Analysis of high-k materials with Local Electrode Atom Probe:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2012
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| Schriftenreihe: | Berichte aus der Halbleitertechnik
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XI, 90 S. Ill., graph. Darst. |
| ISBN: | 9783844013405 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV040609734 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 121205s2012 gw ad|| m||| 00||| eng d | ||
| 015 | |a 12,N37 |2 dnb | ||
| 016 | 7 | |a 1025690311 |2 DE-101 | |
| 020 | |a 9783844013405 |c Gb. : EUR 45.80 (DE), EUR 45.80 (AT), sfr 57.25 (freier Pr.) |9 978-3-8440-1340-5 | ||
| 024 | 3 | |a 9783844013405 | |
| 035 | |a (OCoLC)822256717 | ||
| 035 | |a (DE-599)DNB1025690311 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-NW | ||
| 049 | |a DE-83 | ||
| 082 | 0 | |a 537.24 |2 22/ger | |
| 084 | |a 621.3 |2 sdnb | ||
| 100 | 1 | |a Mutas, Sergej |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Analysis of high-k materials with Local Electrode Atom Probe |c Sergej Mutas |
| 264 | 1 | |a Aachen |b Shaker |c 2012 | |
| 300 | |a XI, 90 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Berichte aus der Halbleitertechnik | |
| 502 | |a Zugl.: Berlin, Techn. Univ., Diss., 2012 | ||
| 650 | 0 | 7 | |a Atomsonde |0 (DE-588)4318518-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a High-k-Dielektrikum |0 (DE-588)7602833-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a High-k-Dielektrikum |0 (DE-588)7602833-1 |D s |
| 689 | 0 | 1 | |a Atomsonde |0 (DE-588)4318518-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025437327&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-025437327 | ||
Datensatz im Suchindex
| _version_ | 1804149703139393536 |
|---|---|
| adam_text | IMAGE 1
INHALTSVERZEICHNIS
1. INTRODUCTION 1
2. EXPERIMENTAL AND TECHNOLOGICAL INTRODUCTION 4
2.1. MOSFET: AN INTRODUCTION 4
2.1.1. MOSFET: HOW DOES IT WORK 4
2.1.2. MOSFET WITH SILICON OXIDE AS A GATE DIELECTRIC 4
2.1.3. M O S F E T WITH SION AS A GATE OXIDE 6
2.1.4. MOSFET WITH HIGH-K MATERIALS AS A GATE OXIDE 6
2.1.5. ENERGY DIAGRAM FOR THE HIGH-K / METAL GATE MOSFETS 7
2.1.6. HIGH-K MATERIAL, METAL GATE AND CHANNEL-SIGE IN A P-MOSFET . . .
. 8
2.2. LOCAL ELECTRODE ATOM PROBE: EXPERIMENTAL BACKGROUND 9
2.3. STANDARD SPECIMEN PREPARATION WITH FOCUSED ION BEAM 12
2.4. DEPOSITION O F PROTECTIVE LAYERS WITH ELECTRON BEAM DEPOSITION 15
2.5. STANDARD RECONSTRUCTION PROCEDURE AND ITS LIMITATIONS 16
2.6. TRAJECTORY OVERLAPS IN APT MEASUREMENTS 17
2.7. ANALYSIS TECHNIQUES 18
2.7.1. X-RAY PHOTOELECTRON SPECTROMETRY (XPS) 19
2.7.2. ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROMETRY (ARXPS) . . . .
19
2.7.3. RUTHERFORD BACKSCATTERING SPECTROMETRY (RBS) 19
2.7.4. VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE) 2 0
2.7.5. TRANSMISSION ELECTRON MICROSCOPE (TEM) 2 0
2.7.6. SECONDARY ION MASS SPECTROMETRY (SIMS) 21
2.8. ANALYZED MATERIALS 21
2.8.1. H F / Z R SAMPLES WITH ZR IN UP / CENTER / DOWN POSITION 21
2.8.2. ANNEALED H F / Z R SAMPLES WITH Z R IN UP / CENTER / DOWN
POSITION . . . 22
2.8.3. HOMOGENEOUS H F / Z R LAYERS DEPOSITED WITH METAL ORGANIC
CHEMICAL
VAPOR DEPOSITION AND ATOMIC LAYER DEPOSITION . . . 22
2.8.4. HIGH-K / METAL GATE STACK ON SI 23
V I
HTTP://D-NB.INFO/1025690311
IMAGE 2
2.8.5. HIGH-K / METAL GATE STACK ON SIGE 23
2.8.6. BORON DELTA LAYERS 24
3. DEVELOPMENT OF PROCEDURES FOR THE ANALYSIS OF HIGH-K MATERIALS 25
3.1. CAP LAYER ENGINEERING FOR HIGH-K MATERIALS 25
3.1.1. ADHESION BETWEEN THE CAP LAYERS AND THE ROI 25
3.1.2. EVAPORATION FIELD O F THE CAP LAYER CLOSE TO ROI 28
3.1.3. N O MASS PEAK OVERLAPPING O F THE CAP LAYER WITH THE ROI 28
3.1.4. REPRODUCIBILITY IN FIB PREPARATION: FIB PERFORMANCE 29
3.1.5. G A STOPPING: EFFECTIVE PROTECTION O F THE ROI 3 0
3.1.6. SUMMARY O F CAP LAYER OPTIMIZATION 31
3.2. FIB - SPECIMEN PREPARATION 31
3.2.1. TIP SHAPE REPRODUCIBILITY 31
3.2.2. INFLUENCE O F THE TIP SHAPE ON THE MASS-RESOLVING POWER 32
3.2.3. DISCUSSION O F THE TIP SHAPE INFLUENCE ON THE MASS-RESOLVING
POWER . . 34
3.2.4. INFLUENCE O F THE PT WELD ON THE MEASUREMENT YIELD 38
3.2.5. FIB PERFORMANCE O F HIGH-K AND HIGH-K / METAL GATE MATERIALS 41
3.3. INVESTIGATION O F MEASUREMENT PARAMETERS 42
3.3.1. INFLUENCE O F THE SPECIMEN TEMPERATURE ON THE HIGH-K ANALYSIS 4 3
3.3.2. INFLUENCE O F THE LASER ENERGY ON THE HIGH-K ANALYSIS 4 4
3.3.3. DISCUSSION O F THE TEMPERATURE AND LASER ENERGY INFLUENCE ON THE
HIGH-K
ANALYSIS 4 4
3.4. RECONSTRUCTION O F ATOM POSITIONS AND DATA TREATMENT 47
3.4.1. INFLUENCE O F THE LASER ENERGY ON THE RECONSTRUCTION 4 7
3.4.2. BACKGROUND SUBTRACTION AND DEPTH SCALE CORRECTION 4 8
3.4.3. MASS PEAK DECONVOLUTION FOR OVERLAPPING MASS PEAKS 51
3.5. CHANGE O F THE EVAPORATION FIELD: ANALYSIS O F B DELTA LAYERS 53
3.5.1. ANALYSIS O F B DELTA LAYERS AND THE INVESTIGATION O F THE
RECONSTRUCTION
PARAMETERS 5 3
3.5.2. SUMMARY AND DISCUSSION O F RESULTS ON THE DEPTH SCALE CORRECTIONS
. . 55
4. APPLICATION OF DEVELOPED PROCEDURES TO HIGH-K MATERIALS 57
4.1. AS-DEPOSITED ALTERNATING H F / Z R LAYERS (ALD) 57
4.1.1. APT MEASUREMENTS O F AS-DEPOSITED ALTERNATING H F / ZR LAYERS 57
V I I
IMAGE 3
INHALTSVERZEICHNIS
4.1.2. RESULTS O F ANALYSIS ON HIGH-K MATERIALS INVESTIGATED BY X-RAY
PHOTO
ELECTRON SPECTROSCOPY, ELLIPSOMETRY, RUTHERFORD BACKSCATTERING SPEC
TROMETRY AND VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY 59
4.1.3. DISCUSSION AND COMPARISON O F THE RESULTS OBTAINED BY APT, XPS, R
B S
AND VASE 61
4.2. ANNEALED ALTERNATING H F / Z R LAYERS (ALD) 62
4.2.1. APT MEASUREMENTS O F ANNEALED ALTERNATING H F / Z R LAYERS 62
4.2.2. SUMMARY RESULTS O F ANNEALED H F / Z R LAYERS: ARXPS, VASE 63
4.2.3. DISCUSSION AND COMPARISON O F THE RESULTS OBTAINED BY APT, XPS,
ARX
PS AND VASE 64
4.3. REPRODUCIBILITY O F DEPOSITION O F H F / Z R LAYERS BY METAL
ORGANIC CHEMICAL
VAPOR DEPOSITION AND ATOMIC LAYER DEPOSITION 65
4.3.1. APT MEASUREMENTS O F M O C V D - A N D ALD-DEPOSITED H F / Z R
LAYERS . 66
4.3.2. COMPARISON AND DISCUSSION O F APT, XPS AND RBS MEASUREMENTS . .
66
4.4. HIGH-K / METAL GATE STACK ON SI 67
4.4.1. APT MEASUREMENTS O F THE HIGH-K / METAL GATE STACK ON SI 68
4.4.2. COMPARISON O F THE HIGH-K / METAL GATE STACK IN PLAN VIEW
FRONTSIDE AND
CROSS-SECTION ORIENTATION 7 0
4.4.3. COMPARISON WITH T E M MEASUREMENTS AND DISCUSSION 7 4
4.5. HIGH-K / METAL GATE STACK ON SIGE 76
4.5.1. APT MEASUREMENTS O F THE HIGH-K / METAL GATE STACK ON SIGE 7 6
4.5.2. COMPARISON O F A P T AND T E M MEASUREMENTS 79
5. SUMMARY AND OUTLOOK 81
A. APPENDIX 89
A. I. REPRODUCIBLE TIP SHAPE PREPARATION IN FIB 89
A.2. MICROTIP ARRAY AND SI POSTS 9 0
|
| any_adam_object | 1 |
| author | Mutas, Sergej |
| author_facet | Mutas, Sergej |
| author_role | aut |
| author_sort | Mutas, Sergej |
| author_variant | s m sm |
| building | Verbundindex |
| bvnumber | BV040609734 |
| ctrlnum | (OCoLC)822256717 (DE-599)DNB1025690311 |
| dewey-full | 537.24 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 537 - Electricity and electronics |
| dewey-raw | 537.24 |
| dewey-search | 537.24 |
| dewey-sort | 3537.24 |
| dewey-tens | 530 - Physics |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01648nam a2200433 c 4500</leader><controlfield tag="001">BV040609734</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">121205s2012 gw ad|| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">12,N37</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1025690311</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783844013405</subfield><subfield code="c">Gb. : EUR 45.80 (DE), EUR 45.80 (AT), sfr 57.25 (freier Pr.)</subfield><subfield code="9">978-3-8440-1340-5</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783844013405</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)822256717</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1025690311</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-NW</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">537.24</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">621.3</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mutas, Sergej</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Analysis of high-k materials with Local Electrode Atom Probe</subfield><subfield code="c">Sergej Mutas</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Aachen</subfield><subfield code="b">Shaker</subfield><subfield code="c">2012</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 90 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Berichte aus der Halbleitertechnik</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Zugl.: Berlin, Techn. Univ., Diss., 2012</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomsonde</subfield><subfield code="0">(DE-588)4318518-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">High-k-Dielektrikum</subfield><subfield code="0">(DE-588)7602833-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">High-k-Dielektrikum</subfield><subfield code="0">(DE-588)7602833-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Atomsonde</subfield><subfield code="0">(DE-588)4318518-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025437327&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025437327</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV040609734 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:27:14Z |
| institution | BVB |
| isbn | 9783844013405 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025437327 |
| oclc_num | 822256717 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XI, 90 S. Ill., graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Shaker |
| record_format | marc |
| series2 | Berichte aus der Halbleitertechnik |
| spelling | Mutas, Sergej Verfasser aut Analysis of high-k materials with Local Electrode Atom Probe Sergej Mutas Aachen Shaker 2012 XI, 90 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berichte aus der Halbleitertechnik Zugl.: Berlin, Techn. Univ., Diss., 2012 Atomsonde (DE-588)4318518-6 gnd rswk-swf High-k-Dielektrikum (DE-588)7602833-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content High-k-Dielektrikum (DE-588)7602833-1 s Atomsonde (DE-588)4318518-6 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025437327&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Mutas, Sergej Analysis of high-k materials with Local Electrode Atom Probe Atomsonde (DE-588)4318518-6 gnd High-k-Dielektrikum (DE-588)7602833-1 gnd |
| subject_GND | (DE-588)4318518-6 (DE-588)7602833-1 (DE-588)4113937-9 |
| title | Analysis of high-k materials with Local Electrode Atom Probe |
| title_auth | Analysis of high-k materials with Local Electrode Atom Probe |
| title_exact_search | Analysis of high-k materials with Local Electrode Atom Probe |
| title_full | Analysis of high-k materials with Local Electrode Atom Probe Sergej Mutas |
| title_fullStr | Analysis of high-k materials with Local Electrode Atom Probe Sergej Mutas |
| title_full_unstemmed | Analysis of high-k materials with Local Electrode Atom Probe Sergej Mutas |
| title_short | Analysis of high-k materials with Local Electrode Atom Probe |
| title_sort | analysis of high k materials with local electrode atom probe |
| topic | Atomsonde (DE-588)4318518-6 gnd High-k-Dielektrikum (DE-588)7602833-1 gnd |
| topic_facet | Atomsonde High-k-Dielektrikum Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025437327&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT mutassergej analysisofhighkmaterialswithlocalelectrodeatomprobe |