Optical imaging in projection microlithography:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, WA
SPIE Press
2005
|
| Series: | Tutorial texts in optical engineering
66 |
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XIX, 254 S. Ill., graph. Darst. |
| ISBN: | 0819458295 |
Staff View
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Record in the Search Index
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| author | Wong, Alfred Kwok-Kit |
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| id | DE-604.BV039731311 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:09:56Z |
| institution | BVB |
| isbn | 0819458295 |
| language | English |
| lccn | 2005042537 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024579198 |
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| physical | XIX, 254 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | SPIE Press |
| record_format | marc |
| series | Tutorial texts in optical engineering |
| series2 | Tutorial texts in optical engineering |
| spelling | Wong, Alfred Kwok-Kit Verfasser aut Optical imaging in projection microlithography Alfred Kwok-Kit Wong Bellingham, WA SPIE Press 2005 XIX, 254 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Tutorial texts in optical engineering 66 Includes bibliographical references and index Microlithography Imaging systems Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Tutorial texts in optical engineering 66 (DE-604)BV005345161 66 |
| spellingShingle | Wong, Alfred Kwok-Kit Optical imaging in projection microlithography Tutorial texts in optical engineering Microlithography Imaging systems Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 |
| title | Optical imaging in projection microlithography |
| title_auth | Optical imaging in projection microlithography |
| title_exact_search | Optical imaging in projection microlithography |
| title_full | Optical imaging in projection microlithography Alfred Kwok-Kit Wong |
| title_fullStr | Optical imaging in projection microlithography Alfred Kwok-Kit Wong |
| title_full_unstemmed | Optical imaging in projection microlithography Alfred Kwok-Kit Wong |
| title_short | Optical imaging in projection microlithography |
| title_sort | optical imaging in projection microlithography |
| topic | Microlithography Imaging systems Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Microlithography Imaging systems Lithografie Halbleitertechnologie |
| volume_link | (DE-604)BV005345161 |
| work_keys_str_mv | AT wongalfredkwokkit opticalimaginginprojectionmicrolithography |