Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2012
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| Schlagworte: | |
| Online-Zugang: | kostenfrei |
| Beschreibung: | 147 S. graph. Darst. |
Internformat
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Datensatz im Suchindex
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| author_facet | Klocek, Jolanta |
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| indexdate | 2024-07-10T00:15:18Z |
| institution | BVB |
| language | English |
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| spelling | Klocek, Jolanta Verfasser aut Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials vorgelegt von Jolanta Klocek 2012 147 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cottbus, Techn. Univ., Diss., 2011 Röntgen-Photoelektronenspektroskopie (DE-588)4076787-5 gnd rswk-swf Rasterkraftmikroskopie (DE-588)4274473-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Röntgen-Photoelektronenspektroskopie (DE-588)4076787-5 s DE-604 Rasterkraftmikroskopie (DE-588)4274473-8 s Erscheint auch als Online-Ausgabe urn:nbn:de:kobv:co1-opus-24358 http://opus.kobv.de/btu/volltexte/2012/2435/ kostenfrei Volltext |
| spellingShingle | Klocek, Jolanta Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials Röntgen-Photoelektronenspektroskopie (DE-588)4076787-5 gnd Rasterkraftmikroskopie (DE-588)4274473-8 gnd |
| subject_GND | (DE-588)4076787-5 (DE-588)4274473-8 (DE-588)4113937-9 |
| title | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials |
| title_auth | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials |
| title_exact_search | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials |
| title_full | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials vorgelegt von Jolanta Klocek |
| title_fullStr | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials vorgelegt von Jolanta Klocek |
| title_full_unstemmed | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials vorgelegt von Jolanta Klocek |
| title_short | Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials |
| title_sort | processing and investigation of thin films with incorporated carbon species for possible application as low k materials |
| topic | Röntgen-Photoelektronenspektroskopie (DE-588)4076787-5 gnd Rasterkraftmikroskopie (DE-588)4274473-8 gnd |
| topic_facet | Röntgen-Photoelektronenspektroskopie Rasterkraftmikroskopie Hochschulschrift |
| url | http://opus.kobv.de/btu/volltexte/2012/2435/ |
| work_keys_str_mv | AT klocekjolanta processingandinvestigationofthinfilmswithincorporatedcarbonspeciesforpossibleapplicationaslowkmaterials |