Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants:
Gespeichert in:
Format: | Elektronisch E-Book |
---|---|
Sprache: | English |
Veröffentlicht: |
Amsterdam
Elsevier
c2011
|
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc Aqueous Methods -- Megasonic Cleaning -- Hydrodynamic Removal of Particles -- Brush Cleaning -- Laser Methods for Cleaning -- CO b2 s Pellet Cleaning -- Cleaning Using Acoustic Fields -- Precision Cleaning Using Cluster Beams -- Electrostatic Methods for Cleaning -- Wipers for Cleaning -- Projectile Cleaning Includes bibliographical references and index |
Beschreibung: | 1 Online-Ressource (1 online resource (xiii, 243 p.)) |
ISBN: | 9781437778854 1437778852 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV039829304 | ||
003 | DE-604 | ||
005 | 20120621 | ||
007 | cr|uuu---uuuuu | ||
008 | 120124s2011 sz |||| o||u| ||||||eng d | ||
020 | |a 9781437778854 |c electronic bk. |9 978-1-4377-7885-4 | ||
020 | |a 1437778852 |c electronic bk. |9 1-4377-7885-2 | ||
035 | |a (OCoLC)713322613 | ||
035 | |a (DE-599)BVBBV039829304 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
044 | |a sz |c XA-CH | ||
049 | |a DE-1046 |a DE-1028 | ||
082 | 0 | |a 620/.44 |2 22 | |
245 | 1 | 0 | |a Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |c edited by Rajiv Kohli and K.L. Mittal |
246 | 1 | 3 | |a Methods for removal of particle contaminants |
264 | 1 | |a Amsterdam |b Elsevier |c c2011 | |
300 | |a 1 Online-Ressource (1 online resource (xiii, 243 p.)) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc | ||
500 | |a Aqueous Methods -- Megasonic Cleaning -- Hydrodynamic Removal of Particles -- Brush Cleaning -- Laser Methods for Cleaning -- CO b2 s Pellet Cleaning -- Cleaning Using Acoustic Fields -- Precision Cleaning Using Cluster Beams -- Electrostatic Methods for Cleaning -- Wipers for Cleaning -- Projectile Cleaning | ||
500 | |a Includes bibliographical references and index | ||
650 | 4 | |a Surfaces (Technology) / Cleaning | |
650 | 4 | |a Surface contamination | |
650 | 0 | 7 | |a Kontamination |0 (DE-588)4032272-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Reinigungsverfahren |0 (DE-588)4391913-3 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Teilchen |0 (DE-588)4059317-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Beschichtung |0 (DE-588)4144863-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Oberfläche |0 (DE-588)4042907-6 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Oberfläche |0 (DE-588)4042907-6 |D s |
689 | 0 | 1 | |a Beschichtung |0 (DE-588)4144863-7 |D s |
689 | 0 | 2 | |a Kontamination |0 (DE-588)4032272-5 |D s |
689 | 0 | 3 | |a Reinigungsverfahren |0 (DE-588)4391913-3 |D s |
689 | 0 | 4 | |a Teilchen |0 (DE-588)4059317-4 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Kohli, Rajiv |e Sonstige |4 oth | |
700 | 1 | |a Mittal, K. L. |e Sonstige |4 oth | |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9781437778854 |x Verlag |3 Volltext |
912 | |a ZDB-33-CEN |a ZDB-33-ESD |a ZDB-33-EBS | ||
940 | 1 | |q FAW_PDA_ESD | |
940 | 1 | |q FLA_PDA_ESD | |
999 | |a oai:aleph.bib-bvb.de:BVB01-024689308 |
Datensatz im Suchindex
_version_ | 1804148764303163392 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV039829304 |
collection | ZDB-33-CEN ZDB-33-ESD ZDB-33-EBS |
ctrlnum | (OCoLC)713322613 (DE-599)BVBBV039829304 |
dewey-full | 620/.44 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620/.44 |
dewey-search | 620/.44 |
dewey-sort | 3620 244 |
dewey-tens | 620 - Engineering and allied operations |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03861nmm a2200553zc 4500</leader><controlfield tag="001">BV039829304</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20120621 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">120124s2011 sz |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781437778854</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-4377-7885-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1437778852</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-4377-7885-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)713322613</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV039829304</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">sz</subfield><subfield code="c">XA-CH</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1028</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620/.44</subfield><subfield code="2">22</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants</subfield><subfield code="c">edited by Rajiv Kohli and K.L. Mittal</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Methods for removal of particle contaminants</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam</subfield><subfield code="b">Elsevier</subfield><subfield code="c">c2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (1 online resource (xiii, 243 p.))</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Aqueous Methods -- Megasonic Cleaning -- Hydrodynamic Removal of Particles -- Brush Cleaning -- Laser Methods for Cleaning -- CO b2 s Pellet Cleaning -- Cleaning Using Acoustic Fields -- Precision Cleaning Using Cluster Beams -- Electrostatic Methods for Cleaning -- Wipers for Cleaning -- Projectile Cleaning</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces (Technology) / Cleaning</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surface contamination</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kontamination</subfield><subfield code="0">(DE-588)4032272-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Reinigungsverfahren</subfield><subfield code="0">(DE-588)4391913-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Teilchen</subfield><subfield code="0">(DE-588)4059317-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Beschichtung</subfield><subfield code="0">(DE-588)4144863-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oberfläche</subfield><subfield code="0">(DE-588)4042907-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Oberfläche</subfield><subfield code="0">(DE-588)4042907-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Beschichtung</subfield><subfield code="0">(DE-588)4144863-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Kontamination</subfield><subfield code="0">(DE-588)4032272-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Reinigungsverfahren</subfield><subfield code="0">(DE-588)4391913-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Teilchen</subfield><subfield code="0">(DE-588)4059317-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kohli, Rajiv</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mittal, K. L.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9781437778854</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-CEN</subfield><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FLA_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024689308</subfield></datafield></record></collection> |
id | DE-604.BV039829304 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T00:12:19Z |
institution | BVB |
isbn | 9781437778854 1437778852 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024689308 |
oclc_num | 713322613 |
open_access_boolean | |
owner | DE-1046 DE-1028 |
owner_facet | DE-1046 DE-1028 |
physical | 1 Online-Ressource (1 online resource (xiii, 243 p.)) |
psigel | ZDB-33-CEN ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD |
publishDate | 2011 |
publishDateSearch | 2011 |
publishDateSort | 2011 |
publisher | Elsevier |
record_format | marc |
spelling | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal Methods for removal of particle contaminants Amsterdam Elsevier c2011 1 Online-Ressource (1 online resource (xiii, 243 p.)) txt rdacontent c rdamedia cr rdacarrier The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc Aqueous Methods -- Megasonic Cleaning -- Hydrodynamic Removal of Particles -- Brush Cleaning -- Laser Methods for Cleaning -- CO b2 s Pellet Cleaning -- Cleaning Using Acoustic Fields -- Precision Cleaning Using Cluster Beams -- Electrostatic Methods for Cleaning -- Wipers for Cleaning -- Projectile Cleaning Includes bibliographical references and index Surfaces (Technology) / Cleaning Surface contamination Kontamination (DE-588)4032272-5 gnd rswk-swf Reinigungsverfahren (DE-588)4391913-3 gnd rswk-swf Teilchen (DE-588)4059317-4 gnd rswk-swf Beschichtung (DE-588)4144863-7 gnd rswk-swf Oberfläche (DE-588)4042907-6 gnd rswk-swf Oberfläche (DE-588)4042907-6 s Beschichtung (DE-588)4144863-7 s Kontamination (DE-588)4032272-5 s Reinigungsverfahren (DE-588)4391913-3 s Teilchen (DE-588)4059317-4 s DE-604 Kohli, Rajiv Sonstige oth Mittal, K. L. Sonstige oth http://www.sciencedirect.com/science/book/9781437778854 Verlag Volltext |
spellingShingle | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants Surfaces (Technology) / Cleaning Surface contamination Kontamination (DE-588)4032272-5 gnd Reinigungsverfahren (DE-588)4391913-3 gnd Teilchen (DE-588)4059317-4 gnd Beschichtung (DE-588)4144863-7 gnd Oberfläche (DE-588)4042907-6 gnd |
subject_GND | (DE-588)4032272-5 (DE-588)4391913-3 (DE-588)4059317-4 (DE-588)4144863-7 (DE-588)4042907-6 |
title | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
title_alt | Methods for removal of particle contaminants |
title_auth | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
title_exact_search | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
title_full | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal |
title_fullStr | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal |
title_full_unstemmed | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal |
title_short | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
title_sort | developments in surface contamination and cleaning volume three methods for removal of particle contaminants |
topic | Surfaces (Technology) / Cleaning Surface contamination Kontamination (DE-588)4032272-5 gnd Reinigungsverfahren (DE-588)4391913-3 gnd Teilchen (DE-588)4059317-4 gnd Beschichtung (DE-588)4144863-7 gnd Oberfläche (DE-588)4042907-6 gnd |
topic_facet | Surfaces (Technology) / Cleaning Surface contamination Kontamination Reinigungsverfahren Teilchen Beschichtung Oberfläche |
url | http://www.sciencedirect.com/science/book/9781437778854 |
work_keys_str_mv | AT kohlirajiv developmentsinsurfacecontaminationandcleaningvolumethreemethodsforremovalofparticlecontaminants AT mittalkl developmentsinsurfacecontaminationandcleaningvolumethreemethodsforremovalofparticlecontaminants AT kohlirajiv methodsforremovalofparticlecontaminants AT mittalkl methodsforremovalofparticlecontaminants |