Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2012
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| Schlagworte: | |
| Beschreibung: | Auch als Online-Diss. unter der URL: https://epub.uni-bayreuth.de/id/eprint/186 |
| Beschreibung: | 142 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| author | Wieberger, Florian |
| author_facet | Wieberger, Florian |
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| ctrlnum | (OCoLC)826597696 (DE-599)BVBBV040680123 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| indexdate | 2024-07-10T00:28:58Z |
| institution | BVB |
| language | English |
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| physical | 142 S. Ill., graph. Darst. |
| publishDate | 2012 |
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| spelling | Wieberger, Florian Verfasser aut Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications vorgelegt von Florian Wieberger 2012 142 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Auch als Online-Diss. unter der URL: https://epub.uni-bayreuth.de/id/eprint/186 Bayreuth, Univ., Diss., 2012 Mit einer Zssfassung in dt. Sprache Photoresist (DE-588)4174545-0 gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Atom-Transfer-Polymerisation (DE-588)4664669-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Photoresist (DE-588)4174545-0 s Elektronenstrahllithografie (DE-588)4151897-4 s Atom-Transfer-Polymerisation (DE-588)4664669-3 s DE-604 |
| spellingShingle | Wieberger, Florian Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications Photoresist (DE-588)4174545-0 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd Atom-Transfer-Polymerisation (DE-588)4664669-3 gnd |
| subject_GND | (DE-588)4174545-0 (DE-588)4151897-4 (DE-588)4664669-3 (DE-588)4113937-9 |
| title | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications |
| title_auth | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications |
| title_exact_search | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications |
| title_full | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications vorgelegt von Florian Wieberger |
| title_fullStr | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications vorgelegt von Florian Wieberger |
| title_full_unstemmed | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications vorgelegt von Florian Wieberger |
| title_short | Synthesis and combinatorial optimization of novel star-shaped resist materials for lithographic applications |
| title_sort | synthesis and combinatorial optimization of novel star shaped resist materials for lithographic applications |
| topic | Photoresist (DE-588)4174545-0 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd Atom-Transfer-Polymerisation (DE-588)4664669-3 gnd |
| topic_facet | Photoresist Elektronenstrahllithografie Atom-Transfer-Polymerisation Hochschulschrift |
| work_keys_str_mv | AT wiebergerflorian synthesisandcombinatorialoptimizationofnovelstarshapedresistmaterialsforlithographicapplications |