Solution processed zinc oxide thin-film transistors: = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2013
|
| Schlagworte: | |
| Online-Zugang: | Volltext Volltext http://d-nb.info/1034425757/34 Inhaltsverzeichnis |
| Beschreibung: | III, 142 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV041130551 | ||
| 003 | DE-604 | ||
| 005 | 20150701 | ||
| 007 | t | ||
| 008 | 130708s2013 gw ad|| m||| 00||| eng d | ||
| 015 | |a 13,O06 |2 dnb | ||
| 016 | 7 | |a 1034425757 |2 DE-101 | |
| 035 | |a (OCoLC)856814982 | ||
| 035 | |a (DE-599)DNB1034425757 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-BY | ||
| 049 | |a DE-384 |a DE-473 |a DE-703 |a DE-1051 |a DE-824 |a DE-29 |a DE-12 |a DE-91 |a DE-19 |a DE-1049 |a DE-92 |a DE-739 |a DE-898 |a DE-355 |a DE-706 |a DE-20 |a DE-1102 |a DE-29T | ||
| 100 | 1 | |a Faber, Hendrik Andreas |e Verfasser |0 (DE-588)1036794075 |4 aut | |
| 245 | 1 | 0 | |a Solution processed zinc oxide thin-film transistors |b = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |c von Hendrik Andreas Faber |
| 246 | 1 | 1 | |a Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |
| 264 | 1 | |c 2013 | |
| 300 | |a III, 142 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Erlangen-Nürnberg, Univ., Diss., 2012 | ||
| 650 | 0 | 7 | |a Transistor |0 (DE-588)4060646-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Zinkoxid |0 (DE-588)4190864-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sprühpyrolyse |0 (DE-588)4826672-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanopartikel |0 (DE-588)4333369-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Nanopartikel |0 (DE-588)4333369-2 |D s |
| 689 | 0 | 1 | |a Sprühpyrolyse |0 (DE-588)4826672-3 |D s |
| 689 | 0 | 2 | |a Zinkoxid |0 (DE-588)4190864-8 |D s |
| 689 | 0 | 3 | |a Transistor |0 (DE-588)4060646-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |o urn:nbn:de:bvb:29-opus-46327 |
| 856 | 4 | |u https://open.fau.de/handle/openfau/3350 |x Verlag |z kostenfrei |3 Volltext | |
| 856 | 4 | 1 | |u https://nbn-resolving.org/urn:nbn:de:bvb:29-opus-46327 |x Resolving-System |z kostenfrei |3 Volltext |
| 856 | 4 | |u http://d-nb.info/1034425757/34 |x Langzeitarchivierung Nationalbibliothek | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026106385&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 912 | |a ebook | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-026106385 | ||
Datensatz im Suchindex
| _version_ | 1804150523848294400 |
|---|---|
| adam_text | IMAGE 1
CONTENTS
1. INTRODUCTION AND MOTIVATION 1
2. THEORETICAL BACKGROUND 5
2.1. ZINC OXIDE 5
2.1.1. GENERAL PROPERTIES 5
2.1.2. FABRICATION METHODS: BULK CRYSTALS, THIN FILMS, NANOSTRUCTURES 7
2.1.3. INTENTIONAL AND UNINTENTIONAL DOPING IN ZNO 10
2.2. FIELD-EFFECT TRANSISTORS 12
2.2.1. ZINC OXIDE BASED TFTS IN LITERATURE 17
3. MATERIALS AND PROCESSING 19
3.1. SUBSTRATE MATERIALS 19
3.2. SEMICONDUCTING ZINC OXIDE 19
3.2.1. ZNO NANOPARTICLE SYNTHESIS AND DEPOSITION 19
3.2.2. ZNO DEPOSITION BY CHEMICAL SPRAY PYROLYSIS 20
3.3. DIELECTRIC MATERIALS 22
3.3.1. POLYMERS 22
3.3.2. SELF-ASSEMBLED MONOLAYERS 22
3.3.3. ZIRCONIUM OXIDE 23
3.4. CONDUCTING ELECTRODES 24
3.4.1. METAL ELECTRODES 24
3.4.2. DOPED ZINC OXIDE 24
3.5. DEVICE STRUCTURES 24
3.5.1. TRANSISTOR SETUPS 24
3.5.2. CAPACITOR S 25
3.5.3. CONDUCTIVITY TEST STRUCTURES 25
4. CHARACTERIZATION METHODS 27
4.1. MORPHOLOGY 27
4.1.1. ATOMIC FORCE MICROSCOPY 27
4.1.2. SURFACE PROFILOMETER 27
4.1.3. TRANSMISSION ELECTRON MICROSCOPY 27
4.2. OPTICAL METHODS 28
4.2.1. UV-VIS 28
4.2.2. PHOTOLUMINCSCCNCE 28
I
HTTP://D-NB.INFO/1036966860
IMAGE 2
II
CONTENTS
4.2.3. SUM-FREQUENCY GENERATION 28
4.3. ELECTRICAL CHARACTERIZATION 29
4.4. OTHER TECHNIQUES 29
4.4.1. THERMOGRAVIMETRIC ANALYSIS 29
4.4.2. SURFACE ENERGY DETERMINATION 29
RESULTS AND DISCUSSION 30
5. ZINC OXIDE AS SEMICONDUCTOR 3 3
5.1. FILM FORMATION AND PROPERTIES 33
5.1.1. NANOPARTICLES 33
5.1.1.1. OPTICAL PROPERTIES 33
5.1.1.2. AFM INVESTIGATIONS 36
5.1.1.3. HAIISMISSION ELECTRON MICROSCOPY 37
*5.1.2. SPRAY PVROLYSIS DEPOSITION 38
5.1.2.1. THERMOGRAVIMETRIC ANALYSIS OF SPRAY PYROLYSIS PRECUR SORS 38
5.1.2.2. AFM INVESTIGATIONS 39
5.1.2.3. TRANSMISSION ELECTRON MICROSCOPY 41
5.1.2.4. OPTICAL PROPERTIES 42
5.1.2.5. DIRECT PATTERNING - GENERAL REMARKS 43
5.2. COMPARISON OF DEVICE CONFIGURATIONS 46
5.2.1. BOTTOM-GATE DEVICE CONFIGURATIONS 46
5.2.2. TOP-GATE DEVICE CONFIGURATION 49
5.3. LITHIUM DOPING OF CSP DERIVED ZNO 53
5.4. POST-DEPOSITION OXYGEN PLASMA TREATMENT 56
6. DIELECTRIC MATERIAL 65
6.1. SPRAY PYROLYSIS DERIVED ZIRCONIUM OXIDE 65
7. CONDUCTING ELECTRODES 6 9
7.1. ALUMINUM DOPING OF CSP DERIVED ZNO 69
7.1.1. HYDROGEN PLASMA TREATMENT OF ZNO:AL STRUCTURES 73 7.2. IRIDIUM
DOPING OF CSP DERIVED ZNO WITH SUBSEQUENT H2 PLASMA TREAT MENT 75
8. TRANSISTORS WITH ELEMENTS STRUCTURED BY CHEMICAL SPRAY PYROLYSIS 85
8.1. TRANSISTORS WITH PARTIALLY PATTERNED ELEMENTS 85
8.1.1. SEMICONDUCTOR STRUCTURED BY CSP 85
8.1.2. SOURCE AND DRAIN ELECTRODES STRUCTURED BY CSP 87
8.2. ALL SPRAY PYROLYSIS DERIVED THIN-IILM TRANSISTOR 90
9. SUMMARY 9 9
IMAGE 3
CONTENTS
III
LO.ZUSAMMENFASSUNG 103
A. APPENDIX 107
B. LIST O F FIGURES 117
C. LIST O F TABLES 122
D. BIBLIOGRAPHY 124
E. ACKNOWLEDGEMENTS 141
|
| any_adam_object | 1 |
| author | Faber, Hendrik Andreas |
| author_GND | (DE-588)1036794075 |
| author_facet | Faber, Hendrik Andreas |
| author_role | aut |
| author_sort | Faber, Hendrik Andreas |
| author_variant | h a f ha haf |
| building | Verbundindex |
| bvnumber | BV041130551 |
| collection | ebook |
| ctrlnum | (OCoLC)856814982 (DE-599)DNB1034425757 |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02276nam a2200493 c 4500</leader><controlfield tag="001">BV041130551</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20150701 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">130708s2013 gw ad|| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">13,O06</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1034425757</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)856814982</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1034425757</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BY</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-473</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-1051</subfield><subfield code="a">DE-824</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-1049</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-739</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-1102</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Faber, Hendrik Andreas</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1036794075</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Solution processed zinc oxide thin-film transistors</subfield><subfield code="b">= Lösungsprozessierte Zinkoxid-Dünnschichttransistoren</subfield><subfield code="c">von Hendrik Andreas Faber</subfield></datafield><datafield tag="246" ind1="1" ind2="1"><subfield code="a">Lösungsprozessierte Zinkoxid-Dünnschichttransistoren</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">III, 142 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Erlangen-Nürnberg, Univ., Diss., 2012</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Transistor</subfield><subfield code="0">(DE-588)4060646-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Zinkoxid</subfield><subfield code="0">(DE-588)4190864-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sprühpyrolyse</subfield><subfield code="0">(DE-588)4826672-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanopartikel</subfield><subfield code="0">(DE-588)4333369-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanopartikel</subfield><subfield code="0">(DE-588)4333369-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Sprühpyrolyse</subfield><subfield code="0">(DE-588)4826672-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Zinkoxid</subfield><subfield code="0">(DE-588)4190864-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Transistor</subfield><subfield code="0">(DE-588)4060646-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="o">urn:nbn:de:bvb:29-opus-46327</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">https://open.fau.de/handle/openfau/3350</subfield><subfield code="x">Verlag</subfield><subfield code="z">kostenfrei</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://nbn-resolving.org/urn:nbn:de:bvb:29-opus-46327</subfield><subfield code="x">Resolving-System</subfield><subfield code="z">kostenfrei</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://d-nb.info/1034425757/34</subfield><subfield code="x">Langzeitarchivierung Nationalbibliothek</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026106385&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ebook</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-026106385</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV041130551 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:40:17Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026106385 |
| oclc_num | 856814982 |
| open_access_boolean | 1 |
| owner | DE-384 DE-473 DE-BY-UBG DE-703 DE-1051 DE-824 DE-29 DE-12 DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-1049 DE-92 DE-739 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-706 DE-20 DE-1102 DE-29T |
| owner_facet | DE-384 DE-473 DE-BY-UBG DE-703 DE-1051 DE-824 DE-29 DE-12 DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-1049 DE-92 DE-739 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-706 DE-20 DE-1102 DE-29T |
| physical | III, 142 S. Ill., graph. Darst. |
| psigel | ebook |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| record_format | marc |
| spelling | Faber, Hendrik Andreas Verfasser (DE-588)1036794075 aut Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren von Hendrik Andreas Faber Lösungsprozessierte Zinkoxid-Dünnschichttransistoren 2013 III, 142 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Erlangen-Nürnberg, Univ., Diss., 2012 Transistor (DE-588)4060646-6 gnd rswk-swf Zinkoxid (DE-588)4190864-8 gnd rswk-swf Sprühpyrolyse (DE-588)4826672-3 gnd rswk-swf Nanopartikel (DE-588)4333369-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Nanopartikel (DE-588)4333369-2 s Sprühpyrolyse (DE-588)4826672-3 s Zinkoxid (DE-588)4190864-8 s Transistor (DE-588)4060646-6 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:bvb:29-opus-46327 https://open.fau.de/handle/openfau/3350 Verlag kostenfrei Volltext https://nbn-resolving.org/urn:nbn:de:bvb:29-opus-46327 Resolving-System kostenfrei Volltext http://d-nb.info/1034425757/34 Langzeitarchivierung Nationalbibliothek DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026106385&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Faber, Hendrik Andreas Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren Transistor (DE-588)4060646-6 gnd Zinkoxid (DE-588)4190864-8 gnd Sprühpyrolyse (DE-588)4826672-3 gnd Nanopartikel (DE-588)4333369-2 gnd |
| subject_GND | (DE-588)4060646-6 (DE-588)4190864-8 (DE-588)4826672-3 (DE-588)4333369-2 (DE-588)4113937-9 |
| title | Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |
| title_alt | Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |
| title_auth | Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |
| title_exact_search | Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |
| title_full | Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren von Hendrik Andreas Faber |
| title_fullStr | Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren von Hendrik Andreas Faber |
| title_full_unstemmed | Solution processed zinc oxide thin-film transistors = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren von Hendrik Andreas Faber |
| title_short | Solution processed zinc oxide thin-film transistors |
| title_sort | solution processed zinc oxide thin film transistors losungsprozessierte zinkoxid dunnschichttransistoren |
| title_sub | = Lösungsprozessierte Zinkoxid-Dünnschichttransistoren |
| topic | Transistor (DE-588)4060646-6 gnd Zinkoxid (DE-588)4190864-8 gnd Sprühpyrolyse (DE-588)4826672-3 gnd Nanopartikel (DE-588)4333369-2 gnd |
| topic_facet | Transistor Zinkoxid Sprühpyrolyse Nanopartikel Hochschulschrift |
| url | https://open.fau.de/handle/openfau/3350 https://nbn-resolving.org/urn:nbn:de:bvb:29-opus-46327 http://d-nb.info/1034425757/34 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026106385&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT faberhendrikandreas solutionprocessedzincoxidethinfilmtransistorslosungsprozessiertezinkoxiddunnschichttransistoren AT faberhendrikandreas losungsprozessiertezinkoxiddunnschichttransistoren |