Verfügbarkeit: CMOS-MEMS :: THWS Bibkatalog

CMOS-MEMS:

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Bibliographische Detailangaben
Format:	Buch
Sprache:	English
Veröffentlicht:	Weinheim Wiley-VCH 2013
Schriftenreihe:	Advanced micro & nanosystems 2
Schlagworte:	CMOS MEMS Aufsatzsammlung
Online-Zugang:	Inhaltstext Inhaltsverzeichnis
Beschreibung:	XIV, 594 S. Ill., graph. Darst.
ISBN:	3527334998 9783527334995

Internformat

MARC


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Datensatz im Suchindex

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adam_text	IMAGE 1 CONTENTS PREFACE V FOREWORD IX LIST OF CONTRIBUTORS XIII 1 FABRICATION TECHNOLOGY 1 O. BRAND 2 MATERIAL CHARACTERIZATION 69 J. 0 . PAUL AND P. RUTHER 3 MONOLITHICALLY INTEGRATED INERTIAL SENSORS 137 G. K. FEDDER, J. CHAE, H . KULAH, K. NAJAJI, T. DENISON, J. KUANG, A N D S. LEWIS 4 CMOS-MEMS ACOUSTIC DEVICES 193 J.J. NEUMANN A N D K.J. GABRIEL 5 RF CMOS MEMS 225 T. MUKHEIJEE AND G. K. FEDDER 6 CMOS-BASED PRESSURE SENSORS 257 H.-J. TIMME 7 CMOS-BASED CHEMICAL SENSORS 335 A. HIERLEMANN 8 BIOMETRIC CAPACITIVE CMOS FINGERPRINT SENSOR SYSTEMS 391 C. HIEROLD, G. HRIBERNIG, A N D T. SCHEITER 9 CMOS-BASED BIOCHEMICAL SENSING SYSTEMS 447 J. LICHTENBERG, H . BALTES HTTP://D-NB.INFO/1031647430 IMAGE 2 CONTENTS 10 CMOS-BASED THERMAL SENSORS 479 T. A K I N 11 CIRCUIT AND SYSTEM INTEGRATION 513 C. HAGLEITNER A N D K.-U. KIRSTEIN SUBJECT INDEX 579
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dewey-search	621.3815
dewey-sort	3621.3815
dewey-tens	620 - Engineering and allied operations
discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
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genre_facet	Aufsatzsammlung
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indexdate	2024-08-03T00:39:16Z
institution	BVB
isbn	3527334998 9783527334995
language	English
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physical	XIV, 594 S. Ill., graph. Darst.
publishDate	2013
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publisher	Wiley-VCH
record_format	marc
series	Advanced micro & nanosystems
series2	Advanced micro & nanosystems
spelling	CMOS-MEMS Vol. ed.: Oliver Brand ... CMOS - MEMS Weinheim Wiley-VCH 2013 XIV, 594 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 2 CMOS (DE-588)4010319-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content CMOS (DE-588)4010319-5 s MEMS (DE-588)4824724-8 s DE-604 Brand, Oliver 1964- Sonstige (DE-588)123279216 oth Erscheint auch als Online-Ausgabe, PDF 978-3-527-67506-7 Advanced micro & nanosystems 2 (DE-604)BV019371555 2 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4260013&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025974280&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	CMOS-MEMS Advanced micro & nanosystems CMOS (DE-588)4010319-5 gnd MEMS (DE-588)4824724-8 gnd
subject_GND	(DE-588)4010319-5 (DE-588)4824724-8 (DE-588)4143413-4
title	CMOS-MEMS
title_alt	CMOS - MEMS
title_auth	CMOS-MEMS
title_exact_search	CMOS-MEMS
title_full	CMOS-MEMS Vol. ed.: Oliver Brand ...
title_fullStr	CMOS-MEMS Vol. ed.: Oliver Brand ...
title_full_unstemmed	CMOS-MEMS Vol. ed.: Oliver Brand ...
title_short	CMOS-MEMS
title_sort	cmos mems
topic	CMOS (DE-588)4010319-5 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	CMOS MEMS Aufsatzsammlung
url	http://deposit.dnb.de/cgi-bin/dokserv?id=4260013&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025974280&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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work_keys_str_mv	AT brandoliver cmosmems

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