Verfügbarkeit: Nanodiodes and nanoantennas fabricated by transfer technology

Nanodiodes and nanoantennas fabricated by transfer technology:

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Bibliographische Detailangaben
1. Verfasser:	Bareiß, Mario (VerfasserIn)
Format:	Abschlussarbeit Buch
Sprache:	English
Veröffentlicht:	2012
Schlagworte:	Optoelektronischer Sensor Nanotechnologie Infrarotdetektor Hochschulschrift
Online-Zugang:	Volltext https://nbn-resolving.org/urn:nbn:de:bvb:91-diss-20121126-1115812-1-2 Inhaltsverzeichnis
Beschreibung:	X, 154 S. Ill., graph. Darst.

Internformat

MARC


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Datensatz im Suchindex

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adam_text	IMAGE 1 CONTENTS 1 INTRODUCTION 1 2 STATE O F T H E ART 5 3 FABRICATION METHODS 13 3.1 THERMAL EVAPORATION 13 3.2 SPUTTERING 15 3.3 LITHOGRAPHY 15 3.3.1 OPTICAL LITHOGRAPHY 16 3.3.2 ELECTRON BEAM LITHOGRAPHY 16 3.4 NANOIMPRINT LITHOGRAPHY 16 3.4.1 CONCEPT OF NANOIMPRINT LITHOGRAPHY 18 3.4.2 STAMP FABRICATION 20 3.4.3 ADVANTAGES OF NIL WITH RESPECT TO EBL 20 3.5 REACTIVE-ION ETCHING 21 3.6 ATOMIC LAYER DEPOSITION 22 3.7 CVD IN NVISION 40 DUAL BEAM 24 3.8 FOCUSED ION BEAM 25 3.9 PLASMA ASHER 27 3.10 DESICCATOR 27 4 CHARACTERIZATION METHODS 29 4.1 OPTICAL MICROSCOPE 29 4.2 ATOMIC FORCE MICROSCOPE 29 4.3 PROBE STATION 31 4.3.1 MICROSCALE TIPS 31 4.3.2 NANOSCALE TIPS 31 4.4 SCANNING ELECTRON MICROSCOPE 33 4.5 ELLIPSOMETRY 34 4.6 SETUP FOR OPTOELECTRONIC CHARACTERIZATION 35 VII HTTP://D-NB.INFO/1034714619 IMAGE 2 VIII CONTENTS 5 NANOTRANSFER PRINTING TECHNOLOGY 3 7 5.1 BASIC CONCEPT 37 5.2 HYDROPHILICTY 3 8 5.3 TEMPERATURE 41 5.4 STRUCTURES FABRICATED WITH MBE STAMPS 45 5.5 STRUCTURES FABRICATED BY SI WAFER STAMPS 49 5.5.1 FABRICATION OF SI WAFER STAMPS 49 5.5.2 NANOTRANSFER PRINTING 50 5.6 CONCLUSIONS 53 6 METAL-INSULATOR-METAL (MIM) TUNNELING DIODE 5 7 6.1 THEORY OF MIM DIODES 57 6.2 DIELECTRIC FABRICATION METHODS 64 6.2.1 ALUMINUM OXIDE * . . . . 64 6.2.2 TITANIUM OXIDE 66 6.2.3 ORGANIC MIM DIODES 66 6.3 MICROSCALE MIM TUNNELING DIODES FEATURING A A10 X DIELECTRIC . . . 68 6.4 NANOSCALE MIM TUNNELING DIODES FEATURING A A10 X DIELECTRIC . . . 76 6.5 MIM MICROSCALE AND NANOSCALE DIODES FEATURING A TIO X DIELECTRIC . 84 6.6 P T BRIDGES FROM MIM DIODES TO CONTACT PADS 92 6.7 CONCLUSIONS 92 7 NANO ANTENNA AND RECTENNA ARRAYS 9 3 7.1 THEORETICAL BACKGROUND OF DIPOLE ANTENNAS 93 7.2 IR SENSITIVE ANTENNA AND RECTENNA ARRAYS 95 7.3 TRANSFER PRINTED ANTENNAS 97 7.4 RECTENNA ARRAY 98 7.4.1 SIMULATION OF SPATIAL DIMENSIONS WITH THE ARRAY 98 7.4.2 CONCEPT OF RECTENNA ARRAY FABRICATION AND OPERATION . . . . 99 7.4.3 OPTOELECTRONIC CHARACTERIZATION OF RECTENNA ARRAY 102 7.4.4 SEEBECK EFFECT VS. TUNNELING RECTIFICATION 103 7.5 CONCLUSIONS 105 8 CONCLUSION AND OUTLOOK 107 8.1 CONCLUSION 107 8.2 OUTLOOK 109 A PROCESS PARAMETERS 111 A.L ALUMINUM EVAPORATION IN LEYBOLD UNIVEX 350G: RATE- ESTABLISHED FUNCTION I L L A.2 FABRICATION OF SAM ON TI, SI, SI02 AND GLASS 112 A.3 FABRICATION OF SAM ON GAAS 112 A.4 OPTICAL LITHOGRAPHY 114 IMAGE 3 CONTENTS IX A.4.1 NEGATIVE RESIST 114 A.4.2 POSITIVE RESIST 115 A.5 FABRICATION OF MOLYBDENUM SHADOW MASK 115 A.6 ACTIVATION OF SURFACES (HYDROPHILICITY) 116 A. 7 TRANSFER PRINTING WITH OBDUCAT 117 B P & I D O F LEYBOLD U N I V E X 350G 119 C STAMP DESIGNS 121 C.L GAAS/ALGAAS MBE STAMPS FOR ANTENNA STRUCTURES 121 C.2 SI WAFER STAMPS 122 VEROFFENTLICHUNGEN 125 LIST O F FIGURES 131 LITERATURVERZEICHNIS 149 ACKNOWLEDGMENT 151 STATEMENT 154
any_adam_object	1
author	Bareiß, Mario
author_facet	Bareiß, Mario
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ctrlnum	(OCoLC)835600597 (DE-599)BVBBV040894996
discipline	Elektrotechnik
format	Thesis Book
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spelling	Bareiß, Mario Verfasser aut Nanodiodes and nanoantennas fabricated by transfer technology Mario Bareiß 2012 X, 154 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier München, Techn. Univ., Diss., 2012 Optoelektronischer Sensor (DE-588)4200223-0 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Infrarotdetektor (DE-588)4161692-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Infrarotdetektor (DE-588)4161692-3 s Optoelektronischer Sensor (DE-588)4200223-0 s Nanotechnologie (DE-588)4327470-5 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:bvb:91-diss-20121126-1115812-1-2 http://mediatum.ub.tum.de/node?id=1115812 Verlag kostenfrei Volltext https://nbn-resolving.org/urn:nbn:de:bvb:91-diss-20121126-1115812-1-2 Resolving-System DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025874580&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Bareiß, Mario Nanodiodes and nanoantennas fabricated by transfer technology Optoelektronischer Sensor (DE-588)4200223-0 gnd Nanotechnologie (DE-588)4327470-5 gnd Infrarotdetektor (DE-588)4161692-3 gnd
subject_GND	(DE-588)4200223-0 (DE-588)4327470-5 (DE-588)4161692-3 (DE-588)4113937-9
title	Nanodiodes and nanoantennas fabricated by transfer technology
title_auth	Nanodiodes and nanoantennas fabricated by transfer technology
title_exact_search	Nanodiodes and nanoantennas fabricated by transfer technology
title_full	Nanodiodes and nanoantennas fabricated by transfer technology Mario Bareiß
title_fullStr	Nanodiodes and nanoantennas fabricated by transfer technology Mario Bareiß
title_full_unstemmed	Nanodiodes and nanoantennas fabricated by transfer technology Mario Bareiß
title_short	Nanodiodes and nanoantennas fabricated by transfer technology
title_sort	nanodiodes and nanoantennas fabricated by transfer technology
topic	Optoelektronischer Sensor (DE-588)4200223-0 gnd Nanotechnologie (DE-588)4327470-5 gnd Infrarotdetektor (DE-588)4161692-3 gnd
topic_facet	Optoelektronischer Sensor Nanotechnologie Infrarotdetektor Hochschulschrift
url	http://mediatum.ub.tum.de/node?id=1115812 https://nbn-resolving.org/urn:nbn:de:bvb:91-diss-20121126-1115812-1-2 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025874580&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT bareißmario nanodiodesandnanoantennasfabricatedbytransfertechnology

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