Multilayer integrated film bulk acoustic resonators:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2013
|
| Schlagworte: | |
| Online-Zugang: | BTU01 FHA01 FHI01 FHN01 FHR01 FKE01 FWS01 UBY01 Volltext Inhaltsverzeichnis Abstract |
| Beschreibung: | Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR. |
| Beschreibung: | 1 Online-Ressource (X, 152 p. 97 illus) |
| ISBN: | 9783642317767 |
| DOI: | 10.1007/978-3-642-31776-7 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV040900565 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 130321s2013 |||| o||u| ||||||eng d | ||
| 020 | |a 9783642317767 |c Online |9 978-3-642-31776-7 | ||
| 024 | 7 | |a 10.1007/978-3-642-31776-7 |2 doi | |
| 035 | |a (OCoLC)819812836 | ||
| 035 | |a (DE-599)BVBBV040900565 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-898 |a DE-634 |a DE-573 |a DE-92 |a DE-Aug4 |a DE-859 |a DE-706 |a DE-863 | ||
| 082 | 0 | |a 620.5 | |
| 100 | 1 | |a Zhang, Yafei |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Multilayer integrated film bulk acoustic resonators |c Yafei Zhang ; Da Chen |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 2013 | |
| 300 | |a 1 Online-Ressource (X, 152 p. 97 illus) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR. | ||
| 650 | 4 | |a Ingenieurwissenschaften | |
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Surfaces (Physics) | |
| 700 | 1 | |a Chen, Da |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 978-3-642-31775-0 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-642-31776-7 |x Verlag |3 Volltext |
| 856 | 4 | 2 | |m Springer Fremddatenuebernahme |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025881708&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 856 | 4 | 2 | |m Springer Fremddatenuebernahme |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025881708&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |3 Abstract |
| 912 | |a ZDB-2-ENG | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-025881708 | ||
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l BTU01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l FHA01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l FHI01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l FHN01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l FHR01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l FKE01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l FWS01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-31776-7 |l UBY01 |p ZDB-2-ENG |x Verlag |3 Volltext | |
Datensatz im Suchindex
| DE-BY-FWS_katkey | 923134 |
|---|---|
| _version_ | 1806194905375047680 |
| adam_text | MULTILAYER INTEGRATED FILM BULK ACOUSTIC RESONATORS
/ ZHANG, YAFEI
: 2013
TABLE OF CONTENTS / INHALTSVERZEICHNIS
INTRODUCTION
PROPAGATION OF ACOUSTIC WAVE IN CRYSTALS
THE THEORY OF FBAR
THE SPUTTERING DEPOSITION AND ETCHING OF ALN FILM
THE MEMBRANE STRUCTURED FBAR
SOLIDLY MOUNTED ACOUSTIC RESONATOR
THE APPLICATION OF FBAR IN RF FILTERS
THE FBAR EXCITED BY LATERAL FILED
HIGH SENSITIVE SENSORS BASED ON FBAR.
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
MULTILAYER INTEGRATED FILM BULK ACOUSTIC RESONATORS
/ ZHANG, YAFEI
: 2013
ABSTRACT / INHALTSTEXT
MULTILAYER INTEGRATED FILM BULK ACOUSTIC RESONATORS MAINLY INTRODUCES
THE THEORY, DESIGN, FABRICATION TECHNOLOGY AND APPLICATION OF A RECENTLY
DEVELOPED NEW TYPE OF DEVICE, MULTILAYER INTEGRATED FILM BULK ACOUSTIC
RESONATORS, AT THE MICRO AND NANO SCALE INVOLVING MICROELECTRONIC
DEVICES, INTEGRATED CIRCUITS, OPTICAL DEVICES, SENSORS AND ACTUATORS,
ACOUSTIC RESONATORS, MICRO-NANO MANUFACTURING, MULTILAYER INTEGRATION,
DEVICE THEORY AND DESIGN PRINCIPLES, ETC. THESE DEVICES CAN WORK AT VERY
HIGH FREQUENCIES BY USING THE NEWLY DEVELOPED THEORY, DESIGN, AND
FABRICATION TECHNOLOGY OF NANO AND MICRO DEVICES. READERS IN FIELDS OF
IC, ELECTRONIC DEVICES, SENSORS, MATERIALS, AND FILMS ETC. WILL BENEFIT
FROM THIS BOOK BY LEARNING THE DETAILED FUNDAMENTALS AND POTENTIAL
APPLICATIONS OF THESE ADVANCED DEVICES. PROF. YAFEI ZHANG IS THE
DIRECTOR OF THE MINISTRY OF EDUCATION’S KEY LABORATORY FOR THIN FILMS
AND MICROFABRICATION TECHNOLOGY, PRC; DR. DA CHEN WAS A PHD STUDENT IN
PROF. YAFEI ZHANG’S RESEARCH GROUP
DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
|
| any_adam_object | 1 |
| author | Zhang, Yafei |
| author_facet | Zhang, Yafei |
| author_role | aut |
| author_sort | Zhang, Yafei |
| author_variant | y z yz |
| building | Verbundindex |
| bvnumber | BV040900565 |
| collection | ZDB-2-ENG |
| ctrlnum | (OCoLC)819812836 (DE-599)BVBBV040900565 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| doi_str_mv | 10.1007/978-3-642-31776-7 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02795nmm a2200493zc 4500</leader><controlfield tag="001">BV040900565</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">130321s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642317767</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-642-31776-7</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-642-31776-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)819812836</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV040900565</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-898</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-573</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-863</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.5</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Zhang, Yafei</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Multilayer integrated film bulk acoustic resonators</subfield><subfield code="c">Yafei Zhang ; Da Chen</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (X, 152 p. 97 illus)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ingenieurwissenschaften</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces (Physics)</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Chen, Da</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">978-3-642-31775-0</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Springer Fremddatenuebernahme</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025881708&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Springer Fremddatenuebernahme</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025881708&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Abstract</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025881708</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">FHA01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">FHI01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">FHN01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">FHR01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">FKE01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">FWS01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-31776-7</subfield><subfield code="l">UBY01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV040900565 |
| illustrated | Not Illustrated |
| indexdate | 2024-08-01T16:14:51Z |
| institution | BVB |
| isbn | 9783642317767 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025881708 |
| oclc_num | 819812836 |
| open_access_boolean | |
| owner | DE-898 DE-BY-UBR DE-634 DE-573 DE-92 DE-Aug4 DE-859 DE-706 DE-863 DE-BY-FWS |
| owner_facet | DE-898 DE-BY-UBR DE-634 DE-573 DE-92 DE-Aug4 DE-859 DE-706 DE-863 DE-BY-FWS |
| physical | 1 Online-Ressource (X, 152 p. 97 illus) |
| psigel | ZDB-2-ENG |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Springer |
| record_format | marc |
| spellingShingle | Zhang, Yafei Multilayer integrated film bulk acoustic resonators Ingenieurwissenschaften Engineering Surfaces (Physics) |
| title | Multilayer integrated film bulk acoustic resonators |
| title_auth | Multilayer integrated film bulk acoustic resonators |
| title_exact_search | Multilayer integrated film bulk acoustic resonators |
| title_full | Multilayer integrated film bulk acoustic resonators Yafei Zhang ; Da Chen |
| title_fullStr | Multilayer integrated film bulk acoustic resonators Yafei Zhang ; Da Chen |
| title_full_unstemmed | Multilayer integrated film bulk acoustic resonators Yafei Zhang ; Da Chen |
| title_short | Multilayer integrated film bulk acoustic resonators |
| title_sort | multilayer integrated film bulk acoustic resonators |
| topic | Ingenieurwissenschaften Engineering Surfaces (Physics) |
| topic_facet | Ingenieurwissenschaften Engineering Surfaces (Physics) |
| url | https://doi.org/10.1007/978-3-642-31776-7 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025881708&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025881708&sequence=000003&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT zhangyafei multilayerintegratedfilmbulkacousticresonators AT chenda multilayerintegratedfilmbulkacousticresonators |