Verfügbarkeit: Nanoimprint lithography: an enabling process for nanofabrication

Nanoimprint lithography: an enabling process for nanofabrication:

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Bibliographische Detailangaben
1. Verfasser:	Zhou, Weimin 1933- (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Berlin [u.a.] Springer 2013
Schlagworte:	Ingenieurwissenschaften Nanochemistry Optical materials Nanotechnology Engineering Nanoprägen
Online-Zugang:	BTU01 FHA01 FHI01 FHN01 FHR01 FKE01 FWS01 UBY01 Volltext Inhaltsverzeichnis Abstract
Beschreibung:	1 Online-Ressource
ISBN:	9783642344282
DOI:	10.1007/978-3-642-34428-2

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Datensatz im Suchindex

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adam_text	NANOIMPRINT LITHOGRAPHY: AN ENABLING PROCESS FOR NANOFABRICATION / ZHOU, WEIMIN : 2013 TABLE OF CONTENTS / INHALTSVERZEICHNIS PRINCIPLES AND STATUES OF NANOIMPRINT LITHOGRAPHY STAMP FABRICATION STAMP SURFACE TREATMENT NANOIMPRINT LITHOGRAPHY RESISTS NANOIMPRINT LITHOGRAPHY PROCESS MODELING AND SIMULATION OF NIL APPLICATION OF NIL IN LIGHT EMITTING DIODES APPLICATION OF NIL IN MEMORY DEVICES APPLICATION OF NIL IN SOLAR CELL DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT. NANOIMPRINT LITHOGRAPHY: AN ENABLING PROCESS FOR NANOFABRICATION / ZHOU, WEIMIN : 2013 ABSTRACT / INHALTSTEXT NANOIMPRINT LITHOGRAPHY: AN ENABLING PROCESS FOR NANOFABRICATION PRESENTS A COMPREHENSIVE DESCRIPTION OF NANOTECHNOLOGY THAT IS ONE OF THE MOST PROMISING LOW-COST, HIGH-THROUGHPUT TECHNOLOGIES FOR MANUFACTURING NANOSTRUCTURES, AND AN EMERGING LITHOGRAPHY CANDIDATES FOR 22, 16 AND 11 NM NODES. IT PROVIDES THE EXCITING, MULTIDISCIPLINARY FIELD, OFFERING A WIDE RANGE OF TOPICS COVERING: PRINCIPLES, PROCESS, MATERIAL AND APPLICATION. THIS BOOK WOULD BE OF SPECIFIC INTEREST FOR RESEARCHERS AND GRADUATE STUDENTS IN THE FIELD OF NANOSCIENCE, NANOTECHNOLOGY AND NANOFABRICATION, MATERIAL, PHYSICAL, CHEMICAL, ELECTRIC ENGINEERING AND BIOLOGY. DR. WEIMIN ZHOU IS AN ASSOCIATE PROFESSOR AT SHANGHAI NANOTECHNOLOGY PROMOTION CENTER, CHINA DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
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spellingShingle	Zhou, Weimin 1933- Nanoimprint lithography: an enabling process for nanofabrication Ingenieurwissenschaften Nanochemistry Optical materials Nanotechnology Engineering Nanoprägen (DE-588)7546601-6 gnd
subject_GND	(DE-588)7546601-6
title	Nanoimprint lithography: an enabling process for nanofabrication
title_auth	Nanoimprint lithography: an enabling process for nanofabrication
title_exact_search	Nanoimprint lithography: an enabling process for nanofabrication
title_full	Nanoimprint lithography: an enabling process for nanofabrication Weimin Zhou
title_fullStr	Nanoimprint lithography: an enabling process for nanofabrication Weimin Zhou
title_full_unstemmed	Nanoimprint lithography: an enabling process for nanofabrication Weimin Zhou
title_short	Nanoimprint lithography: an enabling process for nanofabrication
title_sort	nanoimprint lithography an enabling process for nanofabrication
topic	Ingenieurwissenschaften Nanochemistry Optical materials Nanotechnology Engineering Nanoprägen (DE-588)7546601-6 gnd
topic_facet	Ingenieurwissenschaften Nanochemistry Optical materials Nanotechnology Engineering Nanoprägen
url	https://doi.org/10.1007/978-3-642-34428-2 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026045578&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026045578&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT zhouweimin nanoimprintlithographyanenablingprocessfornanofabrication

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