Semiconductor-on-insulator materials for nanoelectronics applications:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | German |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2011
|
| Schriftenreihe: | Engineering materials
|
| Schlagworte: | |
| Online-Zugang: | FHN01 UBT01 Volltext |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9783642158674 9783642158681 |
| DOI: | 10.1007/978-3-642-15868-1 |
Internformat
MARC
| LEADER | 00000nmm a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV039860811 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 120202s2011 |||| o||u| ||||||ger d | ||
| 020 | |a 9783642158674 |9 978-3-642-15867-4 | ||
| 020 | |a 9783642158681 |c Online |9 978-3-642-15868-1 | ||
| 024 | 7 | |a 10.1007/978-3-642-15868-1 |2 doi | |
| 035 | |a (OCoLC)723280040 | ||
| 035 | |a (DE-599)BVBBV039860811 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a ger | |
| 049 | |a DE-703 |a DE-92 | ||
| 082 | 0 | |a 621.38152 |2 22/ger | |
| 084 | |a ZN 3460 |0 (DE-625)157317: |2 rvk | ||
| 245 | 1 | 0 | |a Semiconductor-on-insulator materials for nanoelectronics applications |c Alexei Nazarov ... (eds.) |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 2011 | |
| 300 | |a 1 Online-Ressource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Engineering materials | |
| 650 | 0 | 7 | |a Halbleitersubstrat |0 (DE-588)4158813-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a CMOS |0 (DE-588)4010319-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a SOI-Technik |0 (DE-588)4128029-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MOS-FET |0 (DE-588)4207266-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanoelektronik |0 (DE-588)4732034-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Nanoelektronik |0 (DE-588)4732034-5 |D s |
| 689 | 0 | 1 | |a SOI-Technik |0 (DE-588)4128029-5 |D s |
| 689 | 0 | 2 | |a Halbleitersubstrat |0 (DE-588)4158813-7 |D s |
| 689 | 0 | 3 | |a MOS-FET |0 (DE-588)4207266-9 |D s |
| 689 | 0 | 4 | |a CMOS |0 (DE-588)4010319-5 |D s |
| 689 | 0 | 5 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Nazarov, Alexei |4 edt | |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-642-15868-1 |x Verlag |3 Volltext |
| 912 | |a ZDB-2-CMS | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-024720365 | ||
| 966 | e | |u https://doi.org/10.1007/978-3-642-15868-1 |l FHN01 |p ZDB-2-CMS |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-642-15868-1 |l UBT01 |p ZDB-2-CMS |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804148798937628672 |
|---|---|
| any_adam_object | |
| author2 | Nazarov, Alexei |
| author2_role | edt |
| author2_variant | a n an |
| author_facet | Nazarov, Alexei |
| building | Verbundindex |
| bvnumber | BV039860811 |
| classification_rvk | ZN 3460 |
| collection | ZDB-2-CMS |
| ctrlnum | (OCoLC)723280040 (DE-599)BVBBV039860811 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-642-15868-1 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02007nmm a2200529 c 4500</leader><controlfield tag="001">BV039860811</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">120202s2011 |||| o||u| ||||||ger d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642158674</subfield><subfield code="9">978-3-642-15867-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642158681</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-642-15868-1</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-642-15868-1</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)723280040</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV039860811</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-92</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3460</subfield><subfield code="0">(DE-625)157317:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor-on-insulator materials for nanoelectronics applications</subfield><subfield code="c">Alexei Nazarov ... (eds.)</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Engineering materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitersubstrat</subfield><subfield code="0">(DE-588)4158813-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">SOI-Technik</subfield><subfield code="0">(DE-588)4128029-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MOS-FET</subfield><subfield code="0">(DE-588)4207266-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanoelektronik</subfield><subfield code="0">(DE-588)4732034-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanoelektronik</subfield><subfield code="0">(DE-588)4732034-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">SOI-Technik</subfield><subfield code="0">(DE-588)4128029-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Halbleitersubstrat</subfield><subfield code="0">(DE-588)4158813-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">MOS-FET</subfield><subfield code="0">(DE-588)4207266-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nazarov, Alexei</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-642-15868-1</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-CMS</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024720365</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-15868-1</subfield><subfield code="l">FHN01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-642-15868-1</subfield><subfield code="l">UBT01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV039860811 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T00:12:52Z |
| institution | BVB |
| isbn | 9783642158674 9783642158681 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024720365 |
| oclc_num | 723280040 |
| open_access_boolean | |
| owner | DE-703 DE-92 |
| owner_facet | DE-703 DE-92 |
| physical | 1 Online-Ressource |
| psigel | ZDB-2-CMS |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Springer |
| record_format | marc |
| series2 | Engineering materials |
| spelling | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) Berlin [u.a.] Springer 2011 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Engineering materials Halbleitersubstrat (DE-588)4158813-7 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf SOI-Technik (DE-588)4128029-5 gnd rswk-swf MOS-FET (DE-588)4207266-9 gnd rswk-swf Nanoelektronik (DE-588)4732034-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Nanoelektronik (DE-588)4732034-5 s SOI-Technik (DE-588)4128029-5 s Halbleitersubstrat (DE-588)4158813-7 s MOS-FET (DE-588)4207266-9 s CMOS (DE-588)4010319-5 s MEMS (DE-588)4824724-8 s DE-604 Nazarov, Alexei edt https://doi.org/10.1007/978-3-642-15868-1 Verlag Volltext |
| spellingShingle | Semiconductor-on-insulator materials for nanoelectronics applications Halbleitersubstrat (DE-588)4158813-7 gnd CMOS (DE-588)4010319-5 gnd SOI-Technik (DE-588)4128029-5 gnd MOS-FET (DE-588)4207266-9 gnd Nanoelektronik (DE-588)4732034-5 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4158813-7 (DE-588)4010319-5 (DE-588)4128029-5 (DE-588)4207266-9 (DE-588)4732034-5 (DE-588)4824724-8 (DE-588)4143413-4 |
| title | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_auth | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_exact_search | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_full | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) |
| title_fullStr | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) |
| title_full_unstemmed | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) |
| title_short | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_sort | semiconductor on insulator materials for nanoelectronics applications |
| topic | Halbleitersubstrat (DE-588)4158813-7 gnd CMOS (DE-588)4010319-5 gnd SOI-Technik (DE-588)4128029-5 gnd MOS-FET (DE-588)4207266-9 gnd Nanoelektronik (DE-588)4732034-5 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Halbleitersubstrat CMOS SOI-Technik MOS-FET Nanoelektronik MEMS Aufsatzsammlung |
| url | https://doi.org/10.1007/978-3-642-15868-1 |
| work_keys_str_mv | AT nazarovalexei semiconductoroninsulatormaterialsfornanoelectronicsapplications |