Optical imaging in projection microlithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, WA
SPIE Press
2005
|
| Schriftenreihe: | Tutorial texts in optical engineering
66 |
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | XIX, 254 S. Ill., graph. Darst. |
| ISBN: | 0819458295 |
Internformat
MARC
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| 020 | |a 0819458295 |c (pbk.) |9 0-8194-5829-5 | ||
| 024 | 3 | |a 9780819458292 | |
| 035 | |a (OCoLC)57594753 | ||
| 035 | |a (DE-599)BSZ120521369 | ||
| 040 | |a DE-604 |b ger | ||
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| 100 | 1 | |a Wong, Alfred Kwok-Kit |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Optical imaging in projection microlithography |c Alfred Kwok-Kit Wong |
| 264 | 1 | |a Bellingham, WA |b SPIE Press |c 2005 | |
| 300 | |a XIX, 254 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Tutorial texts in optical engineering |v 66 | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Imaging systems | |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 830 | 0 | |a Tutorial texts in optical engineering |v 66 |w (DE-604)BV005345161 |9 66 | |
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Datensatz im Suchindex
| _version_ | 1804148614178537472 |
|---|---|
| any_adam_object | |
| author | Wong, Alfred Kwok-Kit |
| author_facet | Wong, Alfred Kwok-Kit |
| author_role | aut |
| author_sort | Wong, Alfred Kwok-Kit |
| author_variant | a k k w akk akkw |
| building | Verbundindex |
| bvnumber | BV039731311 |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)57594753 (DE-599)BSZ120521369 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV039731311 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:09:56Z |
| institution | BVB |
| isbn | 0819458295 |
| language | English |
| lccn | 2005042537 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024579198 |
| oclc_num | 57594753 |
| open_access_boolean | |
| owner | DE-M347 |
| owner_facet | DE-M347 |
| physical | XIX, 254 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | SPIE Press |
| record_format | marc |
| series | Tutorial texts in optical engineering |
| series2 | Tutorial texts in optical engineering |
| spelling | Wong, Alfred Kwok-Kit Verfasser aut Optical imaging in projection microlithography Alfred Kwok-Kit Wong Bellingham, WA SPIE Press 2005 XIX, 254 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Tutorial texts in optical engineering 66 Includes bibliographical references and index Microlithography Imaging systems Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Tutorial texts in optical engineering 66 (DE-604)BV005345161 66 |
| spellingShingle | Wong, Alfred Kwok-Kit Optical imaging in projection microlithography Tutorial texts in optical engineering Microlithography Imaging systems Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 |
| title | Optical imaging in projection microlithography |
| title_auth | Optical imaging in projection microlithography |
| title_exact_search | Optical imaging in projection microlithography |
| title_full | Optical imaging in projection microlithography Alfred Kwok-Kit Wong |
| title_fullStr | Optical imaging in projection microlithography Alfred Kwok-Kit Wong |
| title_full_unstemmed | Optical imaging in projection microlithography Alfred Kwok-Kit Wong |
| title_short | Optical imaging in projection microlithography |
| title_sort | optical imaging in projection microlithography |
| topic | Microlithography Imaging systems Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Microlithography Imaging systems Lithografie Halbleitertechnologie |
| volume_link | (DE-604)BV005345161 |
| work_keys_str_mv | AT wongalfredkwokkit opticalimaginginprojectionmicrolithography |