ZnO-based metal-semiconductor field effect transistors:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Tönning [u.a.]
<<Der>> Andere Verl.
2010
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XVI, 144 S. Ill., graph. Darst. |
| ISBN: | 9783862470990 |
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MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV040542325 | ||
| 003 | DE-604 | ||
| 005 | 20121129 | ||
| 007 | t | ||
| 008 | 121115s2010 gw ad|| m||| 00||| eng d | ||
| 015 | |a 11,N02 |2 dnb | ||
| 015 | |a 11,A15 |2 dnb | ||
| 016 | 7 | |a 1009200984 |2 DE-101 | |
| 020 | |a 9783862470990 |9 978-3-86247-099-0 | ||
| 024 | 3 | |a 9783862470990 | |
| 035 | |a (OCoLC)725357334 | ||
| 035 | |a (DE-599)DNB1009200984 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-SH | ||
| 049 | |a DE-83 | ||
| 082 | 0 | |a 621.3815284 |2 22/ger | |
| 084 | |a ZN 4870 |0 (DE-625)157415: |2 rvk | ||
| 084 | |a 621.3 |2 sdnb | ||
| 100 | 1 | |a Frenzel, Heiko |d 1981- |e Verfasser |0 (DE-588)142704342 |4 aut | |
| 245 | 1 | 0 | |a ZnO-based metal-semiconductor field effect transistors |c Heiko Frenzel |
| 264 | 1 | |a Tönning [u.a.] |b <<Der>> Andere Verl. |c 2010 | |
| 300 | |a XVI, 144 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Zugl.: Leipzig, Univ., Diss., 2010 | ||
| 650 | 0 | 7 | |a Zinkoxid |0 (DE-588)4190864-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MES-FET |0 (DE-588)4120727-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Transparent-leitendes Oxid |0 (DE-588)4618144-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a MES-FET |0 (DE-588)4120727-0 |D s |
| 689 | 0 | 1 | |a Zinkoxid |0 (DE-588)4190864-8 |D s |
| 689 | 0 | 2 | |a Transparent-leitendes Oxid |0 (DE-588)4618144-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025388197&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-025388197 | ||
Record in the Search Index
| _version_ | 1804149633866268672 |
|---|---|
| adam_text | IMAGE 1
CONTENTS
1 INTRODUCTION 1
2 BASICS OF FIELD-EFFECT TRANSISTORS AND INTEGRATED CIRCUITS 5
2.1 METAL-SEMICONDUCTORJUNCTION 5
2.2 METAL-INSULATOR-SEMICONDUCTORJUNCTION 9
2.3 OPERATION PRINCIPLES OF UNIPOLAR FIELD-EFFECT TRANSISTORS 15
2.4 INTEGRATED LOGIC CIRCUITS 19
3 DEVICE FABRICATION AND CHARACTERIZATION 25
3.1 PULSED-LASER DEPOSITION 25
3.2 DIRECT-CURRENT SPUTTERING 26
3.3 PHOTOLITHOGRAPHY 28
3.4 CURRENT-VOLTAGE MEASUREMENT 31
3.5 CAPACITANCE-VOLTAGE MEASUREMENT 34
4 PULSED-LASER DEPOSITED INSULATORS AND METAL-INSULATOR FIELD-EFFECT
TRANSISTORS 37 4.1 METAL-INSULATOR-METAL STRUCTURES 38
4.2 METAL-INSULATOR-SEMICONDUCTOR STRUCTURES 43
4.3 ZNO-BASED METAL-INSULATOR-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS 49
5 ZNO-BASED METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS 53
5.1 SAPPHIRE SUBSTRATE 53
5.2 GLASS SUBSTRATE 70
5.3 COMPARISON OFZNO-MESFET WITH COMPETING TECHNOLOGIES 83
6 INVERTER 87
6.1 SIMPLE INVERTER 87
6.2 FET-LOGIC INVERTER 94
6.3 SCHOTTKY-DIODE FET-LOGIC INVERTER 96
6.4 COMPARISON WITH MESFET INVERTER DEVICES FROM THE LITERATURE 101
7 TRANSPARENT RECTIFYING CONTACTS 103
7.1 PREPARATION 103
7.2 TRANSPARENT SCHOTTKY DIODES 105
7.3 TRANSPARENT MESFETS 105
7.4 TRANSPARENT INVERTERS 108
7.5 COMPARISON WITH TRANSPARENT DEVICES FROM THE LITERATURE 108
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1009200984
DIGITALISIERT DURCH
IMAGE 2
CONTENTS
8 SUMMARY AND OUTLOOK 111
A OVERVIEW OF PHOTOLITHOGRAPHY TEMPLATES 115
BIBLIOGRAPHY 121
LIST OF OWN AND CONTRIBUTED ARTICLES 131
SYMBOLS AND ABBREVIATIONS 133
LIST OF FIGURES 137
LIST OF TABLES 141
ACKNOWLEDGEMENTS 142
|
| any_adam_object | 1 |
| author | Frenzel, Heiko 1981- |
| author_GND | (DE-588)142704342 |
| author_facet | Frenzel, Heiko 1981- |
| author_role | aut |
| author_sort | Frenzel, Heiko 1981- |
| author_variant | h f hf |
| building | Verbundindex |
| bvnumber | BV040542325 |
| classification_rvk | ZN 4870 |
| ctrlnum | (OCoLC)725357334 (DE-599)DNB1009200984 |
| dewey-full | 621.3815284 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815284 |
| dewey-search | 621.3815284 |
| dewey-sort | 3621.3815284 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01771nam a2200469 c 4500</leader><controlfield tag="001">BV040542325</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20121129 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">121115s2010 gw ad|| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">11,N02</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">11,A15</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1009200984</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783862470990</subfield><subfield code="9">978-3-86247-099-0</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783862470990</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)725357334</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1009200984</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-SH</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815284</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4870</subfield><subfield code="0">(DE-625)157415:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">621.3</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Frenzel, Heiko</subfield><subfield code="d">1981-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)142704342</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">ZnO-based metal-semiconductor field effect transistors</subfield><subfield code="c">Heiko Frenzel</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Tönning [u.a.]</subfield><subfield code="b"><<Der>> Andere Verl.</subfield><subfield code="c">2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVI, 144 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Zugl.: Leipzig, Univ., Diss., 2010</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Zinkoxid</subfield><subfield code="0">(DE-588)4190864-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MES-FET</subfield><subfield code="0">(DE-588)4120727-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Transparent-leitendes Oxid</subfield><subfield code="0">(DE-588)4618144-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MES-FET</subfield><subfield code="0">(DE-588)4120727-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Zinkoxid</subfield><subfield code="0">(DE-588)4190864-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Transparent-leitendes Oxid</subfield><subfield code="0">(DE-588)4618144-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025388197&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025388197</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV040542325 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:26:08Z |
| institution | BVB |
| isbn | 9783862470990 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025388197 |
| oclc_num | 725357334 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XVI, 144 S. Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | <<Der>> Andere Verl. |
| record_format | marc |
| spelling | Frenzel, Heiko 1981- Verfasser (DE-588)142704342 aut ZnO-based metal-semiconductor field effect transistors Heiko Frenzel Tönning [u.a.] <<Der>> Andere Verl. 2010 XVI, 144 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zugl.: Leipzig, Univ., Diss., 2010 Zinkoxid (DE-588)4190864-8 gnd rswk-swf MES-FET (DE-588)4120727-0 gnd rswk-swf Transparent-leitendes Oxid (DE-588)4618144-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content MES-FET (DE-588)4120727-0 s Zinkoxid (DE-588)4190864-8 s Transparent-leitendes Oxid (DE-588)4618144-1 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025388197&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Frenzel, Heiko 1981- ZnO-based metal-semiconductor field effect transistors Zinkoxid (DE-588)4190864-8 gnd MES-FET (DE-588)4120727-0 gnd Transparent-leitendes Oxid (DE-588)4618144-1 gnd |
| subject_GND | (DE-588)4190864-8 (DE-588)4120727-0 (DE-588)4618144-1 (DE-588)4113937-9 |
| title | ZnO-based metal-semiconductor field effect transistors |
| title_auth | ZnO-based metal-semiconductor field effect transistors |
| title_exact_search | ZnO-based metal-semiconductor field effect transistors |
| title_full | ZnO-based metal-semiconductor field effect transistors Heiko Frenzel |
| title_fullStr | ZnO-based metal-semiconductor field effect transistors Heiko Frenzel |
| title_full_unstemmed | ZnO-based metal-semiconductor field effect transistors Heiko Frenzel |
| title_short | ZnO-based metal-semiconductor field effect transistors |
| title_sort | zno based metal semiconductor field effect transistors |
| topic | Zinkoxid (DE-588)4190864-8 gnd MES-FET (DE-588)4120727-0 gnd Transparent-leitendes Oxid (DE-588)4618144-1 gnd |
| topic_facet | Zinkoxid MES-FET Transparent-leitendes Oxid Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025388197&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT frenzelheiko znobasedmetalsemiconductorfieldeffecttransistors |