Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Siegen
Lehrstuhl für Oberflächen- und Werkstofftechnologie, Inst. für Werkstofftechnik, Univ.
2012
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| Schriftenreihe: | Schriftenreihe der Arbeitsgruppe für Lehrstuhl für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik
1 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | 152 S. Ill., graph. Darst. |
Internformat
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| 245 | 1 | 0 | |a Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications |c Hao Zhuang |
| 264 | 1 | |a Siegen |b Lehrstuhl für Oberflächen- und Werkstofftechnologie, Inst. für Werkstofftechnik, Univ. |c 2012 | |
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| 490 | 0 | |a Werkstofftechnik | |
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Datensatz im Suchindex
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| adam_text | IMAGE 1
CONTENTS I
CONTENTS
SYMBOL LIST I L L
ABSTRACT VIII
1 INTRODUCTION 1
1.1 BIOSENSOR 1
1.2 MATERIALS 4
1.2.1 CVD DIAMOND THIN FILM 4
1.2.2 CVD /I SIC THIN FILM 9
1.2.3 DIAMOND/P-SIC COMPOSITE FILM 10
1.3 DIAMOND AND SIC BASED BIOSENSOR 13
1.3.1 DIAMOND BIOSENSOR 13
1.3.2 SIC BIOSENSOR 19
1.4 PROBLEM DEFINITION 22
1.5 OVERVIEW O F THE THESIS 24
2 EXPERIMENTATION 26
2.1 FILM DEPOSITION 26
2.1.1 TECHNIQUE 26
2.1.2 PROCEDURE 27
2.2 CHARACTERIZATION TOOLS 31
2.2.1 SCANNING ELECTRON MICROSCOPY(SEM) 31
2.2.2 TRANSMISSION ELECTRON MICROSCOPY(TEM) 31
2.2.3 A TOMIC FORCE MICROSCOPY (A FM) 31
2.2.4 X-RAY DIFFRACTION (XRD) 32
2.2.5 MICRO RAMAN SCATTERING 32
2.2.6 SECONDARY ION MASS SPECTROMETRY 33
2.2.7 PRINCIPAL COMPONENT ANALYSIS 34
2.3 FILM FUNCTIONALIZATION 35
2.3.1 SAMPLE CLEANING 35
2.3.2 PHOTOCHEMICAL FUNCTIONALIZATION 36
2.3.3 ELECTROCHEMICAL FUNCTIONALIZATION 38
2.3.4 DNA ATTACHMENT 39
3 DEPOSITION O F HIGH QUALITY DIAMOND, P-SIC AND THE COMPOSITE FILMS 41
3.1 DIAMOND FILM 41
HTTP://D-NB.INFO/1021246255
IMAGE 2
I I CONTENTS
3.2 P-SIC FILM 43
3.3 DIAMOND/P-SIC COMPOSITE FILM 47
3.3.1 ROTE O F ATOMIC H CONCENTRATION 47
3.3.2 INFLUENCE O F MICROWAVE POWER DENSITY 54
3.3.3 INFLUENCE O F CH 4FLOW RATE 55
3.3.4 INFLUENCE O F TMSFLOW RATE 58
3.3.5 GROWTH MECHANISM 61
4 FILM PATTERNING 64
4.1 STRATEGIES O F DIAMOND PATTERNING 64
4.2 BASIC CONSIDERATIONS FOR A SUCCESSFUL |ICP 65
4.3 FABRICATION AND CHARACTERIZATION 69
4.4 GROWTH O F PATTERNED COMPOSITE FILM 77
5 POTENTIAL BIOSENSOR APPLICATION 80
5.1 SURFACE PROPERTIES O F THE COMPOSITE FILM 80
5.1.1 SURFACE WETTABILITY O F THE COMPOSITE FILMS 80
5.1.2 ROUGH ESTIMATION O F ELECTRICAL PROPERTIES O F THE COMPOSITE FILM
93
5.2 DIAMOND DNA SENSOR 96
5.3 P-SIC DNA SENSOR 110
5.3.1 PHOTOCHEMICAL FUNCTIONALIZATION I JO
5.3.2 ELECTROCHEMICAL FUNCTIONALIZATION 117
5.4 DIAMOND/P-SIC COMPOSITE FILM BASED DNA SENSOR 122
5.5 FUTURE ASPECTS 123
6 CONCLUSIONS 127
7 REFERENCES 130
|
| any_adam_object | 1 |
| author | Zhuang, Hao 1983- |
| author_GND | (DE-588)1020753013 |
| author_facet | Zhuang, Hao 1983- |
| author_role | aut |
| author_sort | Zhuang, Hao 1983- |
| author_variant | h z hz |
| building | Verbundindex |
| bvnumber | BV040492554 |
| classification_rvk | ZQ 3120 |
| ctrlnum | (OCoLC)835274307 (DE-599)DNB1021246255 |
| dewey-full | 681.757 667.9 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices 667 - Cleaning, color & coating technologies |
| dewey-raw | 681.757 667.9 |
| dewey-search | 681.757 667.9 |
| dewey-sort | 3681.757 |
| dewey-tens | 680 - Manufacture of products for specific uses 660 - Chemical engineering |
| discipline | Chemie / Pharmazie Handwerk und Gewerbe / Verschiedene Technologien Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Thesis Book |
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| id | DE-604.BV040492554 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:24:55Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025339515 |
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| physical | 152 S. Ill., graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Lehrstuhl für Oberflächen- und Werkstofftechnologie, Inst. für Werkstofftechnik, Univ. |
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| series | Schriftenreihe der Arbeitsgruppe für Lehrstuhl für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik |
| series2 | Schriftenreihe der Arbeitsgruppe für Lehrstuhl für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik Werkstofftechnik |
| spelling | Zhuang, Hao 1983- Verfasser (DE-588)1020753013 aut Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications Hao Zhuang Siegen Lehrstuhl für Oberflächen- und Werkstofftechnologie, Inst. für Werkstofftechnik, Univ. 2012 152 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Schriftenreihe der Arbeitsgruppe für Lehrstuhl für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik 1 Werkstofftechnik Zugl.: Siegen, Univ., Diss., 2012 Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Siliciumcarbid (DE-588)4055009-6 gnd rswk-swf Biosensor (DE-588)4193016-2 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Diamant (DE-588)4012069-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Diamant (DE-588)4012069-7 s Siliciumcarbid (DE-588)4055009-6 s Dünne Schicht (DE-588)4136925-7 s CVD-Verfahren (DE-588)4009846-1 s Biosensor (DE-588)4193016-2 s DE-604 Schriftenreihe der Arbeitsgruppe für Lehrstuhl für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik 1 (DE-604)BV040492552 1 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025339515&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Zhuang, Hao 1983- Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications Schriftenreihe der Arbeitsgruppe für Lehrstuhl für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik Dünne Schicht (DE-588)4136925-7 gnd Siliciumcarbid (DE-588)4055009-6 gnd Biosensor (DE-588)4193016-2 gnd CVD-Verfahren (DE-588)4009846-1 gnd Diamant (DE-588)4012069-7 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4055009-6 (DE-588)4193016-2 (DE-588)4009846-1 (DE-588)4012069-7 (DE-588)4113937-9 |
| title | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications |
| title_auth | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications |
| title_exact_search | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications |
| title_full | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications Hao Zhuang |
| title_fullStr | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications Hao Zhuang |
| title_full_unstemmed | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications Hao Zhuang |
| title_short | Fabrication of CVD diamond, beta-SiC and diamond-beta-SiC composite films for potential DNA biosensor applications |
| title_sort | fabrication of cvd diamond beta sic and diamond beta sic composite films for potential dna biosensor applications |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Siliciumcarbid (DE-588)4055009-6 gnd Biosensor (DE-588)4193016-2 gnd CVD-Verfahren (DE-588)4009846-1 gnd Diamant (DE-588)4012069-7 gnd |
| topic_facet | Dünne Schicht Siliciumcarbid Biosensor CVD-Verfahren Diamant Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025339515&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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| work_keys_str_mv | AT zhuanghao fabricationofcvddiamondbetasicanddiamondbetasiccompositefilmsforpotentialdnabiosensorapplications |