Semiconductor-on-insulator materials for nanoelectronics applications:
Saved in:
| Other Authors: | |
|---|---|
| Format: | Electronic eBook |
| Language: | German |
| Published: |
Berlin [u.a.]
Springer
2011
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| Series: | Engineering materials
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| Subjects: | |
| Online Access: | FHN01 UBT01 Volltext |
| Physical Description: | 1 Online-Ressource |
| ISBN: | 9783642158674 9783642158681 |
| DOI: | 10.1007/978-3-642-15868-1 |
Staff View
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T00:12:52Z |
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| isbn | 9783642158674 9783642158681 |
| language | German |
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| spelling | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) Berlin [u.a.] Springer 2011 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Engineering materials Halbleitersubstrat (DE-588)4158813-7 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf SOI-Technik (DE-588)4128029-5 gnd rswk-swf MOS-FET (DE-588)4207266-9 gnd rswk-swf Nanoelektronik (DE-588)4732034-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Nanoelektronik (DE-588)4732034-5 s SOI-Technik (DE-588)4128029-5 s Halbleitersubstrat (DE-588)4158813-7 s MOS-FET (DE-588)4207266-9 s CMOS (DE-588)4010319-5 s MEMS (DE-588)4824724-8 s DE-604 Nazarov, Alexei edt https://doi.org/10.1007/978-3-642-15868-1 Verlag Volltext |
| spellingShingle | Semiconductor-on-insulator materials for nanoelectronics applications Halbleitersubstrat (DE-588)4158813-7 gnd CMOS (DE-588)4010319-5 gnd SOI-Technik (DE-588)4128029-5 gnd MOS-FET (DE-588)4207266-9 gnd Nanoelektronik (DE-588)4732034-5 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4158813-7 (DE-588)4010319-5 (DE-588)4128029-5 (DE-588)4207266-9 (DE-588)4732034-5 (DE-588)4824724-8 (DE-588)4143413-4 |
| title | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_auth | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_exact_search | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_full | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) |
| title_fullStr | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) |
| title_full_unstemmed | Semiconductor-on-insulator materials for nanoelectronics applications Alexei Nazarov ... (eds.) |
| title_short | Semiconductor-on-insulator materials for nanoelectronics applications |
| title_sort | semiconductor on insulator materials for nanoelectronics applications |
| topic | Halbleitersubstrat (DE-588)4158813-7 gnd CMOS (DE-588)4010319-5 gnd SOI-Technik (DE-588)4128029-5 gnd MOS-FET (DE-588)4207266-9 gnd Nanoelektronik (DE-588)4732034-5 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Halbleitersubstrat CMOS SOI-Technik MOS-FET Nanoelektronik MEMS Aufsatzsammlung |
| url | https://doi.org/10.1007/978-3-642-15868-1 |
| work_keys_str_mv | AT nazarovalexei semiconductoroninsulatormaterialsfornanoelectronicsapplications |