnik (DE-588)4069941-9 gnd Mikrofluidik (DE-588)4803438-1 gnd |
| topic_facet | Mikroverfahrenstechnik Mikrosystemtechnik Chemische Verfahrenstechnik Mikrofluidik |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT kockmannnorbert microprocessengineeringfundamentalsdevicesfabricationandapplications |